• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.366-367
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• 2005

The effect of benzotriazole (BTA) on the adhesion force of silica and pad particle on Cu/TEOS wafer surfaces was investigated with and without the addition of BTA. Cu-BTA had the isoelectric point (IEP) at around pH 4$\sim$8. Pad particles were more positive zeta potentials than silica. The adhesion force initially decreased of silica and pad particle on Cu surfaces when BTA was added. However, the more BTA was added, the more adhesion force gradually increased with the increase of BTA concentrations. Then the adhesion force of pad particle was higher than silica. And TEOS didn't resulted increasing adhesion force like Cu when BTA was added in DI water.

• Tribology and Lubricants
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• v.16 no.6
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• pp.415-424
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• 2000

The use of magnetoresistive (MR) head requires much tighter control of particle contamination in a drive since loose particles on the disk surface will generate thermal asperities (TA). In this study, a spinoff test was performed to investigate the adhesion and removal capability of a particle to disk surface. Numerical simulation was also performed to investigate dominant factor of particle detachment and to support experimental results. It was shown that particles are detached from the disk surface by the moment derived from the centrifugal force and the drag force and that the centrifugal force and capillary force are the dominant force, which determines spin-off of a particle on the disk surface. Removal of particles smaller than several micrometers, which are the main source of TA generation, is extremely difficult since the adhesion forces exceed the centrifugal force. Lubricant types and manufacturing process also influence the particle removal. Lower bonding ratio and lower viscosity of the lubricant will help to increase the removal rate of the particles from the disk surface.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.561-562
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• 2006

The purpose of this study was to investigate the root cause of adhesion of silica and ceria particles during Poly-Si, TEOS, and SiN CMP process, respectively. The zeta-potentials of abrasive particles and wafers were observed negative surface charges in the alkaline solutions. SAC and STI patterned wafers have intermediate values of their composition surface's zeta potentials. The theoretical interaction force and adhesion force of silica and ceria particle were calculated in solution with acidic, neutral and alkaline pH. A stronger attractive force was calculated for silica and ceria particles on wafers in acidic solutions than in alkaline solutions. The theoretical interaction forces of the SAC and STI patterned wafers have intermediate values of their constitution wafer's values. The adhesion forces is observed lower values in alkaline solutions than in acidic solutions. And the ceria particle has lower adhesion than that of the silica particle.

• Journal of the Korean institute of surface engineering
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• v.35 no.3
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• pp.165-171
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• 2002

TiN coating were deposited onto different WC-Co substrates using arc ion plating (AIP) technique. The structure and morphology for the deposited coating were characterized by x-ray diffraction (XRD) and scanning electron microscopy (SEM). The adhesion behavior of the deposited TiN coating was investigated with a conventional scratch test. Effects of WC particle size and Co content on the adhesion strength between the deposited TiN coating and substrate were studied. During the scratch test, the value of critical load was dependent of WC particle size and Co content on substrate. As the WC particle size and Co content on substrate decreased, the critical load increased. The highest critical load, approximately 110N, was obtained at WC particle size of 1$\mu\textrm{m}$ and Co content of 10wt.%.

• Journal of Biomedical Engineering Research
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• v.43 no.2
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• pp.94-101
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• 2022

Recent advancement of micro/nano technology enables the development of diverse micro/nano particle-based delivery systems. Due to the multi-functionality and engineerability, particle-based delivery system are expected to be a promising method for delivery to the target cell. Since the particle-based delivery system should be delivered to the various kinds of target cell, including the cardiovascular system, cancer cell etc., it is frequently decorated with multiple kinds of targeting molecule(s) to induce specific interaction to the target cell. The surface decorated molecules interact with the cell surface expressed molecule(s) to specifically form a firm adhesion. Thus, in this study, the probability of adhesion is estimated to predict the possibility to form a firm adhesion for the multi-ligand decorated particle-based delivery system.

• Journal of the Korean Society of Clothing and Textiles
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• v.22 no.8
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• pp.1132-1140
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• 1998

The adhesion and removal of $\alpha$-Fe2O3 particles on the from PET fabric in NPE solution with different ionic strength were discussed in terms of interaction of surface charge of particle and substrate. The adhesion of $\alpha$-Fe2O3 particles to PET fabric and its removal from PET fabric were carried out by using water bath shaker and Terg-O-Tometer under various solution conditions. The ζ potential of PET fiber and $\alpha$-Fe2O3 particles in the detergent solution were measured by steaming potential and microelectrophoresis methods, respectively. The adhesion and removal amount of $\alpha$-Fe2O3 particles on the from PET fabric increased with increasing time of adhesion and removal, and the rates of adhesion and removal were high at the initial stage of adhesion and removal, and then the rates decreased with passing time. The adhesion and removal amount of $\alpha$-Fe2O3 particles on and from PET fabric increased with increasing pH of solution regardless ionic strength. The tendencies and degree of adhesion and removal were very similar regardless interaction of surface charge of particle and fiber. Therefore, in the presence of a surfactant and electrolyte, the influence of interaction of surface charge of particle and substrate on the detergency of particulate soil was small.

• Laser Solutions
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• v.6 no.3
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• pp.29-35
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• 2003

In semiconductor processing, there are two types of particle contaminated onto the wafer, i.e. dry and wet state particles. In order to evaluate the cleaning performance of laser shock wave cleaning method, the removal of 1 m sized alumina particle at different particle conditions from silicon wafer has been carried out by laser-induced shock waves. It was found that the removal efficiency by laser shock cleaning was strongly dependent on the particle condition, i.e. the removal efficiency of dry alumina particle from silicon wafer was around 97％ while the efficiencies of wet alumina particle in DI water and IPA are 35％ and 55％ respectively. From the analysis of adhesion forces between the particle and the silicon substrate, the adhesion force of the wet particle where capillary force is dominant is much larger than that of the dry particle where Van der Waals force is dominant. As a result, it is seen that the particle in wet condition is much more difficult to remove from silicon wafer than the particle in dry condition by using physical cleaning method such as laser shock cleaning.

• Macromolecular Research
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• v.14 no.5
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• pp.517-523
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• 2006

The effects of particle content, size and shape on the thermal conductivity (k) and adhesion properties of thermally conductive, pressure-sensitive adhesives (PSAs) were investigated. The matrix resins were thermally crosslinkable, 2-ethylhexyl acrylic polyol and ultraviolet (UV)-curable, random copolymer consisting of acrylic oligomer and various acrylates. We found that k increased with increasing diameter and particle aspect ratio, and was further enhanced due to the reduction of the interfacial thermal barrier when the coupling agent, which increases the adhesion between particles and the matrix resin, was used. On the other hand, adhesion properties such as peel strength and tack of the thermally crosslinkable resin decreased sharply with increasing particle content. However, for UV curable resin, increased particle addition inhibited the decrease in adhesion properties.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.75-80
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• 2005

Study for toner adhesion is known as an important role in electrophotography. In this research, a centrifugal detachment method was used to measure the adhesion force of several hundred particles simultaneously and to determine its sensitivity to particle size. For uncharged toner particles, we estimated the van der Waals force based on the centrifugal farce experiments. Then for charged toner particles, the centrifugal force experiments were carried out. The difference between the results for charged toner particles and the results for uncharged toner particles was compared with the image force calculated from a model which assumed that the toner charge was located at the center of the particle. In the calculations, experimental data obtained by E-SPART (Electrical- Single Particle Aerodynamic Relaxation Time) analyzer were used. The adhesion force of micro-sized toner particles deposited on the DR surface was found to be approximately 1${\~}$3 nN.

• Transactions of the Society of Information Storage Systems
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• v.2 no.2
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• pp.105-110
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• 2006

Study for toner adhesion is 3non as an important role in electrophotography. In this research, a centrifugal detachment method was used to measure the adhesion force of several hundred particles simultaneously and to determine its sensitivity to particle size. For uncharged toner particles, we estimated the van der Waals force based on the centrifugal force experiments. Then for charged toner particles, the centrifugal force experiments were carried out. The difference between the results for charged toner particles and the results for uncharged toner particles was compared with the image force calculated from a model which assumed that the toner charge was located at the center of the particle. In the calculations, experimental data obtained by E-SPART (Electrical-Single Particle Aerodynamic Relaxation Time) analyzer were used. The adhesion force of micro-sized toner particles deposited on the DR surface was found to be approximately $1{\sim}3$ nN.