• Journal of Mechanical Science and Technology
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• v.19 no.2
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• pp.649-654
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• 2005

This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the JSR (negative PR) molding process, and etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and $30{\mu}m$, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micro pump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about $0.36\;{\mu}L/sec$ at 2 Hz for the zero hydraulic pressure difference when the 3-phase input voltage is 20 V.

• The KSFM Journal of Fluid Machinery
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• v.12 no.4
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• pp.37-43
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• 2009

In the present study, the flow characteristics of a peristaltic micropump were numerically analyzed. A channel wall motion of the micropump was simulated using a moving mesh technique. A sine wave pattern was assumed to simulate the peristaltic motion of wall. The present numerical method was verified by comparing the result with the available numerical data. The effects of the operating conditions which include the maximum displacement and frequency of the channel wall and the phase difference between top and bottom walls on the flow characteristics were investigated. From these numerical results, the pressure-flowrate characteristic curve was obtained for various maximum displacement and frequencies.

• International Journal of Aeronautical and Space Sciences
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• v.12 no.1
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• pp.69-77
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• 2011

A peristaltic micropump with lightweight piezo-composite actuator (LIPCA) membrane valves is presented. The micropump contained three cylinder chambers that were connected by microchannels and two active membrane valves. A circular miniature LIPCA was developed and manufactured to be used as actuating diaphragms. The LIPCA diaphragm acted as an active membrane valve that alternate between open and closed positions at the inlet and outlet in order to produce high pumping pressure. In this LIPCA, a lead zirconium titanate ceramic with a thickness of 0.1 mm was used as an active layer. The results confirmed that the actuator produced a large out-of-plane deflection. During the design process, a coupled field analysis was conducted in order to predict the actuating behavior of the LIPCA diaphragm; the behavior of the actuator was investigated from both a theoretical and experimental perspective. The active membrane valve concept was introduced as a means for increasing pumping pressure, and microelectromechanical system techniques were used to fabricate the peristaltic micropump. The pumping performance was analyzed experimentally in terms of the flow rate, pumping pressure and power consumption.

• KSTLE International Journal
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• v.3 no.2
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• pp.101-109
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• 2002

This paper presents the fabrication and performance inspection of a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of base plate, mid plate, top plate and connection tubes fur inlet and outlet. In detail, the base plate is composed of two diffuser nozzles and three chambers, the mid plate consists of a glass diaphragm for the volumetric change of the pumping chamber. The inlet and outlet tubes are connected at the top plate and the actuator fur pressing the diaphragm is located beneath the top plate. The micropump is fabricated on the silicon wafer by DRIE (Deep Reactive ion Etching) process. The pumping performances are tested by the pneumatic test rig and compared with the simulated results fur various dimensions of diffuser nozzles. The pumping characteristics of the micropump by the volumetric change at the pumping chamber is modeled and simulated by the commercial software of FLOW-3D. The simulated results shows that reverse flow is the inherent phenomena in the diffuser nozzle type micropump, but it can be reduced at the dual pumping chamber model.

• Journal of Sensor Science and Technology
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• v.22 no.6
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• pp.428-432
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• 2013

This paper described the development of electrostatically driven peristaltic micropump. The proposed micropump consists of a flexible membrane and a single chamber which electrodes are inserted. The single chamber is divided into smaller cells by the electrodes. The fabricated micropump was operated with four electrodes in the membrane and a various phase sequencing actuation. We studied the changes in the flow rate corresponding to the actuating signal applied to the micropump under the zero hydraulic pressure difference between lnlet port and outlet port. The pump was operated from 60 to 130 V. Whereas the maximum flow rate in basic actuating signal is about 83 ${\mu}1/min$ at 15 Hz, the maximum flow rate in optimized actuating signal is about 114 ${\mu}l/min$ at 10 Hz.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.2
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• pp.195-202
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• 2004

This paper presents the fabrication and evaluation of mechanical behavior for a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, the middle plate, the upper plate and the tube that connects inlet and outlet of the pump. The lower plate includes the channel and the chamber, and the plain middle plate are made of glass and actuated by the piezoelectric translator. Channels and a chamber on the lower plate are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The upper plate does the roll of a pump cover and has inlet/outlet/electric holes. Three plates are laminated by the aligner and bonded by the anodic bonding process. Flow simulation is performed using error-reduced finite volume method (FVM). As results of the flow simulation and experiments, the single chamber pump has severe flow problems, such as a backflow and large fluctuation of a flow rate. It is proved that the double-chamber micropump proposed in this paper can reduce the drawback of the single-chamber one.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2441-2444
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• 2003

This paper describes fabrication of a micro cell counter integrated with an oxygen micropump and Sephadex G-25 beads counting experiment. The device utilized a phototransistor, microwindow, and light source of microscope for beads detection. Microheater and microchannel were used for pumping and guiding of beads to the microwindow. Counting capability of the device was tested with a peristaltic pump and the measured signals (${\sim}10\;mV$) with oscilloscope showed peak shape when beads passed the microwindow. Pumping of beads by the oxygen micropump was carried out by heating paraffin, which enveloped manganese dioxide (catalyst), to trigger the decomposition of hydrogen peroxide into water and oxygen. It lasted for 5 min with $7\;{\mu}l$ of wt. 30 % hydrogen peroxide. Beads counting by oxygen micropump showed peaks ($2{\sim}20\;mV$) with $30\;{\mu}l$ of beads sample and the number of peaks by magnitude was acquired.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.2093-2095
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• 2004

본 논문은 압전소자를 구동장치로 사용한 마이크로 펌프의 제작과 실험에 관한 논문이다. 마이크로 펌프의 상부기판은 polydimethyl siloxane(PDMS)을 소재로 미세유로에 상시 닫힌 밸브가 일체화된 구조로 제작되었고, 하부기판은 polymethyl methacrylate(PMMA)를 소재로 3개의 압전 디스크가 구동기로 부착되었다. 최종적으로 상, 하부 기판은 액상 PUMS로 접합하여 제작했다. 구동기의 입력신호는 6상으로 구형파를 인가하여 연동구동하며 주파수와 전압을 가변하면서 유량을 측정하였다. 구동 주파수가 0.167 Hz이고 전압이 20 V일 때, 마이크로펌프의 1회 토출량은 104 nl이고, 유량은 1.04${\mu}{\el}$/min이다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.185-185
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.448-448
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• 2013

최근 생물학적 분석 기구에서 시료를 처리, 분리, 검출, 샘플링 또는 분석하기 위해 사용되는 마이크로펌프(Micropump)에 대한 관심이 높아지고 있다. 또한 전자소자의 성능과 신뢰성의 증진을 위한 전자소자의 열 문제를 해결하기 위해 냉각장치로 마이크로 펌프가 적용되기도 한다. 그 외에도 마이크로펌프는 다양한 분야에 응용이 가능하다. 마이크로펌프는 작동 방식에 따라 압전형, 공압형, 열공압형, 연동형 등의 여러 종류로 분류되고 있다. 그중에서도 최근에는 연동형 마이크로 펌프의 개발이 각광받고 있다. 기존의 연동형 펌프들은 다중 챔버를 가지고 있으며, 각각의 챔버 내에서 Dead volume이 많이 발생할 뿐만 아니라 이상적인 연동운동과는 차이가 많이 나는 문제점을 가지고 있다. 또한 압전방식과 열공압방식은 느린 응답성으로 인해 효율적인 유체 이동이 어렵다. 본 논문에서는 이상적인 연동운동을 구현하기 위하여 기존의 연동형 펌프의 단점을 보완하고, 하나의 챔버에 다중전극 구조를 가지는 정전기력방식의 연동형 펌프를 개발하였다. 정전기력방식으로 펌프를 구동함으로써, 저전력으로 펌프구동이 가능하며, 하나의 챔버에 다중전극을 설치함으로써 이상적인 연동운동을 재현하였다. 그리고 Dead volume을 최소화 하였다. 또한, 빠른 반응속도로 인해 효율적인 유체 이동을 실현시킬 수 있었다. 본 연구에서 제안된 마이크로 펌프의 구성은 크게 챔버, 박막, Inlet/outlet hole으로 구성되었다. 챔버는 Si-wafer에 wet etching 공정으로 제작 하였고 그 위에 알루미늄 박막을 200 nm 증착시켰다. 챔버는 가로 32 mm, 세로 5 mm, 깊이는 $15{\mu}m$, 부피는 $200{\mu}l$으로 제작되었다. 박막은 폴리이미드(polyimide)를 사용하여 $3{\mu}m$의 두께로 제작 되었으며, 폴리이미드 박막 사이에는 200 nm 두께의 4개의 알루미늄 박막 전극을 삽입시켰다. 삽입된 4개의 전극에 개별적인 전기신호를 보냄으로써 연동운동이 가능하다. Inlet/outlet hole은 직경 2 mm의 크기로 제작되었으며, 튜브를 연결하여 유체가 흐를 수 있는 체널을 형성하였다. 제작된 마이크로 펌프의 구동전압은 115 V이며, 인가되는 주파수를 1 Hz~100 KHz까지 변화시켜 유량을 측정하였다. 작동 유체는 공기이며, 유량측정은 튜브 내에 물방울을 삽입하여 시간에 따른 이동거리를 관측하였다. 측정결과 2.2 KHz에서 2.4 mm/min의 가장 높은 유량을 확인할 수 있었다. 본 연구를 통해 제안된 연동형 마이크로펌프는 이상적인 연동운동이 가능함으로써 기존의 연동형 방식의 문제점을 보완하였으며, 생명과학, 의학, 화학 등의 분야에서 적용이 가능하리라 기대된다.