• Korean Journal of Optics and Photonics
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• v.18 no.5
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• pp.303-308
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• 2007

We report here on the application of a digital holographic microscope as a metrology tool for the inspection and the micro-topography reconstruction of different micro-structures of phase shift photo-mask (PSM). The lithography by phase shift photo-mask uses the interference and the pattern of the PSM is not imaged by general optical microscope. The technique allows us to obtain digitally a high-fidelity surface topography description of the phase shift photo-mask with only one hologram image acquisition, allowing us to have relatively simple and compact set-ups able to give quantitative information of PSM.

• Journal of the Optical Society of Korea
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• v.6 no.4
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• pp.180-184
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• 2002

In this study, we investigated mask errors, photo errors with attenuated phase shift mask and off-axis illumination, and etch errors in dry etch conditions. We propose that total process proximity correction (TPPC), a concept merging every process step error correction, is essential in a lithography process when minimum critical dimension (CD) is smaller than the wavelength of radiation. A correction rule table was experimentally obtained applying TPPC concept. Process capability of controlling gate CD in DRAM fabrication should be improved by this method.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.41 no.2
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• pp.89-98
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• 2004

In this paper, we implement a digital holographic security card system that combines digital holographic memory using random phase encoded reference beams with electrical biometrics. Digitally encoded data including a document, a picture of face, and a fingerprint are recorded by multiplexing of holographic memory. A random phase mask encoding reference beams are used as a decoded key to protect illegal counterfeit. As a result, we can achieve a raw BER of 3.6${\times}$10-4 and shift selectivity of 4${\mu}{\textrm}{m}$ using the 2D random phase mask. Also, we develop a recording pattern and image processing which are suitable for a low cost reader without a position sensing photo-detector for real time data extraction and remove danger of fraud from unauthorized person by comparing the reconstructed holographic data with the live fingerprint data.