• Title/Summary/Keyword: Piezo actuator

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Design of Controller Using the Piezo Actuator (피에죠 엑츄에이터를 이용한 나노 구동 제어기 설계)

  • 유상훈;이충우;서상민;정정주;김대용
    • Proceedings of the IEEK Conference
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    • 2003.07c
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    • pp.2811-2814
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    • 2003
  • 본 논문에서는 Sub-nano 수준의 위치정밀도와 분해능을 갖는 Piezo actuator 의 제어기 설계를 목적으로 하였다. 이산 시간 상태 공간에서의 Piezo actuator를 이용한 1 축 스테이지 드라이브 시스템 SISO 제어기를 설계하였다. Piezo actuator 의 소재 자체의 특성으로는 Hysteresis 가 있으며, 이는 정상상태에서 Piezo actuator 의 위치 오차를 발생하는 주요 원인이 된다. 제어기의 설계는 극점 배치 방법을 기본으로 하여 Hysteresis 에 대한 보상을 목적으로 적분제어방식과 외란 추정기를 각각 적용하였다. 모의실험을 통하여 제어기의 설계 및 시뮬레이션 하였으며, Hysteresis 에 대한 보상이 이루어짐을 보았고, 실험을 통하여 이를 증명하였다.

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Design of a Linear Motor using Piezoelectric actuator (압전 소자를 이용한 선형 모터 설계 및 제작)

  • Jo, Jae-Uk;Hwang, Jai-Hyuk;Kim, Byung-Kyu
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.38 no.9
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    • pp.869-874
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    • 2010
  • Recently, a piezo actuator based linear motor has been actively studied because of its higher power density, compactness and quick response. However, the characteristic of small displacement makes the application of a piezo actuator limitative. In order to overcome this limitation, some actuation mechanisms using a piezo actuator are designed by bi-metal composite or more than two piezo actuators. Therefore, it enables to generate large displacement and have high resolution. In the proposed piezo motor, we have designed a bi-directional linear motor that can be operated by only one piezo actuator. In addition, it is activated with low frequency of the applied voltage, since, we utilize first mode shape of structure of motion generator to vibrate. Finally, moving direction can be simply controlled by changing the ratio of input frequency to natural frequency of structure of motion generator.

Analysis of Hydraulic Characteristics of High Pressure Injector with Piezo Actuator (피에조 액츄에이터 적용 고압 인젝터의 유압 동특성 해석)

  • Lee, Jin-Wook;Min, Kyoung-Doug
    • Transactions of the Korean Society of Automotive Engineers
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    • v.14 no.4
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    • pp.164-173
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    • 2006
  • In the electro-hydraulic injector for the common rail Diesel fuel injection system, the injection nozzle is being opened and closed by movement of a injector's needle which is balanced by pressure at the nozzle seat and at the needle control chamber, at the opposite end of the needle. In this study, the piezo actuator was considered as a prime movers in high pressure Diesel injector. Namely a piezo-driven Diesel injector, as a new method driven by piezoelectric energy, has been applied with a purpose to develop the analysis model of the piezo actuator to predict the dynamics characteristics of the hydraulic component(injector) by using the AMESim code. Aimed at simulating the hydraulic behavior of the piezo-driven injector, the circuit model has been developed and verified by comparison with the experimental results. As this research results, we found that the input voltage exerted on piezo stack is the dominant factor which affects on the initial needle behavior of piezo-driven injector than the hydraulic force generated by the constant injection pressure. Also we know the piezo-driven injector has more degrees of freedom in controlling the injection rate with the high pressure than a solenoid-driven injector.

Development of Scent Display Device using Micro-pore Piezo Actuator (마이크로 다공성 압전 진동자를 이용한 발향장치 설계)

  • Lee, Young-Joon;Lim, Seung-Ju;Kim, Min-Ku;Lee, Hae-Lyong;Kim, Jeong-Do
    • Journal of Sensor Science and Technology
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    • v.25 no.6
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    • pp.399-405
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    • 2016
  • Scent diffuser using micro-pore piezo actuator achieved a commercial success because of its cheap production cost, but it is easy to be use for IT-based contents due to difficulty of scent intensity control. To solve this problem, we control the emission amount of scent diffuser by changing amplitude and frequency of input voltage applied to micro-pore piezo actuator. And, we analyzed the effect of density of cotton core on emission amount and a relationship between hole-size of mesh in piezo actuator and viscosity of scents to design a mechanically optimal scent device.

Computer Simulation and Control performance evaluation of Ultra Precision Positioning Apparatus using Piezo Actuator (Piezo Actuator를 이용한 초정밀 위치결정기구의 Computer Simulation 및 제어 성능평가)

  • 김재열;김영석;곽이구;한재호
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.11a
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    • pp.118-122
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    • 2000
  • Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. For composition of this technology, the development of system with high speed and high resolution is needed. At start point and end position vibration must be repressed on this system for composition of position control. This vibration is arisen nose, is increased setting time, is reduced accuracy. Especially, repressed for the lead with high speed. The small actuator with high speed and high resolution is need to repression against this residual vibration. This actuator is, for example, piezo actuator, piezoelectric material that converting from electronic signal to mechanical force is adequate material, beacause of control of control to position and force. In this study, piezo electric material is used to actuator, ultra precision positioning apparatus with stage of hinge structure is designed, simulation is performed, control performance is tested by producing apparatus. For easy usage and stability in industrial field, we perform to simulation and to position control test by digital PID controller.

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Study on Self-moving Cell Linear Motor Using Piezo-stack actuators (적층 압전 작동기를 이용한 Self-moving Cell 선형모터 연구)

  • 이진호;김재환;최관영
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2001.11a
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    • pp.371-375
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    • 2001
  • The concept of a new linear motor that uses piezo-stack actuator is demonstrated. The working principle is far different from the conventional inchworm motor. This motor is based on the self-moving cell concept. The linear motor has three cells and each cell is constructed with one piezo-stack actuator and a shell structure. A cell train is constructed by connecting these cells and the cell train is fitted into a guide way with a proper interference. The cell train moves along the guide way, by activating each cell in succession. The moving motion of the motor is tested. Since this linear motor uses piezo-stack actuator with unified clamping cell, it can produce fast speed, high resolution and large push force.

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Piezo-Composite Actuator for Control Surface of a Small Unmanned Air Vehicle (소형 무인 비행체 조종면 작동용 압전 복합재료 작동기 연구)

  • Yoon, Bum-Soo;Park, Ki-Hoon;Yoon, Kwang-Joon
    • Composites Research
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    • v.27 no.2
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    • pp.47-51
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    • 2014
  • The purpose of the present study is to develop lightweight and simple smart actuators in order to replace conventional hydraulic/pneumatic actuators, and to apply the developed actuators to the actuation systems of a small unmanned air vehicle. This research describes the procedures of design, manufacturing of the piezo-composite actuator, and the performance evaluation. From the test results of the developed devices, we found the possibility of piezo-composite actuator could be used as a control surface of a small UAV system. We have designed and manufactured two kinds of piezo-composite actuators, unimorph actuator and bimorph actuator. The manufactured actuators were evaluated through the performance testes. It was found that the bimorph type actuator showed more linear angle change for the same excitation voltage variation than unimorph type. It is expected that piezo-composite actuator has a possibility to be used not only as a control surface of small unmanned flying vehicle but also as a control surface actuator of a guided missile fin through the miniaturization of power supply and control system.

An Earthworm-Like Locomotive Mechanism for Capsule Endoscopes Using PZT Actuator (PZT 구동기를 이용한 지렁이 이동방식의 캡슐형 내시경용 마이크로 로봇)

  • Jee Changyeol;Park Sukho;Yoon Seokjin;Kim Byungkyu;Park Jahng-hyon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.30 no.1 s.244
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    • pp.84-89
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    • 2006
  • A wireless capsule endoscope has been developed to replace the conventional endoscope. However, the commercialized capsule endoscope moves passively by peristaltic waves, which has some limitations for doctors to diagnose more thoroughly and actively. In order to solve this problem, a locomotive mechanism is proposed for wireless capsule endoscopes. Based on the tests of various actuators, a piezo actuator is selected as a micro actuator for capsule endoscope. In general, piezo actuators are known to have limited displacement with high voltage supply. In order to overcome the limitation of common piezo actuator, the impact based piezo actuator, is developed to realize long stroke up 11mm. By using the impact based piezo actuator, a prototype of an earthworm-like locomotive mechanism was developed. In addition, the proposed locomotive mechanism has engraved clamps mimicked the claw of an insect. The earthworm-like locomotive mechanism has 15 mm in diameter and 30mm under retraction stage and 41 mm under elongation stage in total length. Hollow space is allocated to comprise essential endoscope components such as a camera, a communication module, bio sensors, and a battery. For the feasibility test of proposed locomotive mechanism, a series of experiments were carried out including in-vitro tests. Based on results of the experiments, we conclude that the proposed locomotive mechanism is effective to be used for micro capsule endoscopes.

Dynamic Analysis of the Piezo-Actuator for a New Generation Lithography System (차세대 리소그라피 시스템을 위한 압전구동기의 동적 해석)

  • Park, Jae-Hak;Jung, Jong-Chul;Huh, Kun-Soo;Chung, Chung-Choo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.3
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    • pp.472-477
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    • 2003
  • A piezo-actuator is an important component for an E-beam lithography system. But it is very difficult to model its characteristics due to nonlinearities such as hysteresis and creep, to the input voltage. In this paper, one-axis micro stage with a piezo-actuator is modeled including the nonlinear properties. Hysteresis and creep are modeled as the first order differential equation and a time-dependent logarithmic function, respectively. The dynamic motion of the stage is also modeled as a mass-spring-damper system and the parameters are determined by utilizing the system identification technique. The simulation tool for a micro stage is constructed using the commercial software and its simulation results are compared with the experimental data.

Research for ultra precision linear motor by using piezo stack actuators (적층형 압전재료를 이용한 초정밀 선형 모터에 관한 연구)

  • 임장환;김재환
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2003.11a
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    • pp.649-654
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    • 2003
  • This paper is focused on the research of the ultra precision linear motor by using piezo stack actuators. The development of linear motor which can be controlled nano or micro scale is necessary for the precision manufacturing. Self-moving-cell principle is used for the design of linear motor Self-moving-cell linear motor is consisted of three cell structures, and each cell has two shells and one piezo-stack actuator. Each cell can do clamping and moving by two shell structures. The shell structure deformation by piezo stack actuator can move the linear motor by losing the clamping between the shall and guideway. This paper presents the design, manufacturing and test of the motor.

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