• Title/Summary/Keyword: Pitch tool polishing

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Deterministic Pitch Tool Polishing Using Tool Influence Function (드레이퍼 방식 연마기에서의 툴 영향 함수 기법)

  • Yi, Hyun-Su;Yang, Ho-Soon;Lee, Yun-Woo;Kim, Sug-Whan
    • Korean Journal of Optics and Photonics
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    • v.19 no.6
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    • pp.422-428
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    • 2008

  • The pitch tool provides superior surface roughness compared to other types of polishing tool. However, because of difficulty in handling the pitch tool, pitch tool polishing has rarely been analysed, which led many craftsman to eliminate the pitch tool from their experiences. We found that it was possible to use a pitch tool in the well-determined material removal after the completion of computer simulation and experiment. We could simulate the TIF of the pitch tool with 79% accuracy. Also, after five successive simulations of polishing process on a 280 mm optical flat, the surface p-v error was found to be reduced from $1{\mu}m$ to 168 nm.

  • https://doi.org/10.3807/HKH.2008.19.6.422 인용 PDF KSCI