• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.183-183
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• 2015

Arc in plasma processing chamber results in high current discharge marks and particles on wafers, but it is hard to identify or observe it during the proc ess. In this paper, we report the observations of plasma arc s during various plasma proc esses through a non-invasive optic al plasma monitoring system (OPMS) devised for the in-situ detec tion of abnormal discharge.

• Transactions on Electrical and Electronic Materials
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• v.14 no.2
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• pp.71-77
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• 2013

Advanced semiconductor manufacturing technology requires methods to maximize tool efficiency and improve product quality by reducing process variability. Real-time plasma process monitoring and diagnosis have become crucial for fault detection and classification (FDC) and advanced process control (APC). Additional sensors may increase the accuracy of detection of process anomalies, and optical monitoring methods are non-invasive. In this paper, we propose the use of a chromatic data acquisition system for real-time in-situ plasma process monitoring called the Plasma Eyes Chromatic System (PECS). The proposed system was initially tested in a six-inch research tool, and it was then further evaluated for its potential to detect process anomalies in an eight-inch production tool for etching blanket oxide films. Chromatic representation of the PECS output shows a clear correlation with small changes in process parameters, such as RF power, pressure, and gas flow. We also present how the PECS may be adapted as an in-situ plasma arc detector. The proposed system can provide useful indications of a faulty process in a timely and non-invasive manner for successful run-to-run (R2R) control and FDC.

• Nuclear Engineering and Technology
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• v.53 no.7
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• pp.2277-2288
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• 2021

To regulate the safety protocols in nuclear facilities, radioactive aerosols have been extensively researched to understand their health impacts. However, most measured particle-size distributions remain at low resolutions, with the particle sizes ranging from nanometer to micrometer. This study combines the high-resolution detection of 500 size classes, ranging from 6 nm to 10 ㎛, for aerodynamic diameter distributions, with a regional lung deposition calculation. We applied the new approach to characterize particle-size distributions of aerosols generated during the plasma arc cutting of simulated non-radioactive steel alloy wastes. The high-resolution measured data were used to calculate the deposition ratios of the aerosols in different lung regions. The deposition ratios in the alveolar sacs contained the dominant particle sizes ranging from 0.01 to 0.1 ㎛. We determined the distribution of various metals using different vapor pressures of the alloying components and analyzed the uncertainties of lung deposition calculations using the low-resolution aerodynamic diameter data simultaneously. In high-resolution data, the changes in aerosols that can penetrate the blood system were better captured, correcting their potential risks by a maximum of 42%. The combined calculations can aid the enhancement of high-resolution measuring equipment to effectively manage radiation safety in nuclear facilities.

• Journal of the korean academy of Pediatric Dentistry
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• v.32 no.4
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• pp.611-619
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• 2005

The aim of this study was to apply the quantitative light-induced fluorescence(QLF) and use of fluorescein-enhanced QLF method for quantitative assessment of early enamel demineralization in vitro, comparing effectiveness of light sources : argon laser, halogen lamp, light emitting diode (LED) and plasma arc lamp. Sixty extracted teeth were used, prepared by gentle pumicing and coating in an acid-resistant nail-varnish, except for an exposure to a demineralizing solution. Teeth were removed at regular intervals (24, 48 and 72hrs), air-dried and QLF image were taken. Mineral loss, as measured by difference of optical density, was recorded. For dyeenhanced QLF a 0.075% sodium fluorescein dye was applied after QLF examination and mineral loss was recorded. The following result were obtained : 1. Comparing with mean difference of optical density, plasma arc lamp was higher than other light sources in all group (p<0.05). 2. Comparing each group with mean difference of optical density, there was significant different using plasma are lamp and halogen lamp. 3. For use of dye-enhanced QLF, comparing with mean difference of optical density, plasma arc lamp were higher than other light sources in all group(p<0.05). 4. With this model dye-enhanced QLF compared with QLF in optical density, dye-enhanced QLF was higher than QLF in optical density. From the results presented in this paper, it was concluded that plasma light source was more effective compared with other light source for the detection and the quantification of early enamel caries.