• The Transactions of The Korean Institute of Electrical Engineers
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• v.65 no.12
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• pp.1992-1999
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• 2016

The plasma process is applied to various industrial fields such as high-tech IT industry, textiles and medical. Therefore, there is increasing interest in the plasma power supply, and demand for power devices of high efficiency and high power density is increased. Plasma power supply for process must solve the arc problem, when the plasma is unstable. The output capacitor is closely related to the arc problem. If the output capacitor is smaller, the damage from the arc problem is reduced. However, the small value of the output capacitor affects the operating characteristics of the power supply. In this paper, a LLC resonant converter is adopted, because it can achieve high efficiency and power density in the plasma DC power supply. However, due to the small value of the output capacitor, the converter is operated as a LLCC resonant converter. Therefore, a gain characteristic of LLCC resonant converter is analyzed by using the FHA (First Harmonic Approximation) in plasma power supply. Simulation and experimental results are presented to verify the characteristic analysis of LLCC Resonant Converter.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.61 no.3
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• pp.116-121
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• 2012

Recently, in the field of renewable energy such as solar cells including the semiconductor and display industries, thin film deposition process is being diversified. Furthermore, to deal with trend of making high-quality and fast, the high-capacity and output plasma power supply which can control high density plasma is required. The biggest problem is arc discharge caused by using high voltage power supply. Thus, the key function of plasma power supply is to prevent arc discharge and there is a need to maintain the possible minimum arc energy. In DC sputtering power supply, on a periodic basis (-)voltage powering up is able to significantly reduce arcing, as well as arc discharge prevention, and maintaining uniform charge density. This conventional method for powering up (-)voltage requires heavy mutual inductance of the transformer to avoid distortion problem of the output voltage. This study is about energy recovery circuit for arc discharge prevention in sputtering plasma power supply. By using energy recovery circuit, it is possible to reduce the mutual inductance and size of the transformer dramatically, prevent distortion of the output voltage and has a stable output waveform. This work was proved through simulation and experimental study.

• Journal of Industrial Technology
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• v.27 no.A
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• pp.157-162
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• 2007

This paper describes a power supply aimed at the production of plasma and its control method for a magnetron sputter in thin film coating process of PVD(Physical Vapor Deposition). Plasma load changes its impedance characteristic easily according to operating conditions and frequently produces electric arc. So. in this paper, a plasma power supply with improved output control performance in the transient state for the plasma load is presented. Also, it includes a strategy that can detect arc rapidly and reduce arc energy effectively into a load. The validity of the proposed power supply through experimentation on 20kW system was proved.

• Proceedings of the KIPE Conference
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• 2014.11a
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• pp.85-86
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• 2014

The paper presents a power supply of atmospheric-pressure plasma reactor based on SiC (Silicon Carbide) MOSFET resonant inverter. Thanks to the capacitive characteristic of capacitive coupling plasma reactor type, the LC series resonant inverter had been applied to take advantages of this topology with the implementation of SiC MOSFET power modules as switching power devices. Designation of gate driver for SiC MOSFET had been introduced by this paper. The 5kVp, 5kW power supply had also been verified by experimental results.

• Proceedings of the KIEE Conference
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• summer
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• pp.1205-1207
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• 2004

AC plasma power supply is used to control a ozone generator and a air pollution gas. AC plasma power supply is composed of power semiconductor switch devices and control board adapted SHE(Selected Harmonic Elimination) PWM method. AC plasma power supply with sinusoidal VVVF(variable voltage and variable frequency) is realized. Its output voltage range is from 0 [V] to 20[kV] and output frequency range is from 8[kHz] to 20[kHz]. Using proposed system, AC high voltage and high frequency discharge is tested in the DBD(dieletric barrier discharge) reactor, and the space distribution of a its non-thermal plasma is observed. In spite of the increasement of voltage and frequency, the proposed system have a stable operation characteristics. It is verified by the experimental results.

• Proceedings of the KIPE Conference
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• 2001.10a
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• pp.113-116
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• 2001

In this paper, the development of the LF power supply for dry scrubber is discussed. 1500kW, 100kHz LF power supply is designed and tested. The main power stage is used for the FB PWM inverter with an LC filter in the secondary circuit. The operation characteristics of LF power supply are verified by simulation and experimental results.

• Journal of Korean Society for Atmospheric Environment
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• v.16 no.3
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• pp.247-256
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• 2000

Basic characteristics of non-thermal plasma process to remove C2H4 and NO have been experimentally investigated with a packed-bed type reactor and an ac power supply. The performance of the non-thermal plasma generated by ac power supply was compared with that of a wire-plate type reactor equipped with a pulsed power supply. The result shows that the non-thermal plasma can be effectively generated with an AC power supply that can be easily fabricated with conventional techniques. In order to understand the basic reaction mechanisms of the non-thermal plasma process, parametric tests for different carrier gases(air and nitrogen) and for different reaction pathways have been performed. The test results show that O3 generated by non-thermal plasma plays an dominant role to oxidize C2H4 and NO over N and O radicals when these pollutant gases are carried by dry air under room temperature condition. Experimental observations, however, indicate that N and O radicals can significantly affect on the removal process of the pollutant gases under certain conditions.

• The Transactions of the Korean Institute of Power Electronics
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• v.14 no.1
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• pp.72-81
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• 2009

This paper presents quasi-resonant type high power factor ac power supply for atmospheric pressure plasma cleaning system adopting three phase PFC boost converter and it's control method. The presented ac power supply consists of single phase H-bridge inverter, step-up transformer for generating high voltage and three phase PFC boost converter for high power factor on source utility. Unlikely to the traditional LC resonant converter, the propose one has an inductor inside only. A single resonant takes place through the inside inductor and the capacitor from the plasma load modeled into two series capacitor and one resistance. The quasi-resonant can be achieved by cutting the switching signal when the load current decrease to zero. To obtain power control ability, the propose converter controlled by two control schemes. One is the changing output pulse period scheme in the manner of PFM(Pulse Frequency Modulation) control. On the other, to provide more higher power to load, the DC rail voltage is directly controlled by the 3-phase PFC boost converter. The significant merits of the proposed converter are the uniform power providing capability for high quality plasma generation and low reactive power in AC and DC side. The proposed work is verified through digital simulation and experimental implementation.

• The Transactions of the Korean Institute of Power Electronics
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• v.6 no.5
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• pp.394-399
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• 2001

In this Paper, the development of the power supply for dry scrubber is discussed. 1500w, 100kHz power supply Is designed and tested. The main power stage is used for the FB PWM inverter with an LC filter in the secondary circuit. The operation characteristics of power supply are verified by simulation and experimental results.

• The Transactions of the Korean Institute of Power Electronics
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• v.21 no.6
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• pp.514-524
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• 2016

This work suggests a study on 5 kW plasma power supply design and reactor capacitance estimation algorithm for a wide range of linear output control to operate a plasma reactor. The suggested study is designed to use a two-stage circuit and control the full-bridge circuit of the two-stage circuit using the buck converter output voltage of the single-stage circuit. The switching frequency of the full-bridge circuit is designed to operate through high-frequency switching and obtain maximum output using LC parallel resonance. Soft switching technique(ZVS) is used to reduce the loss caused by high-frequency switching, and duty control of the buck converter is applied to control a wide range of linear output. The internal capacitance of the reactor cannot easily be extracted, and thus, the reactor cannot be operated in an optimized resonant state. To address this issue, this work designs the internal capacitance of the reactor such that estimations can be performed with the developed reactor capacitance estimation algorithm applied to the internal capacitance of the reactor. A 5 kW plasma power supply is designed for a wide range of linear output control, and the validity of the study on the reactor capacitance estimation algorithm is verified.