• 한국세라믹학회지
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• 제49권4호
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• pp.328-332
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• 2012

Etch rates of Si and high purity SiC have been compared for various fluorocarbon plasmas. The relative plasma resistance of SiC, which is defined as the etch rate ratio of Si to SiC, varied between 1.4 and 4.1, showing generally higher plasma resistance of SiC. High resolution X-ray photoelectron analysis revealed that etched SiC has a surface carbon content higher than that of etched Si, resulting in a thicker fluorocarbon polymer layer on the SiC surface. The plasma resistance of SiC was correlated with this thick fluorocarbon polymer layer, which reduced the reaction probability of fluorine-containing species in the plasma with silicon from the SiC substrate. The remnant carbon after the removal of Si as volatile etch products augments the surface carbon, and seems to be the origin of the higher plasma resistance of SiC.

• 한국표면공학회지
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• 제50권4호
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• pp.272-276
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• 2017

The response of AISI 310 type austenitic stainless steel to the novel low temperature plasma carburizing process has been investigated in this work. This grade of stainless steel shows better corrosion resistance and high temperature oxidation resistance due to its high chromium and nickel content. In this experiment, plasma carburizing was performed on AISI 310 stainless steel in a D.C. pulsed plasma ion nitriding system at different temperatures in $H_2-Ar-CH_4$ gas mixtures. The working pressure was 4 Torr (533Pa approx.) and the applied voltage was 600 V during the plasma carburizing treatment. The hardness of the samples was measured by using a Vickers micro hardness tester with the load of 100 g. The phase of carburized layer formed on the surface was confirmed by X-ray diffraction. The resultant carburized layer was found to be precipitation free and resulted in significantly improved hardness and corrosion resistance.

• Journal of Advanced Marine Engineering and Technology
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• 제22권5호
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• pp.702-711
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• 1998

The characteristics of corrosion resistance for the surface of medium high carbon steels and low alloy steels utilizing as manufacturing the machinery structures and machining tools and treating by plasma/ion nitriding process have been studied in terms of electrochemical polarization behav-iors including corrosion potential(Ecorr) anodic polarization trends and polarization resistance(Rp) The seven base materials showed a clear passivation behavior for the polarization tests in the ASTM standard solution 1N ${H_2){SO_4}$ Although the treated surface by plasma nitriding for the seven test materials showed a significant increase in hardness the treatment gave a detri-mental effect in corrosion resistance. The various characteristics including corrosion potential polarization curves microstructures corrosion current polarization resistance among non-treat-ed nitriding and/or soft-nitriding treated specimens have been investigated and some of the mechanisms discussed.

• 반도체디스플레이기술학회지
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• 제21권3호
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• pp.57-62
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• 2022

The plasma resistance of multi-component glasses containing La, Gd, Ti, Zn, Y, Zr, Nb, and Ta was analyzed in this study. The plasma etching was performed via inductively coupled plasma-reactive ion etching (ICP-RIE) using CF₄/O₂/Ar mixed gas. After the reaction, the glass with a low fluoride sublimation temperature and high content of P, Si, and Ti elements showed a high etching rate. On the other hand, the glass containing a high fluoride sublimation temperature component such as Ca, La, Gd, Y, and Zr exhibited high plasma resistance because the etch rate was lower than that of sapphire. Glass with low plasma resistance increased surface roughness after etching or nanoholes were formed on the surface, but glass with high plasma resistance showed little change in surface microstructure. Thus, the results of this study demonstrate the potential for the development of plasma-resistant glasses (PRGs) with other compositions besides alumino-silicate glasses, which are conventionally referred to as plasma-resistant glasses.

• 한국표면공학회지
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• 제29권6호
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• pp.634-639
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• 1996

In oder to improve the wear resistance as well as oxidation resistance at high temperature a AISI H13 steel was treated by a duplex process of calorizing followed by plasma nitriding. The surface properties of the duplex-treated AISI H13 steel was characterized and compared with those treated by single surface process of calorizing and plasma nitriding, in terms of microstruture, microhardness, wear resistance at $500^{\circ}C$, and the oxidation behaviours at $700^{\circ}C$, Duplex process on H13 steel had created duplex layer of approximately $190\mu\textrm{m}$ on the surface, and surface microhardness was measured to be above 1450Hv(0.1Kgf). There was considerable improvement of the high temperature wear resistance at $500^{\circ}C$ in the duplex-treated steel when both wear volume and weight change due to oxidation were considered. In addition the duplex-treated steel showed an improved high temperature oxidation resistance than the plasma nitrided steel at $700^{\circ}C$.

• 한국세라믹학회지
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• 제45권7호
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• pp.405-410
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• 2008

Ceramics are widely used as plasma resistant materials in semiconductor industries. However, the plasma erosion resistance has not been properly evaluated in terms of microstructural changes during the exposure to plasma. In this study, microstructure developments of $Al_2O_3$ were investigated under the fluorine plasma conditions. In polycrystalline alumina, uniform erosion throughout the specimen as well as spatially distributed local erosion were observed. Local erosion was much more severe in lower purity alumina. In contrast to the polycrystalline alumina, only uniform erosion was observed in single crystalline sapphire. These specimens, however, had practically the same erosion depth, which results in the incorrectly similar plasma resistance. This implies that the plasma erosion resistance of ceramics should be evaluated in terms of the microstructural changes, as well as the conventionally accepted erosion depth.

• 한국표면공학회지
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• 제37권2호
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• pp.119-127
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• 2004

In order to develop the corrosion and wear resistance of stainless steels, effects of plasma-nitriding on the surface characteristics of stainless steels containing Nb were investigated by utilizing a potentiostat. It was found that plasma nitriding at $350^{\circ}C$, compared with $500^{\circ}C$, produced a good corrosion resistance as nitriding time increased, whereas stainless steel containing low Nb content showed that pitting potential and corrosion potential decreased.

• Bulletin of the Korean Chemical Society
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• 제35권3호
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• pp.905-907
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• 2014

The plasma and microwave surface treatments of carbon nanotubes that loaded on plastic substrates were carried out with expecting a change of carbon nanotube dispersion by increasing treatment time. The microwave treatment process was undergone by commercial microwave oven (800 W). The electrical property was measured by hall measurement and resistance was increased by increasing $O_2$ flow rate of plasma, suggesting an improvement of carbon nanotube dispersion and a possibility of controlling the resistances of carbon nanotubes by plasma surface treatment. The resistance was increased in both polyethylene terephthalate and polyimide substrates by increasing $O_2$ flow rate. Resistance changes only slightly with different $O_2$ flow treatment in measure rho for all polyimide samples. Sheet resistance is lowest in polyimide substrate not due to high carbon nanotube loading but due to tendency to remain in elongated structure. $O_2$ or $N_2$ plasma treatments on both polyethylene terephthalate and polyimide substrates lead to increase in sheet resistance.

• 연구논문집
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• 통권25호
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• pp.193-205
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• 1995

Plasma 용사 코팅 기술은 전자산업과 정보산업의 기초인 Micro 반도체 산업의 기능성 목적으로 응용되고 있으며, 항공기 등의 첨단산업에서 디젤엔진이나 가스터빈 등 응용 범위를 점차 확대하고 있는 실정이다. 또한 첨단요소 부품에 적용하여 내마모성, 내열성, 내피로성, 내부식성 등을 부여하고 있다. 기능성 부품에 후처리하여 제품의 부가가치를 향상시킬 수 있어, Plasma 용사 코팅기술의 중요성은 날로 증대되고 있는 실정이다. 본 연구에서는 Plasma 용사 기술을 이용하여 코팅을 형성 내마모시험을 통해 국내 첨단요소 부품에 기능성 부여과 낙후된 용사 기술을 향상시키는 데 있다.

• 한국표면공학회지
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• 제36권2호
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• pp.206-213
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• 2003

Effects of plasma nitriding on the surface characteristics of tool steels have been investigated using wear tester, micro-hardness tester and scanning electron microscope (SEM) Commercial SKD 11 and SM45 alloy were used as specimens and were plasma nitrided using a plasma nitriding equipment for 5 hr and 10hr at $500^{\circ}C$. Microstructure and phase analysis were performed using SEM and XRD. It was found that plasma nitriding for lour at $500^{\circ}C$, compared with plasma nitriding for 10hr at $500^{\circ}C$, had a thick nitrided layer and produced a layer with good wear resistance and hardness as nitriding time increased. SKD11 alloy showed that wear resistance and hardness decreased, whereas surface roughness increased, compared with SM45 alloy.