• Bulletin of the Korean Chemical Society
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• v.26 no.9
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• pp.1415-1420
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• 2005

The spectral interferences of OH from aqueous solvents in ICP-AES have been studied and eliminated using a cryogenic argon trap. The prominent lines of Bi I 306.772 nm, Al I 309.271 nm, and V II 310.230 nm, which are very seriously overlapped with the OH band, were examined. With an extended torch and high tangential flow of 20 L/min, water vapor from air entrainment was prevented. The combination of a condenser and argon cryogenic trap was able to eliminated most of water vapor carried by the argon sample gas. Removal of OH spectral interference could extend the linearity of the calibration curve 5-10 times on the lower concentration for ICP-AES. Interference Equivalent Concentration (IEC) has been reduced to 5.6, 5.9, and 12.4 times for Bi, Al and V, respectively.

• Carbon letters
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• v.2 no.1
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• pp.27-36
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• 2001

The pack-cementation process is the method which is formed SiC coating layer to improve weak oxidation properties of CFRCs (carbon fiber-reinforced carbons). This method develops the anti-oxidation coating layer having no dimensional changes and good wetting properties. In this study to improve the oxidative resistance of the prepared 4D CFRCs, the surface of CFRCs is coated by SiC using pack cementation method. The mechanical properties of SiC-coated 4D CFRCs are measured by the 3-point bending test, and their ablation properties are investigated by the arc torch plasma test. From the results, it is found that both mechanical and ablation properties of SiC-coated 4D CFRCs are much better than bare CFRCs.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.230.1-230.1
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• 2014

대면적 그래핀의 높은 제조비용과 낮은 생산성으로 인해 최근 산화그래핀(GO)을 박리하여 대면적화 하는 연구가 활발히 진행되고 있다. 하지만, Hummers 법에 의해 제조된 산화그래핀은 제조공정상 발생되는 황이나 수소 및 산소 등의 불순물에 의한 특성저하와 15층에서 25층 정도의 다층 구조에 의한 높은 접촉저항 때문에 그래핀 고유의 특성 발휘가 어렵다. 본 연구에서는 DC 열 플라즈마의 NH3 방전을 이용하여 산화그래핀의 불순물인 S, H, O를 완전히 제거하였고, DC 열 플라즈마 처리된 후의 산화그래핀의 Volume을 평균 2.5배정도 증가시켰다. 또한 N2와 He을 혼합 시킨 DC 열 플라즈마 방전으로 산화그래핀 표면에 N 을 도핑 하여 전기적 특성을 향상시켰다. N 도핑 농도는 최대 20wt%이었으며 N2과 He공급량, Current 조절에 의해 Dopping 농도를 제어하였다.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1820-1822
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• 2002

본 논문에서는 반도체 제조공정에서 발생하는 $CF_4$의 분해와 제거를 위하여 3상 교류 플라즈마 토치를 제작하고, 플라즈마를 발생시켜 $CF_4$제거 가능성과 이에 따른 문제점에 대해 알아보았다. 매우 강하고 안정한 C-F 결합을 깨고 $CF_4$가스를 분해하기 위해서는 1100[$^{\circ}C$]정도의 고온이 필요한데, 본 실험의 플라즈마 플레임의 경우 $CF_4$가스를 열분해 광분해 시키기에는 충분한 온도와 에너지를 가지고 있다고 사료된다. 하지만 고온의 플라즈마와 토치 내부의 복잡한 유동과 고온의 플라즈마에 의한 전극의 융삭문제는 플라즈마를 연속적으로 발생시켜 $CF_4$가스의 제거효율을 높이기 위해서는 필히 개선해야 할 문제점인 것으로 사료된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.538-538
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• 2012

전북대학교 고온 플라즈마 응용 연구 센터는 교육과학기술부 기초연구사업 중 고가연구장비 구축사업의 일환으로 고부가가치 재료 연구 및 시험생산이 가능한 소재공정용 200kW ICP(RF) 플라즈마 발생장치를 구축하고 있다. 200 kW급 ICP (RF)형 플라즈마 발생장치는 수~수십 um 크기의 금속, 세라믹 등 고융점 원료분말 등을 수~수십 um 크기의 금속, 세라믹 등 고융점 원료 분말을 순간적으로 용해, 기화 및 분해시키고 이들 기화 또는 분해된 증기를 급랭시키는 과정에서 대량으로 초미분($<1{\mu}m$)을 합성하는 RF 플라즈마 분말 합성 시스템으로 시간당 1 kg 이상의 나노 분말의 제조가 가능하도록 설계 제작된 생산 지원용 대형 ICP(RF) 플라즈마 장치이다.

• Journal of the Korean institute of surface engineering
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• v.31 no.2
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• pp.91-100
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• 1998

NiCrAlY/YSZ(8wt%$Y_2O_3-ZrO_2$) functionally graded thermal barrier coating (FGC) layers on a Co-base superalloy (HAYNESS 188) substrate were fabstrate were fabicated using Ar shielded single torch air plasma spraying method. Functional grading with the stepwise compositional change throughout layer thickness. Microstructural observation trvealed a successful fabrication of NiCrAlY/YSZ FGC. From the results of the curvature measurement, adhesive strength measurement and thermal shock test for the FGC, it was concluded that the optimum conditions of functionally graded coating layer thinkness and compositional pattern exit to enhance the properties of FGC, which is closely related to the internal residual stess distribution witin it.

• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.188-189
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• 2007

Axial magnetic field was applied into the hollow anode of plasma torch for the purpose of extension of electrode lifetime. The average arc voltage increased because the arc column became longer, the arc voltage ripple frequency became low. The steady state of arc voltage was removed by applied magnetic filed. The lifetime of electrode was over 1000 hours which is 100 times longer than operation without magnetic field.

• Applied Chemistry for Engineering
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• v.29 no.1
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• pp.10-17
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• 2018

POU (point of use) scrubbers were applied for the treatment of waste gases including PFCs (perfluorocompounds) exhausted from the CVD (chemical vapor deposition), etching, and cleaning processes of semiconductor and display manufacturing plant. The GWP (global warming potential) and atmosphere lifetime of PFCs are known to be a few thousands higher than that of $CO_2$, and extremely high temperature more than 3,000 K is required to thermally decompose PFCs. Therefore, POU gas scrubbers based on the thermal plasma technology were developed for the effective control of PFCs and industrial application of the technology. The thermal plasma technology encompasses the generation of powerful plasma via the optimization of the plasma torch, a highly stable power supply, and the matching technique between two components. In addition, the effective mixture of the high temperature plasma and waste gases was also necessary for the highly efficient abatement of PFCs. The purpose of this paper was to provide not only a useful technical information of the post-treatment process for the waste gas scrubbing but also a short perspective on R&D of POU plasma gas scrubbers.

• Clean Technology
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• v.19 no.2
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• pp.113-120
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• 2013

The treatment of chemically stable perflourocompounds (PFCs) requires a large amount of energy. An energy efficient arc plasma system has been developed to overcome such disadvantage. $CF_4$, $SF_6$ and $NF_3$ were injected into the plasma torch directly, and net plasma power was estimated from the measurement of thermal efficiency of the system. Effects of net plasma power, waste gas flow rate and additive gases on the destruction and removal efficiency (DRE) of PFCs were examined. The calculation of thermodynamic equilibrium composition was also conducted to compare with experimental results. The average thermal efficiency was ranged from 60 to 66% with increasing waste gas flow rate, while DRE of PFCs was decreased with increasing gas flow rate. On the other hand, DRE of each PFCs was increased with the increasing input power. Maximum DREs of $CF_4$, $SF_6$ and $NF_3$ were 4%, 15% and 90%, respectively, without reaction gas at the fixed input power and waste gas flow rate of 3 kW and 70 L/min. A rapid increase of DRE was found using hydrogen or oxygen additional gases. Hydrogen was more effective than oxygen to decompose PFCs and to control by-products. The major by-product in the arc plasma process with hydrogen was hydrofluoric acid that is easy to be removed by a wet scrubber. DREs of $CF_4$, $SF_6$ and $NF_3$ were 25%, 39% and 99%, respectively, using hydrogen additional gas at the waste gas flow rate of 100 L/min and the input power of 3 kW.

• Proceedings of the KWS Conference
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• 2002.10a
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• pp.176-180
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• 2002

During the last two decades the laser beam has progressed from a sophisticated laboratory apparatus to an adaptable and viable industrial tool. Especially, in its welding mode, the laser offers high travel speed, low distortion, and narrow fusion and heat-affected zones (HAZ). The principal obstacle to selection of a laser processing method in production is its relatively high equipment cost and the natural unwillingness of production supervision to try something new until it is thoroughly proven. The major objective of this work is focused on the combined features of gas tungsten arc and a low-power cold laser beam. Although high-power laser beams have been combined with the plasma from a gas tungsten arc (GTA) torch for use in welding as early as 1980, recent work at the Ohio State University has employed a low power laser beam to initiate, direct, and concentrate a gas tungsten arcs. In this work, the laser beam from a 7 watts carbon monoxide laser was combined with electrical discharges from a short-pulsed capacitive discharge GTA welding power supply. When the low power CO laser beam passes through a special composition shielding gas, the CO molecules in the gas absorbs the radiation, and ionizes through a process known as non-equilibrium, vibration-vibration pumping. The resulting laser-induced plasma (LIP) was positioned between various configurations of electrodes. The high-voltage impulse applied to the electrodes forced rapid electrical breakdown between the electrodes. Electrical discharges between tungsten electrodes and aluminum sheet specimens followed the ionized path provided by LIP. The result was well focused melted spots.