• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.38-44
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• 2005

Pyrolyzed polyimide is explored in terms of MEMS material. This paper describes chemical, electrical, mechanical properties of pyrolyzed polyimide (PIX-1400) thin film as MEMS material. When polyimide thin film was pyrolyzed at $800^{\circ}C$ for 60 minutes in $N_{2}$ ambient, the residual ratio of pyrolyzed film thickness measured with a surface profiler is about 49 %, and the resistivity is about $2.17{\times}10^{-2}\;{Omega}cm$. From the result of the load-deflection test, the estimated Young's modulus and initial average stress of pyrolyzed polyimide are 67 GPa and 30 MPa, respectively. As one demonstration of MEMS structures of pyrolyzed polyimide, the fabrication method of the microbridge structure is proposed for a micro heater and a resonator.

• Macromolecular Research
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• v.15 no.6
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• pp.565-574
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• 2007

In this study, five representative, commercially available polymers, Ultem 1000 polyetherimide, Kapton polyimide, phenolic resin, polyacrylonitrile and cellulose acetate, were used to prepare pyrolyzed polymer membranes coated on a porous {\alpha}-alumina$ tube via inert pyrolysis for gas separation. Pyrolysis conditions (i.e., final temperature and thermal dwell time) of each polymer were determined using a thermogravimetric method coupled with real-time mass spectroscopy. The surface area and pore size distribution of the pyrolyzed materials derived from the polymers were estimated from the nitrogen adsorption/desorption isotherms. Pyrolyzed membranes from polymer precursors exhibited type I sorption behavior except cellulose acetate (type IV). The gas permeation of the carbon/{\alpha}-alumina$ tubular membranes was characterized using four gases: helium, carbon dioxide, oxygen and nitrogen. The polyetherimide, polyimide, and phenolic resin pyrolyzed polymer membranes showed typical molecular sieving gas permeation behavior, while membranes from polyacrylonitrile and cellulose acetate exhibited intermediate behavior between Knudsen diffusion and molecular sieving. Pyrolyzed membranes with molecular sieving behavior (e.g., polyetherimide, polyimide, and phenolic resin) had a $CO_2/N_2$ selectivity of greater than 15; however, the membranes from polyacrylonitrile and cellulose acetate with intermediate gas transport behavior had a selectivity slightly greater than unity due to their large pore size.

• Membrane Journal
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• v.13 no.3
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• pp.182-190
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• 2003

Carbon molecular sieve (CMS) membranes were prepared by the pyrolysis of polyvinylpyrrolidone containing polyimide precursors. We have prepared the polymer precursors, pyrolyzed polymer and investigated the effect of pyrolyzing polymer on the characteristics of carbon structures and gas separation properties of the CMS membranes. Thermogravimetric analysis (TGA) showed the two-step decomposition of polymer precursor. First decomposition of the pyrolyzing polymer began around $400^{\circ}C$ while carbonizing polymer showed the decomposition around $550^{\circ}C$. The gas permeabilities through the CMS membranes were enhanced by the introduction of the pyrolyzing polymer and decreased with increased final pyrolysis temperature. The CMS membrane pyrolyzed at $550^{\circ}C$. derived from precursor containing 5wt% PVP as a pyrolyzing polymer showed gas permeability for $O_2$ of 808 Barrers [$10^{-10}cm^3 (STP)cm/cm^2scmHg]$ and $O_2/N_2$ selectivity of 7.