• Proceedings of the KSME Conference
• /
• 2004.04a
• /
• pp.792-797
• /
• 2004

Dynamic modeling of an eccentric MEMS gyroscope is presented and the dynamic characteristics of the gyroscope are investigated with the modeling method. It is found that the eccentricity of the MEMS gyroscope affects the dynamic characteristics significantly. Different from conventional MEMS gyroscopes, the zero-rate output is significantly reduced in this gyroscope. To obtain general guidelines of the gyroscope design, dimensionless parameters are first identified and the effects of the parameters on the gyroscope performance measures are investigated.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.13 no.2
• /
• pp.92-98
• /
• 2003

A rate gyroscope has been used popularly to measure the angular motion of a given vehicle using a symmetric rotor spinning rapidly about its symmetry axis. Since the rapid rotation is required in this type of gyroscope, the motor has been used to make the rotor spin, so that it results in a heavy configuration. The toning-fork gyroscope has been developed to avoid this problem, which utilizes a Coriolis coupling term and vibration about one axis. Due to the Coriolis effect, the vibration of one axis is transferred to other axis when the angular motion along the vibrating axis is given to the system. The concept of a tuning-fork gyroscope was recently realized using MEMS techniques. However, the dynamic characteristics of the tuning-fork gyroscope has not been discussed in detail. In this study. we derived the equations of motion for the tuning-fork type gyroscope using the energy approach and investigated the dynamic characteristics by means of numerical analysis.

• Journal of Institute of Control, Robotics and Systems
• /
• v.10 no.8
• /
• pp.669-672
• /
• 2004

This paper considers the implementation and experiments of an open-loop Cylindrical Vibratory Gyroscope(CGV). An open-loop CGV composed of thin cylindrical vibrating element, electromagnetic drive and pick-off element with open-loop control was designed and fabricated. The experimental performance tests of the open-loop CGV were done using a temperature chambered rate table. Also, the limitations of open-loop CGV were analyzed and the solution for the limitations was proposed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2002.05a
• /
• pp.247-252
• /
• 2002

A rate gyroscope has been used popularly to measure the angular motion of a given vehicle using a symmetric rotor spinning rapidly about its symmetry axis. Since the rapid rotation is required in this type of gyroscope, the motor has been used to make the rotor spin, so that it results in a heavy configuration. The tuning-fork gyroscope has been developed to avoid this problem, which utilizes a coriolis coupling term and vibration about one axis. Because of the coriolis effect, the vibration of one axis is transferred to other axis when the angular motion along the vibrating axis is given to the system. The concept of a tuning-fork gyroscope was recently realized using MEMS techniques. However, the dynamic characteristics of the tuning-fork gyroscope has not been discussed in detail. In this study, we derived the equations of motion for the tuning-fork type gyroscope using the energy approach and investigated the dynamic characteristics by means of numerical analysis.

• Current Industrial and Technological Trends in Aerospace
• /
• v.8 no.2
• /
• pp.76-85
• /
• 2010

This paper discusses recent development trends of fiber optic gyroscope (FOG) in space application. Fiber optic gyroscope utilizes Sagnac effect to measure the angular rate of a rotating object in space. Having a rather short development history compared to ring laser gyroscope (RLG), the fiber optic gyroscope, owing to the emerging technologies in fiber optic society and the digital signal processing technique, reveals itself as a noteworthy replacement of the ring laser gyroscope in the space mission. This paper summarizes the current trends of fiber optic gyroscope based on the actual products commercialized in the market over the last decades, while presenting the future development trends of the fiber optic gyroscope in the space exploration.

• Journal of Institute of Control, Robotics and Systems
• /
• v.3 no.3
• /
• pp.311-317
• /
• 1997

DTG(dynamically tuned gyroscope) is a sensor detecting disturbance in angle velocity control loop of EOTS(electro optical tracking system), which is used for the stabilization of gimbal. DTG is classified into rate mode or rate integrated mode according to operating mode. In this paper, basic principles and characteristics of DTG, depending on to operating mode, are compared and the model of rate integrated mode DTG is proposed. Also, the validity of the presented model is verified by computer simulations and experiments.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2002.11a
• /
• pp.312.1-312
• /
• 2002

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure rates of turn about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. (omitted)

• Journal of the Microelectronics and Packaging Society
• /
• v.12 no.3 s.36
• /
• pp.187-196
• /
• 2005

MEMS devices such as a vibratory gyroscope often suffer from a lower yield rate due to fabrication errors and the external stress. In the decoupled vibratory gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, fabricated with SOI (Silicon-On-Insulator) wafer and packaged using the anodic bonding, has a large wafer bowing caused by thermal expansion mismatch as well as non-uniform surfaces of the structures caused by the notching effect. These effects result in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) technology. It uses a silicon wafer and two glass wafers to minimize the wafer bowing and a metallic membrane to avoid the notching. In the packaged SiOG gyroscope, the notching effect is eliminated and the warpage of the wafer is greatly reduced. Consequently the frequency difference is more uniformly distributed and its variation is greatly improved. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

• Journal of Institute of Control, Robotics and Systems
• /
• v.18 no.7
• /
• pp.632-637
• /
• 2012

This paper introduces a simple and efficient calibration method for three-axis accelerometers and three-axis gyroscopes using three-axis motion rate table. Usually, the performance of low cost MEMS-based inertial sensors is affected by scale and bias errors significantly. The calibration of these errors is a bothersome problem, but the previous calibration methods cannot propose simple and efficient method to calibrate the errors of three-axis inertial sensors. This paper introduces a new simple and efficient method for the calibration of accelerometer and gyroscope. By using a three-axis motion rate table, this method can calibrate the accelerometer and gyroscope simultaneously and simply. Experimental results confirm the performance of the proposed method.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.11 s.176
• /
• pp.165-172
• /
• 2005

In MEMS (Micro-Electro-Mechanical System), packaging induced stress or stress induced structure deformation becomes increasing concerns since it directly affects the performance of the device. In the decoupled vibratory MEMS gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, packaged using the anodic bonding at the wafer level and EMC (epoxy molding compound) molding, has a deformation of MEMS structure caused by thermal expansion mismatch. This effect results in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) process technology. It uses a silicon wafer and two glass wafers to minimize the wafer warpage. Thus the warpage of the wafer is greatly reduced and the frequency difference is more uniformly distributed. In addition. in order to increase robustness of the structure against deformation caused by EMC molding, a 'crab-leg' type spring is replaced with a semi-folded spring. The results show that the frequency shift is greatly reduced after applying the semi-folded spring. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.