• Korean Journal of Optics and Photonics
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• v.17 no.4
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• pp.366-370
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• 2006

An optical microphone incorporating a reflective diaphragm and a fiber-optic head was demonstrated. The diaphragm was made of a micromirror membrane which is suspended by a silicon bar connected to a frame, allowing fer a displacement induced by acoustic waves. A compact, simple optical head was implemented by exploiting a single multimode fiber. For the assembled microphone, the static characteristics were investigated to find the operation point defined as the optimum distance between the head and the diaphragm, and a flat frequency response with a variation of $\sim$2dB for the range of up to 2 kHz was accomplished.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.5
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• pp.263-266
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• 2006

An optical microphone was developed using a dual-core multi-mode fiber block and a membrane type micromirror. The fiber block serves as a compact optical head, and the micromirror as a reflective diaphragm. The micromirror is designed to be suspended through a silicon bar connected t a frame, allowing for displacement induced by acoustic waves. The optical head is implemented by integrating two multi-mode fibers in a single block, and used to transfer light signals between it and the diaphragm. For the assembled microphone, its static characteristics were observed to reveal the operating point defined as the optimum distance between the optical head and the diaphragm. And its dynamic response was tested to exhibit a frequency bandwidth of 3 kHz with the variation of $\sim5dB$.

• Korean Journal of Optics and Photonics
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• v.17 no.1
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• pp.94-98
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• 2006

An optical microphone based on a dual-core fiber collimator and a membrane type micromirror serving as an optical head and a reflective diaphragm respectively was implemented. The micromirror diaphragm is suspended by a thin silicon bar linked with a frame, thus it is subject to a displacement induced by acoustic waves. The optical head incorporating two collimators integrated in a single housing gives light to and receives it from the diaphragm, rendering the optical microphone structure simple and compact. This dual-core collimator having a slowing varying beam profile facilitates the initial alignment of the optical head with the diaphragm, especially the distance between them. For the assembled microphone, the static characteristics were investigated tofind the operation point defined as the optimum distance between the head and the diaphragm, and a frequency response with a variation of about $\pm$5 dB for the range of up to 3kHz was achieved.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.43 no.1 s.343
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• pp.33-40
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• 2006

This paper presents a novel surface acoustic wave (SAW)-based pressure sensor, which is composed of single phase unidirectional transducer (SPUDT), three reflectors, and a deep etched substrate for bonding underneath the diaphragm. Using the coupling of modes (COM) theory, the SAW device was simulated, and the optimized design parameters were extracted. Finite Element Methods (FEM) was utilized to calculate the bending and stress/strain distribution on the diaphragm under a given pressure. Using extracted optimal design parameters, a 440 MHz reflective delay line on 41o YX LiNbO3 was developed. High S/N ratio, shan reflection peaks, and small spurious peaks were observed. The measured S11 results showed a good agreement with simulated results obtained from coupling-of-modes (COM) modeling and Finite Element Method (FEM) analysis.