• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.12
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• pp.2292-2297
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• 2010

To improve the performances of Sawyer motors and to regulate yaw rotation, various feedback control methods have been developed. Almost all of these methods require information on the position, velocity or full state of the motor. Therefore, in this paper, a nonlinear observer is designed to estimate the full state of the four forcers in a Sawyer motor. The proposed method estimates the full state using only positional feedback. Generally, Sawyer motors are operated within a yaw magnitude of several degrees; outside of this range, Sawyer motors step out. Therefore, this observer design assumes that the yaw is within ${\pm}90^\b{o}$. The convergence of the estimation error is proven using the Lyapunov method. The proposed observer guarantees that the estimation error globally exponentially converges to zero for all arbitrary initial conditions. Furthermore, since the proposed observer does not require any transformation, it may result in a reduction in the commutation delay. The simulation results show the performance of the proposed observer.

• 제어로봇시스템학회:학술대회논문집
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• 1992.10b
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• pp.340-343
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• 1992

Fundamental positioning characteristics of a dual-axis Sawyer linear motor are described. The Sawyer motor is capable of high positional accuracy. An electronic control unit of the motor whose velocity is proportional to the frequency of the electric current was produced in our laboratory. The positioning system was constructed using two Sawyer motors, an air bearings suspension unit and an electronic control unit. The stable motion of the motor was confirmed on the open loop operation. The adjustable operating conditions were the live load of 1 kg, the maximum acceleration of 1.2G and the maximum velocity of 350 mm/s. Absolute positioning accuracy was improved within .+-.5.mu.m, on microstep operating conditions of dividing one pitch of 508.mu.m into 508 steps. The following two conclusions were obtained. An accelerating-cruising-decelerating control is effective for reduction in the travel time required. Also, microstep operation is effective for improving the resolution of position.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.607-608
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• 2012

• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.3
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• pp.23-31
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• 2005

The purpose of this study is to design a disturbance observer for a micro-stepping stage to eliminate the disturbances from cables, friction, mass unbalance of the moving part, etc. The disturbance observer is designed for air-floating X-Y precision micro-stepping X-Y stage which widely used in stepper machine or semiconductor manufacturing systems. The micro-stepping X-Y stage has a weak point of the variation of characteristics with position locations, which caused by various disturbances. In this study, it will be described that a simple and high throughput disturbance observer algorithm improves the dynamic error and settling time of the micro-stepping stage.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.1
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• pp.77-84
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• 2013

In this paper, we review two-dimensional measuring methods referring to target patterns. The patterns consist of two linearly-repeated patterns or is designed repeatedly in two-dimension. The repeated properties are reflectivity, refractivity, air-gapping distance, capacitance, magnetic reluctance, electrical resistance and sloping gradient, etc. However, the optical methods are generally used for high speed processing and density, and their encoding principles are treated here. In case of two-dimensional pattern, as there is not inherently error between single units encoding the pattern except for the metrology frame errors, the end-effector position of an object accompanying the pattern can be measured with respect of the global frame without via error. Therefore, it is regarded as a substitute for laser interferometer with severe environmental constraints and has been applied to the high-accurate planar actuator.