• Applied Microscopy
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• v.47 no.3
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• pp.95-100
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• 2017

High resolution measurements of the carrier profile in semiconductor devices is required as the semiconductor industry progresses from the 10-nm lithography node to 7-nm and beyond. We examine the factors which determine the resolution of the present method of scanning spreading resistance microscopy as well as such factors for the newer method of scanning frequency comb microscopy that is now under development. Also, for the first time, we consider the sensitivity of both methods to the location of heterogeneities in the semiconductor. In addition, mesoscopic effects on these measurements are considered for the first time. Two simple analytical models are extended to study the sensitivity to heterogeneities as well as mesoscopic effects.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.399-399
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• 2000

In this paper, path generation using the sensor platform is proposed. The sensor platform is composed two electric motors which make panning and tilting motions. An algorithm fur a real path form and an obstacle length is realized using a scanning algorithm to rotating the sensors on the sensor platform. An ARV (Autonomous Robot Vehicle) is able to recognize the given path by adapting this algorithm. In order for the ARV to navigate the path flexibly, a kinematic model needed to be constructed. The kinematic model of the ARV was reformed around its body center through a relative velocity relationship to controllability, which derives from the nonholonomic characteristics. The optimal controller that is based on tile kinematic model is operated purposefully to track a reference vehicle's path. The path generation algorithm is composed of two parks. On e part is the generating path pattern, and the other is used to avoid an obstacle. The optimal controller is used for tracking the reference path which is generated by recognizing the path pattern. Results of simulation show that this algorithm for an ARV is sufficient for path generation by small number of sensors and for low cost controller.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.204-207
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• 2005

We discuss two possibilities of using femtosecond pulse lasers as a new interferometric light source fer enhanced precision surface profile metrology. First, a train of ultra-fast laser pulses yields repeated low temporal coherence, which allows performing unequal-path scanning interferometry that is not feasible with white light. Second, high spatial coherence of femtosecond pulse lasers enables to test large size optics in non-symmetric configurations with relatively small size reference surfaces. These two advantages are verified experimentally using Fizeau and Twyman-Green type scanning interferometers.

• Journal of Digital Convergence
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• v.12 no.1
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• pp.415-421
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• 2014

In this paper, we proposed problem and improvement of halftoning using random space filling curve. Random space filling curve is developed as a solution for shortcoming which space filling curve has self-similarity. It is used to reduce regular pattern can be occurred in constant brightness area in order that randomness apply to scanning path. But there is a problem that some area along scanning path can show too bright result in halftoning using random space filling curve. In this paper, we analyzed cause of problem and proposed single pixel error diffusion as a solution method. This method can avoid over-accumulated error and show better result in halftoning.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.10
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• pp.56-62
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• 2000

A fast and precise technique to make 3-dimensional object which is called direct metal shaping process is processed. It is very useful technique in design and inspection. Using this developed system, a solid object is made. In experiment, test parts are built by varying three factors, laser power, scan path, scan speed. This process used device, which is different from the widely used in rapid prototyping in that powder feeding device is used. Spraying powder directly at the focused laser beam and then three dimensional object is made by the deposit of melted metal powder. The optimum scanning path is found to be zigzag path, which had little thermal affection on base metal. As a result of these experiments, it was found that optimum scanning speed is 15mm/sec laser power is 50W. This constructed 3-dimensional object could be used in mold manufacturing directly.

• IE interfaces
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• v.11 no.1
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• pp.199-205
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• 1998

This paper describes the development of on-the-machine measuring(OMM) system which can directly measure the two and three dimensional machined accuracy using a scanning probe in milling machine. Two algorithms, NC program based continuous path(CP) measurement and CAD data assisted point to point(PTP) measurement, are developed for three dimensional measurements, with consideration of the characteristics of the scanning probe. The algorithms are used to develop an auto measuring system. The delveloped system is compared with the CMM (Coordinate Measuring Machine) in terms of accuracy and repeatability. The OMM system is expected to realize measurement time reduction and hence result in high productivity.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.539-543
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• 1999

This paper describes a sweeping path planning algorithm for an autonomous smearing robot on commercial autoCAD system. An automatic planner generates a sweeping path pattern by proposed five basic procedures, (1) interfacing architectural CAD system, (2) off-line obstacle map building, (3) scanning the whole workspace for subgoals of sweeping line, (4) tracking sequence of the subgoals, and (5) obstacle avoiding. A sweeping path is planned by sequentially connecting the tracking points in such a way that (1) the connected line segments should be crossed, (2) the total tracking points should be as short as possible, (3) the tracking line should not pass through the obstacle. Feasibility of the developed techniques has been demonstrated on real architectural CAD draft.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.8
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• pp.1-7
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• 2019

When using conventional 3D image scanning methods, it is common for image scanning to be done manually, which is labor-intensive. Scanning a space made up of complicated equipment or scanning a narrow space that is difficult for the user to enter, is problematic, resulting in quality degradation due to the presence of shadow areas. This paper proposes a method to scan an image using a rover equipped with a scanner in areas where it is difficult for a person to enter. To control the scan path precisely, the 3D image remote scan automation method based on the rover move rule definition is described. Through the study, the user can automate the 3D scan plan in a desired manner by defining the rover scan path as the rule base.

• Journal of Advanced Navigation Technology
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• v.27 no.4
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• pp.473-480
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• 2023

This study evaluated a novel method of defining the automatic flight path of unmanned aerial vehicles (UAVs) for search and rescue missions in a VR environment. The developed VR content reserves miniature digital twins of a building in the fire and a steep mountain terrain site. The users drow the UAV's scanning path using hand gestures on the surface of digital twins, and then the UAV make an automatic flight along the defined path. According to human-in-the-loop simulation tests comparing the novel method with a conventional manual flight task with 19 participants, the novel method did not improve the mission performance but participants felt a lower mental workload. The designer may need to consider the automation support on the vulnerable points of the SAR mission environment while maintaining experts' mapping capability.

• Journal of Periodontal and Implant Science
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• v.48 no.4
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• pp.202-212
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• 2018

Purpose: Bone-to-implant contact (BIC) is difficult to measure on micro-computed tomography (CT) because of artifacts that hinder accurate differentiation of the bone and implant. This study presents an advanced algorithm for measuring BIC in micro-CT acquisitions using a spiral scanning technique, with improved differentiation of bone and implant materials. Methods: Five sandblasted, large-grit, acid-etched implants were used. Three implants were subjected to surface analysis, and 2 were inserted into a New Zealand white rabbit, with each tibia receiving 1 implant. The rabbit was sacrificed after 28 days. The en bloc specimens were subjected to spiral (SkyScan 1275, Bruker) and round (SkyScan 1172, SkyScan 1275) micro-CT scanning to evaluate differences in the images resulting from the different scanning techniques. The partial volume effect (PVE) was optimized as much as possible. BIC was measured with both round and spiral scanning on the SkyScan 1275, and the results were compared. Results: Compared with the round micro-CT scanning, the spiral scanning showed much clearer images. In addition, the PVE was optimized, which allowed accurate BIC measurements to be made. Round scanning on the SkyScan 1275 resulted in higher BIC measurements than spiral scanning on the same machine; however, the higher measurements on round scanning were confirmed to be false, and were found to be the result of artifacts in the void, rather than bone. Conclusions: The results of this study indicate that spiral scanning can reduce metal artifacts, thereby allowing clear differentiation of bone and implant. Moreover, the PVE, which is a factor that inevitably hinders accurate BIC measurements, was optimized through an advanced algorithm.