• Title/Summary/Keyword: Scattering Pattern

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Bistatic Scattering from a Hemi-Spherically Capped Cylinder

  • Park, Sang-Hyun;La, Hyoung-Sul;Cho, Sung-Ho;Oh, Taek-Hwan;Kim, Young-Shin;Lee, Chang-Won;Na, Jung-Yul
    • The Journal of the Acoustical Society of Korea
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    • v.25 no.3E
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    • pp.115-122
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    • 2006
  • The bistatic scattering of an incident wave by a hemi-spherically capped cylinder is of particular interest because it has rarely been studied until the present day. The configuration of a hemi-spherically capped cylinder is similar to naval underwater weapons (submarines, mines, torpedos, etc.), but which is not exactly the same. This paper describes a novel laboratory experiment aimed at direct measurement of bistatic scattering by a hemi-spherically capped cylinder. Bistatic scattering by a hemi-spherically capped cylinder was measured in an acoustic water tank (5m long, 5m wide, 5m deep) using a high frequency projector (120kHz) and hydrophone. Measurements of monostatic scattering were also made under the same conditions. The bistatic scattering pattern by a hemi-spherically capped cylinder was measured against the incident angles $(0^{\circ},\;15^{\circ},\;20^{\circ},\;30^{\circ},\;45^{\circ},\;60^{\circ},\;90^{\circ})$ in order to verify various scattering pattern characteristics by the change of incident angle. The results indicate that the bistatic scattering TS at a wide scattering angle is much stronger than the mono static scattering TS. In bistatic scattering, the forward scattering TS is significantly stronger than the backward scattering TS, and the forward scattering pattern is also broader. In case of seven incident angles, the maximum value of forward scattering TS is about 14dB stronger than that of backward scattering TS. It is also found that forward scattering varies with the incident angle of sound to a much less extent than backscattering, and it is not seriously affected by the incident angle. These features could be the advantages of using forward scattering for detecting underwater targets at long range and increasing detection area and probability.

Investigation of Laser Scattering Pattern and Defect Detection Based on Rayleigh Criterion for Crystalline Silicon Wafer Used in Solar Cell (태양전지 실리콘 웨이퍼에서의 레일리기준 기반 레이저산란 패턴 분석 및 결함 검출)

  • Yean, Jeong-Seung;Kim, Gyung-Bum
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.5
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    • pp.606-613
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    • 2011
  • In this paper, patterns of laser scattering and detection of micro defects have been investigated based on Rayleigh criterion for silicon wafer in solar cell. Also, a new laser scattering mechanism is designed using characteristics of light scattering against silicon wafer surfaces. Its parameters are to be optimally selected to obtain effective and featured patterns of laser scattering. The optimal parametric ranges of laser scattering are determined using the mean intensity of laser scattering. Scattering patterns of micro defects are investigated at the extracted parameter region. Among a lot of pattern features, both maximum connected area and number of connected component in patterns of laser scattering are regarded as the important information for detecting micro defects. Their usefulness is verified in the experiment.

Mumerical Anlysis of light Scattering Patterns for Measurement of Roughmess(I) (표면 거칠기 광산란 패턴의 컴퓨터 수치 분석 (I))

  • 임동열;김승우
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.16 no.2
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    • pp.267-280
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    • 1992
  • This paper describes a numerical analysis of the light scattering patterns of roughness profiles. This analysis was based upon the light scattering theory developed by Beckmann. In the analysis, the roughness profile was regarded as a profile whose irregularities depend on the production process and the shape of cutting tool. Generally, waviness of an actual surface seriously distorts the scattered pattern of roughness profile. In order to avoid the effects of waviness of actual surfaces, several theoretically calculated scattering patterns, instead of actual scattering patterns, were used to analyze the scattering patterns of typical engineering roughness profiles. The characteristics of the light scattering patterns for five model surfaces were studied.

Scattering Bar Optical Proximity Correction to Suppress Overlap Error and Side-lobe in Semiconductor Lithography Process (Overlap Margin 확보 및 Side-lobe 억제를 위한 Scattering Bar Optical Proximity Correction)

  • 이흥주
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.4 no.1
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    • pp.22-26
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    • 2003
  • Overlap Errors and side-lobes have been simultaneously solved by the rule-based correction using the rules extracted from test patterns. Lithography process parameters affecting attPSM lithography process have been determined by the fitting method to the real process data. The correction using scattering bars has been compared to the Cr shield method. The optimal insertion rule of the scattering bal's has made it possible to suppress the side-lobes and to enhance DOF at the same time. Therefore, in this paper, the solution to both side-lobe and overlap Error has been proposed using rule-based confection. Compared to the existing Cr shield method, the proposed rule-based correction with scattering bars can reduce the process complexity and time for mask production.

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Measurements of scattering and absorption coefficients of diffusers with variation of surface area (확산체의 표면적 변화에 따른 흡음 및 확산계수 측정)

  • Kumar P., Senthil;Kim, Yong-Hee;Jeon, Jin-Yong
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2007.11a
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    • pp.983-986
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    • 2007
  • The absorption power of a surface depends on the surface irregularity which has been known as an important factor in determining scattering coefficient. This study investigates the effect of increase in surface area on the absorption and scattering coefficients of a diffuse surface. The surface irregularity or surface pattern can be compared to the wavelengths and the random-incidence scattering coefficient of surface is measured by ISO 17497-1. The scattering coefficients of increasing the surface area in linear pattern of v-cut groove on rubber plate were measured in 1:10 scale model reverberation chamber. It is found that the scattering and absorption coefficients increase with increasing surface area. At 60% of increased surface area the spacing between the hemisphere diffuser and the v-cut groove acts similar with results of absorption coefficient. The results show that absorption coefficient depends on surface area and the spacing where as scattering coefficient depends on surface area and texture.

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Analysis of Electromagnetic Wave Scattering from a Sea Surface Using a Monte-Carlo FDTD Technique

  • Choi Dong-Muk;Kim Che-Young;Kim Dong-Il;Jeon Joong-Sung
    • Journal of electromagnetic engineering and science
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    • v.5 no.2
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    • pp.87-91
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    • 2005
  • This paper presents a Monte-Carlo FDTD technique to determine the scattered field from a perfectly conducting surface like a sea surface, from which the useful information on the incoherent pattern tendency could be observed. A one-dimensional sea surface used to analysis scattering was generated using the Pierson-Moskowitz model. In order to verify the numerical results by this technique, these results are compared with those of the small perturbation method, which show a good match between them. To investigate the incoherent pattern tendency involved, the dependence of the back scattering coefficients on the different wind speed(U) is discussed for the back scattering case.

High Frequency Scattering from Cylindrical Scatterer (원통형 산란체의 고주파 산란 특성)

  • Kim Kitaek;Yoon Kwan-Seob;La Hyoungsul;Na Jungyul
    • The Journal of the Acoustical Society of Korea
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    • v.24 no.8
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    • pp.441-446
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    • 2005
  • This paper presents the changes of acoustic scattering pattern from a single cylinder and two identical cylinders in both theoretical calculations and experimental measurements. Bi-static scattering pattern by single cylinder and two parallel cylinders (length 2m, radius 30mm) was measured in $5m\times5m\times5m$ water tank using high frequency projector (120 kHz) and hydrophone. The results show similar agreement between experiment and theory. In case of single cylinder scattering. omni-directional pattern was observed in backward but there are fluctuations or target strength in forward. Interference between each cylinder's scattering fields produce fluctuations of target strength in all directions of two cylinders.

OPC Technique in The AttPSM Lithography Process Using Scattering Bars (Scattering Bar를 이용한 AttPSM Lithography 공정에서의 OPC)

  • 이미영;이홍주
    • Proceedings of the KAIS Fall Conference
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    • 2002.11a
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    • pp.201-204
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    • 2002
  • Overlay margin 확보를 위한 oversizing과, design rule checking, jog filtering를 통하여 side-lobe를 추출하였다. 이렇게 추출한 side-lobe를 extent하고, Cr pattern을 정의하여 side-lobe 현상을 해결할 수 있었다. 하지만 이 방법은 mask제조 공정이 복잡하므로 Cr shield방식의 단점인 복잡한 mask제작공정과 구조를 단순화하기 위하여 scattering bar를 이용하였다. 따라서, scattering bar를 삽입하기 위한 rule을 생성하여 metal layer에 적용하고 aerial image simulation을 통해 side-lobe 현상이 억제되었음을 확인하였다. 그리고 앞에서와는 반대로 background clear의 경우에 발생하는 side-lobe에 scattering bar를 적용하여 억제됨을 확인하였다.

A Study on the Synthesis of TE and TM Scattering Patterns of One-Dimensional Inhomogeneous Dielectric Media (일차원 비균질 유전매질의 TE 및 TM 산란패턴 합성에 관한 연구)

  • Nam, June-Seok;Jun, Sang-Jae;Jeon, Hoo-Dong;Jung, Jun-Sik;Park, Eui-Joon
    • Proceedings of the Korea Electromagnetic Engineering Society Conference
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    • 2003.11a
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    • pp.69-73
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    • 2003
  • In this paper, a synthesis method for the desired scattering pattern is presented when illuminating by TE-polarized and TM-polarized plane waves to arbitrary dielectric material. It is considered that the one-dimensional dielectric media are inhomogeneously distributed with continuously varying dielectric constants. Accordingly the desired patterns and the corresponding source distributions are inversely transformed by the proposed algorithm which are based on the one-dimensional inverse scattering problem. Some bandstop spatial filter are illustrated for applications.

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A Study on the Synthesis of Dielectric Constant Potential for Arbitrary Inverse Scattering Pattern Using an Iterative Sampling Method (반복 샘플링법을 사용한 임의 역산란 패턴을 위한 유전율 포텐셜 합성에 관한 연구)

  • 남준석;박의준
    • Journal of the Institute of Electronics Engineers of Korea TC
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    • v.40 no.10
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    • pp.150-158
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    • 2003
  • In the beam pattern synthesis problem using line source, the relationship between source distribution function and beam pattern may be represented by Fourier transform pair. In this paper, a general method to synthesize the line source distribution for a desired lobe-like beam pattern is presented by developing the nonlinear inversion method based on an iterative sampling technique. This method can be applied to the synthesis of continuously distributed dielectric constants satisfying the desired inverse scattering coefficient patterns when illuminating by TE-polarized and TM-polarized plane waves to arbitrary dielectric material. Furthermore this method can also be applied to the synthesis of transmission line with arbitrary reflection coefficient patterns. Some bandstop spatial filter and dispersive transmission line filter are illustrated for generality.