• Title/Summary/Keyword: Sheet resistance

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The Sheet Resistance Properties of Tungsten Nitride Thin films for Intergrated Circuit (IC소자용 질화 텅스텐 박막의 면저항 특성)

  • 이우선;정용호;김남오;정종상;유병수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.11a
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    • pp.94-97
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    • 1997
  • We investigated the sheet resistance properties of tungsten nitride thin films deposited by RF and DC sputtering system. It deposited at various conditions that determine the sheet resistance. The properties of the sheet resistance of these films were measured under various conditions. Sheet resistance analysed under the flow rate of the argon gas and contents of nitrogen from nitrogen-argon gas mixtures. We found that these sheet resistance were largely depend on the temperature of substrate, gas flow rate and RF power. Very high and low sheet resistance of tungsten films obtained by DC sputtering. As the increase of contents of nitrogen gas obtained from nitrogen-argon gas mixture, tungsten nitride thin films deposited by the reactive DC sputtering and the sheet resistance of these films were increased.

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An Experimental Study on the Roof Exposure Waterproofing Method of Tenon Jointing Type used Shiplap Rubberized Asphalt Color Sheet (반턱 고무 아스팔트 칼라 시트를 이용한 접합부 맞춤식 옥상 노출 방수공법에 관한 실험적 연구)

  • Lee, Jung-Hoon;Lee, Sun-Gyu;Kwak, Hyo-Ya;Oh, Sang-Keun
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2008.05a
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    • pp.73-77
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    • 2008
  • In this study, we would like to study on the application of roof exposure waterproofing method of joint stability through shiplap rubberized asphalt color sheet to complement problem of fracture, exfoliation and water leakage by existing roof exposure sheet waterproofing material joint weakness. Accordingly, examined basis performance and stability for joint that shiplap rubberized asphalt color sheet through test of that tensile strength, bonding strength, water permeability after bonding, peel resistance after bonding, lengthen resistance after bonding and hang resistance after bonding. The results of this study, waterproofing method to using shiplap rubberized asphalt color sheet is judged to solved fracture, exfoliation and water leakage problems happened in joint by problem was joint of exposure sheet by minimizing gap of joint being integration by shiplap.

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Effects of phosphate coating on some performance of painted Al alloy sheet (도장 알루미늄 합금판의 성능에 미치는 인산염피막의 영향)

  • 이규환;노병호
    • Journal of the Korean institute of surface engineering
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    • v.28 no.5
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    • pp.289-299
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    • 1995
  • The effects of phosphate coating have been studied on physical properties and corrosion resistance of painted aluminum alloy sheet for automobile body. The physical properties (surface roughness, paint adhesion, impact resistance and pencil hardness) and corrosion resistance(cyclic corrosion and filiform corrosion) were investigated. Phosphate coatings enhanced the physical properties of painted Al alloy sheet, especially paint adhesion after the 240hours water immersion test. Phosphate coating also markedly improved the resistance for cyclic corrosion and filiform corrosion of painted cold rolled steel and Zn-Ni plated steel sheet as well as painted Al alloy sheet. The corrosion resistance of painted Al sheets was varied with the concentration of free fluoride ion and metal additives like Ni and Mn in the phosphating bath. A maximum corrosion resistance was obtained at about 300ppm of fluoride ion and additives of Ni and Mn obviously increased the corrosion resistance of painted specimens.

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Forming Condition for Automotive Body Outer Panel using Aluminum Alloy Sheet for Improved Dent Resistance (차체 외판 부품의 덴트 특성 향상을 위한 알루미늄 판재의 성형조건에 관한 연구)

  • Ko, S.J.;Kim, T.J.;Kim, I.S.
    • Transactions of Materials Processing
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    • v.20 no.6
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    • pp.420-426
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    • 2011
  • Dent resistance is determined by both shape characteristics, i.e., local radius of curvature and sheet thickness, and material properties such as yield strength. This work presents results of a study on the effect of work hardening and bake hardening on dent resistance of aluminum alloy sheet parts by considering the forming condition and baking temperature.

A Study on Resistance Spot Welding of Dissimilar Sheet Metals(Aluminum Alloy - Steel Sheets) (이종재료(알루미늄합금-강판)의 저항 점용접에 관한 연구)

  • 손병천;우승엽;이재범;최용범;장희석
    • Journal of Welding and Joining
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    • v.15 no.4
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    • pp.42-62
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    • 1997
  • Resistance spot welding has been widely used in the sheet metal joining processes because of its high productivity and convenience. Recently, automobile industries are trying to replace partly steel sheets with aluminum alloy sheets. Among currently produced aluminum alloys, Al alloy sheets of Al-Mg-Si(6000 series) are being tested. Especially, 6000 series are the most probable substitute in view of strength and weldability. In this paper, an attempt was made to apply resistance spot welding to joining of dissimilar sheet metals (KS6383+SCPZn or KS6383+SHCP). An effort was made to balance heating rate in the Al alloy with that in the steel sheets by increasing electrode tip diameter. Although resistance spot welding of Al alloy sheet and sheet metals does not produce desirable nugget, it proved to have reasonable strength if optimal weld condition is found by tensile-shear strength and fatigue life test. Since spot weld joints in automobile are always experiencing repeated load, spot welding methodology proposed in this paper is found to be not suitable to automobile body manufacturing.

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Development of a Handheld Sheet Resistance Meter with the Dual-configuration Four-point Probe Method

  • Kang, Jeon-Hong;Lee, Sang-Hwa;Yu, Kwang-Min
    • Journal of Electrical Engineering and Technology
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    • v.12 no.3
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    • pp.1314-1319
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    • 2017
  • A handheld sheet resistance meter that can easily and quickly measure the sheet resistance of indium tin oxide films was developed. The dual-configuration four-point probe method was adopted for this instrument, which measured sheet resistance in the range from $0.26{\Omega}/sq$. to $2.6k{\Omega}/sq$. with 0.3 % ~ 0.5 % uncertainty. The screen of the instrument displayed the sheet resistance when the probe was in contact with the sample surface and the value continued to be displayed during the probe contact. Even after separating the probe from the surface, the value was still displayed on the screen and could be read easily. A feature of the instrument was the use of the dual-configuration technique to reduce edge effects markedly compared with the single-configuration technique and its ease of operation without applying correction factors for sample size and thickness.

Development of Hand-Held Type Sheet Resistance Meter Based on a Dual-Configuration Four-Point Probe Method (Dual-Configuration Four-Point Probe Method에 의한 휴대형 면저항 측정기 개발)

  • Kang, Jeon-Hong;Yu, Kwang-Min;Kim, Wan-Seop
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.59 no.4
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    • pp.423-427
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    • 2010
  • Portable sheet resistance-measuring instrument using the dual-configuration Four-Point Probe method is developed for the purpose of precisely measuring the sheet resistance of conducting thin films. While single-configuration Four-Point Probe method has disadvantages of applying sample size, shape and thickness corrections for a probe spacing, the developed instrument has advantages of no such corrections, little edge effects and measuring simply and accurately the sheet resistance between $0.2\Omega/sq$ and $2k\Omega/sq$.

Characteristics of Gate Electrode for WSi2/CVD-Si/SiO2 (WSi2/CVD-Si/SiO2 구조의 게이트 전극 특성)

  • 박진성;정동진;이우성;이예승;문환구;김영남;손민영;이현규;강성철
    • Journal of the Korean Ceramic Society
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    • v.30 no.1
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    • pp.55-61
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    • 1993
  • In the WSi2/CVD-Si/SiO2 polycide structure, electrode resistance and its property were studied as a function of deposition temperature and thickness of CVD-Si, diffusion condition of POCl3, and WSi2 being deposited or not. Resistivity of poly-Si is decreased with increment of thickness in the case of POCl3 diffusion of low sheet resistance, but it is increased in the case of high sheet resistance. The resistivity of amorphous-Si is generally lower than that of poly-Si. Initial sheet resistance of poly-Si/WSi2 gate electrode is affected by the thickness and resistance of poly-Si layer, but final resistance after anneal, 900$^{\circ}C$/30min/N2, is only determined by WSi2 layer. Flourine diffuses into SiO2, but tungsten does not. In spite of out-diffusion of phosphorus into WSi2 layer, the sheet resistance is not changed.

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An international Comparison Measurement of Silicon Wafer Sheet Resistance using the Four-point Probe Method

  • Kang, Jeon-Hong;Ying, Gao;Cheng, Yuh-Chuan;Kim, Chang-Soo;Lee, Sang-Hwa;Yu, Kwang-Min
    • Journal of Electrical Engineering and Technology
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    • v.10 no.1
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    • pp.325-330
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    • 2015
  • With approval from the Asia Pacific Metrology Program Working Group on Materials Metrology (APMP WGMM), an international comparison for sheet resistance standards for silicon wafers was firstly conducted among Korea Research Institute of Standards and Science (KRISS) in Korea, CMS/ITRI in Taiwan, and NIM in China, which are national metrology institutes (NMIs), from August 2011 to January 2012. The sheet resistance values of the standards are $10{\Omega}$, $100{\Omega}$, and $1000{\Omega}$; the measurement was conducted in sequence at KRISS, CMS/ITRI, NIM, and KRISS again using the four-point probe method with single and dual configuration techniques. The reference value for the measurement results of the three NMIs was obtained through averaging the values of the three results for each sheet resistance range. The differences between the reference value and the measured values is within 0.22% for $10{\Omega}$, 0.17% for $100{\Omega}$, and 0.12% for $1000{\Omega}$. Therefore, the international consistency for conducting sheet resistance measurements is confirmed within 0.22% through the APMP WGMM approved comparison.

An Analysis of Dent Formation by Dynamic Finite Element Method (동적 유한요소해석을 이용한 Dent 발생에 대한 연구)

  • Cha, Sung-Hoon;Shin, Myoung-Soo;Kim, Jong-Bong
    • Transactions of the Korean Society of Automotive Engineers
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    • v.18 no.1
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    • pp.58-65
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    • 2010
  • For the improvement of fuel consumption, the study on the use of lightweight material or thinner sheet have been carried out in automotive industry. With the need for the use of thinner sheet, the dent resistance became one of the major concern in th design of exterior panels in automotive industry. Many studies have been carried out for the dent resistance by experiment or quasi-static numerical simulation. In this study, the dent formation behavior is investigated by dynamic finite element analysis using ABAQUS. Dent formation may be affected by many factors such as sheet thickness, material properties, pre-strain, and sheet curvature. The effect of these factors on dent resistance is investigated. From the analysis following three conclusions are derived. First, dent resistance become hard as the sheet curvature radius increases. Second, dynamic dent resistance is mainly affected by bending stress rather than tensile stress. Third, the pre-strain itself do not give any guidance for dynamic dent resistance and dynamic dent resistance have to be decided considering the strain hardening and thickness reduction together. The results are considered to be reliable and useful to improve the dent damage of automotive panels.