• Journal of the Korean Society for Precision Engineering
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• v.34 no.2
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• pp.101-106
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• 2017

The chemical mechanical planarization (CMP) process combines the chemical effect of slurry with the mechanical effect of abrasive (slurry)-wafer-pads The slurry delivery system has a notable effect on polishing results, because the slurry distribution is changed by the supply method. Thus, the investigation of slurry pumps and nozzles with regard to the slurry delivery system becomes important. This paper investigated the effect of a centrifugal slurry pump on a spray nozzle system in terms of uniform slurry supply under a rotating copper (Cu) wafer, based on experimental results and computational fluid dynamics (CFD). In conventional tools, the slurry is unevenly and discontinuously supplied to the pad, due to a pulsed flow caused by the peristaltic pump and distributed in a narrow area by the tube nozzle. Adopting the proposed slurry delivery system provides a higher uniformity and lowered shear stress than usual methods. Therefore, the newly developed slurry delivery system can improve the CMP performance.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.21 no.9
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• pp.496-504
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• 2009

In order to investigate the feasibility of a direct ice slurry transporting system for the purpose of district cooling, a case study of field application is performed. The research aims include the field measurement of ice packing factor, the performance of coldness delivery, and the branching characteristics of ice slurry. Two representative types of pipe branch are dealt with in this work. For the slurry flow with ice volume fraction of 0.16 or less, the pipe blocking due to aggregation is not observed. Based on the time-wise variation of temperature in the storage tank, a calculating method of ice packing factor is newly developed, which seems to be useful when the brine concentration is unknown. It is confirmed that the mass flow rate of ice slurry per unit cooling load is markedly reduced with increasing the ice content. The pumping power also decreases, but remains unchanged for high ice fractions. The distribution of ice particle before and after branching shows a good uniformity within the range of 5% difference, but yields a unique trend depending on the flow rate.

• Journal of Animal Environmental Science
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• v.11 no.1
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• pp.25-34
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• 2005

The study aimed to develop a tractor drawn animal slurry manure sub-soil injector for arable land and thus, can reduce the waste management cost through effective treatment and utilization of animal slurry manure. The application of animal slurry manure to agricultural land will probably be one of the most effective ways to enrich the soil with vital nutrients. However, some existing slurry manure spenders are not suitable in the field because of their adverse effects to the environment. Based on this premise, a prototype was designed and assembled using 5 sub-soiling standards attached to the sin injector device. The traction force of the Prototype measured in the depth of 10 cm and 15 cm from the ground surface of a paddy field was 1,062 kgf and 1,214 kgf, respectively. A unique feature of the machine was that there was an equal volume of slurry manure flowing from each delivery pipe and regulated by a pressurized container that was likewise synchronized with the speed of the tractor The sub-soiling manure injection system can mitigate or reduce the harmful emission of obnoxious gases and malodor during the injection operation.