• 한국정밀공학회지
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• 제34권2호
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• pp.101-106
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• 2017

The chemical mechanical planarization (CMP) process combines the chemical effect of slurry with the mechanical effect of abrasive (slurry)-wafer-pads The slurry delivery system has a notable effect on polishing results, because the slurry distribution is changed by the supply method. Thus, the investigation of slurry pumps and nozzles with regard to the slurry delivery system becomes important. This paper investigated the effect of a centrifugal slurry pump on a spray nozzle system in terms of uniform slurry supply under a rotating copper (Cu) wafer, based on experimental results and computational fluid dynamics (CFD). In conventional tools, the slurry is unevenly and discontinuously supplied to the pad, due to a pulsed flow caused by the peristaltic pump and distributed in a narrow area by the tube nozzle. Adopting the proposed slurry delivery system provides a higher uniformity and lowered shear stress than usual methods. Therefore, the newly developed slurry delivery system can improve the CMP performance.

• 한국대기환경학회지
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• 제23권4호
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• pp.478-486
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• 2007

Numerical analysis had been performed to understand flow characteristics of the flue gas and slurry in the absorber of a flue gas desulphurization (FGD) system using computational fluid dynamics (CFD) technique. Two-fluid(Euler-Lagrangian) model had been employed to simulate physical phenomenon, which slurry particles injected through slurry spray nozzles fall down and bump into the flue gas inflowing through inlet duct. It was not necessary to adopt pre-defined pressure drop inside the absorber because interaction between flue gas and slurry particles was considered. Hundreds of slurry spray nozzles were considered with the spray velocity at the nozzles, swirl velocity and spreading angle. The results note that the flow disturbance of flue gas is found at the bottom of the absorber, and the current rising with high speed stream is observed in the opposite region of the inflow duct. The high speed stream is reduced as the flue gas goes up, because the high speed stream of flue gas dumps falling slurry particles due to momentum exchange between flue gas and slurry particles. In spite of some disproportion in slurry distribution inside the absorber, escape of slurry particles from the absorber facility is not observed. The pressure drop inside the absorber is mainly occurred at the bottom section.

• 대한기계학회논문집B
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• 제24권9호
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• pp.1277-1284
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• 2000

To enhance heat transfer characteristics of water, micro-encapsulated octadecane of about $10{\mu}m$ diameter was added to water. Viscosity of the slurry was measured by using a capillary tube viscometer. The measured viscosity decreased as the temperature of the slurry increased, and it increased as the fraction of the capsules in the slurry increased. Thermal characteristics of the octadecane were studied by using a differential scanning calorimeter. The melting temperature and the melting energy of the octadecane were found to be $28.6^{\circ}$ and 34.4kcal/kg, respectively. The convective heat transfer characteristics of the slurry were investigated in a flow loop with a constant heat flux test section. Friction factor of the slurry flow was found to be similar to the expected curve by Petukhov. The Nusselt number of the slurry flow was highest when the octadecane melted. Effective thermal capacity of the 14.2% slurry was found to have 1.67 times of the thermal capacity of water.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2004년도 추계학술대회 논문집
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• pp.48-51
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• 2004

Chemical Mechanical Polishing(CMP) is popularly used in production of semiconductor because of large area polishing ability probability of improvement for more integrated circuit. However, present CMP processing causes some non-uniformity errors which can be critical for highly integrated circuit. Previous studies predict that flow-field of slurry during CMP can create non-uniformity, but no quantitative measurement has conducted. In this study, using PIV, slurry velocity flow-field during CMP is measured by changing the ratio of RPM of pad and carrier with tuned PIV system adequate for small room in CMP machine and Cabot's non-groove pad Epad-A100. The result show that velocity of slurry is majorly determined by pad-rpm and the ratio of between carrier and pad rpm make some changes in streamlines.

• Journal of Advanced Marine Engineering and Technology
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• 제28권8호
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• pp.1225-1238
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• 2004

The present study has been performed for obtaining the melting heat transfer enhancement characteristics of water mixture slurries of plural microcapsules having different diameters encapsulated with solid-liquid phase change material(PCM) flowing in a pipe heated under a constant wall heat flux condition. In the turbulent flow region, the friction factor of the present PCM slurry was to be lower than that of only water flow due to the drag reducing effect of the PCM slurry. The heat transfer coefficient of the PCM slurry flow in the pipe was increased by both effects of latent heat involved in phase change process and microconvection around plural microcapsules with different diameters. The experimental results revealed that the average heat transfer coefficient of the PCM slurry flow was about 2～2.8 times greater than that of a single phase of water.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.198-201
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• 2002

An internal finishing process by the application of magnetic abrasive machining has been developed as a new technology to obtain a fine inner surface of pipe. In this paper, a slurry circulation system was designed and manufactured. Its finishing characteristics was experimently investigated by various effective factors such as dry, water flow, oil flow with a slurry. From the experimental results, it was found that the materal removal and surface roughness were good in oil flow with slurry. The slurry circulation system is effective on the internal finishing of non-ferromagnetic pipe(SUS304).

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2001년도 추계학술대회 논문집
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• pp.160-163
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• 2001

In order to develop a nodule conveying system through a flexible pipe out of the deep-seabed manganese nodule miner, an experimental study of the solid-water slurry flow in vertical pipe is performed as the first stage of total experiments. Hydraulic characteristics of the pipe slurry flow such as slip velocity, transport concentration and pressure gradient are investigated for the size of particle, load ratio, and flow rate of water. The higher the load ratio is, the larger the transport concentration and pressure gradient become. The bigger the size of particles is, the larger the pressure gradient becomes. The effectiveness of the flow rate to hydraulic performance is also investigated. This results are to be used for designing crusher and pump, and operating the conveying device.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.34-37
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• 2004

Recently advancing mobile communication tools and I.T industry, semiconductor device is requested more integrated, faster operation time and more scaled-down. Because of these reasons semiconductor device is requested multilayer interconnection. For the multilayer interconnection chemical mechanical polishing (CMP) becomes one of the most useful process in semiconductor manufacturing process. In this experiment, we focus on understand the characterize and improve the CMP technology by control of slurry flow rate. Consequently, we obtain that optimal flow rate of slurry is 170ml/min, since optimal conditions are less chemical flow and performance high with good selectivity to Ta. If we apply this results to copper CMP process. it is thought that we will be able to obtain better yield.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2001년도 추계학술대회 논문집
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• pp.213-219
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• 2001

In this paper, particle velocity of slurry flow, a kind of solid-particle two phase flow, was measured by using a particle tracking velocimetry. Particles are modeled by sphere-shaped glass whose diameters are 3mm, 5mm, and 7mm At first, a particle which is falling in the water is captured and analyzed to give their free falling velocity. The falling velocity was very high up to about 4m/sec in the air, which needs special algorithm for the accurate measurement. For the upwelling slurry flow in the straight duct, there are some noises caused by cavity. However, the effect was so small that it does not affect the measurement of large particles. From the preliminary study of applying the PTV to measurement of particle movement in slurry flow, we could find out the optimum value of parameters: threshold value., searching area radius and correlation area size.

• 설비공학논문집
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• 제14권5호
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• pp.391-397
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• 2002

Pressure drop were experimentally investigated for ice slurry flowing in the acrylic pipes with inner diameter of 24 mm. Ice slurry was made from 6.5% ethylene glycol-water solution, and the pipes is consisted of horizontal, vertical (upward and downward) and $90^{\circ}$ elbow pipe. The ice Packing factor (IPF) and the flow rate of the experiments were varied from 0 to 30% and from 5 to 70kg/min respectively The measured pressure drop in various pipe positions were compared with those for the solution flow (IPF=0). The pressure drop was larder than that for solution flows as the IPF increased when the flow rate was low or very high. Sharp increases in pressure drop were observed for the cases when IPF is more than 70% in horizontal and vertical pipes, whereas the pressure drop increased with the IPF simultaneously in an elbow pipe.