• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.04a
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• pp.374-378
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• 2014

The piezoelectric materials convert from mechanical energy to electrical energy. The piezoelectric materials are used in various engineering applications such as piezoelectric ultrasonic actuators. Since the piezoelectric coupling characteristics of the actuator systems should be considered at the initial design stage, it is essential to analyze the piezoelectric coupling characteristics of the ultrasonic actuators. In this study, we analyzed the electromechanical characteristics of piezoelectric stacked actuator using the equivalent circuit model with modal mass stiffness parameters. It was compared the admittance of piezoelectric stack actuators with the analytical circuit model and the finite element model. Also, the coupling coefficient of piezoelectric stack actuator was discussed according to the number of stacks of actuators.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.9
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• pp.2272-2283
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• 1994

In scanning tunneling microscopy, the piezoelectric actuator is popuilarly used in stacked type as it can provide remarkable positioning resolution and stiffness. The actuator, however, exhibits a considerable amount of hystereic nonlinearity, resulting in losses of overall measuring accuracy when a linear model is used for its control and calibration, In this study, a nonlinear model is proposed for predicting the precise relationship between the input connand voltage and the output displacement of the actuator itself, cross-coupled electrical behaviours of the driving circuit with the actuator, and mechanical characteristics of the driven components of the actuator. Finally experimental results prove that the nonlinear model enhances the measuring of scanning tunneling microscopy by an order ten in comparison with a conventional linear model.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.12
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• pp.45-52
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• 1995

A prototype of a linear piezoelectric actuator is developed and its dynamic behaviors are investigated. The actuator consists of a driving tip with two stacked piezoelectric elements and a slider. Dynamic characteristics of slider over various vibration lici of the driving tip and changes of normal force acting on the vibratory tip are examined through experiments. The moving direction of slider can be controlled by changing a phase angle between input signals applied to piezoelectric elements. A change of phase difference between input signals also have a great influence on the vibration locus of driving tip. Changes of slider motion due to different vibration loci are examined by experiments.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.578-582
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• 2007

In this paper, vibration modes and frequencies of a ring-type stacked piezoelectric actuator for a wire bonding transducer system are analyzed using FEM simulations. We implement experiments using a commercial product model of the actuator PZT module which consists of 6 layer ring-type PZT and 7 electrodes, combined bolts, nut and tinut. There are two main results: One is that FEM analysis should consider the effect the harmonic voltage input in order to meet the experimental results. The other is that the current wire bonder using exciting frequency of 136 kHz should be modified in order to improve the actuator and bonding performance because the actuator module has the main longitudinal mode of 145 kHz.

• Design & Manufacturing
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• v.14 no.3
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• pp.23-30
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• 2020

Laser Assisted Thermo-Compression Bonding (LATCB) has been proposed to improve the "chip tilt due to the difference in solder bump height" that occurs during the conventional semiconductor chip bonding process. The bonding module of the LATCB system has used a piezoelectric actuator to control the inclination of the compression jig on a micro scale, and the piezoelectric actuator has been directly coupled to the compression jig to minimize the assembly tolerance of the compression jig. However, this structure generates a lateral force in the piezoelectric actuator when the compression jig is tilted, and the stacked piezoelectric element vulnerable to the lateral force has a risk of failure. In this paper, the optimal design of the flexure hinge was performed to minimize the lateral force generated in the piezoelectric actuator when the compression jig is tilted by using the displacement difference of the piezoelectric actuator in the bonding module for LATCB. The design variables of the flexure hinge were defined as the hinge height, the minimum diameter, and the notch radius. And the effect of the change of each variable on the stress generated in the flexible hinge and the lateral force acting on the piezoelectric actuator was analyzed. Also, optimization was carried out using commercial structural analysis software. As a result, when the displacement difference between the piezoelectric actuators is the maximum (90um), the maximum stress generated in the flexible hinge is 11.5% of the elastic limit of the hinge material, and the lateral force acting on the piezoelectric actuator is less than 1N.

• Journal of the Korean Ceramic Society
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• v.41 no.3
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• pp.216-220
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• 2004

This paper is concerned with the development of stacked ceramic thin actuation layer IDEAL (InterDigitated Electrode Actuation Layer) using d$_{33}$ actuation mechanism of piezoelectric ceramic. Most of the thin piezoelectric actuators are operated with d$_{31}$ actuation mechanism. Many kinds of piezoelectric ceramic actuators are strived now to improve the actuation performance. One of efforts to improve performance of piezoceramic actuators is the research trying to develop an actuator using the piezoelectric coefficient d$_{33}$ . The piezoelectric coefficient d$_{33}$ is almost twice larger than piezoelectric coefficient d$_{31}$ . Therefore, the induced strain of PZT thin layer with d$_{33}$ 3 actuation mechanism is bigger than that with d$_{31}$ actuation mechanism. The AFC(MIT) and LaRC-MFC$^{TM}$ which is developed by a research team of NASA Langley Research Center used d$_{33}$ actuation mechanism with surface interdigitated electrode to enhance its actuation performance. But their actuation mechanism is not perfect d$_{33}$ actuation mechanism since the interdigitated electrodes are placed at the surface of the actuation layer. In this research, the stacked ceramic thin actuation layer with imbedded interdigitated electrode is designed and manufactured. The actuation strain of stacked ceramic thin actuation layer is measured and compared with the actuation strain of the LaRC-MFC$^{TM}$. The comparison shows that the developed stacked ceramic thin actuation layer can produce 15% more actuation strain than LaRC-MFC$^{TM}$.> TM/.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.12
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• pp.1185-1191
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• 2011

The kinematic characteristics of cutting device significantly affects cutting performance in 2-dimensional elliptical vibration cutting(EVC) where the cutting tool cuts workpiece, traversing a micro-scale elliptical trajectory in a trochoidal motion. In this study, kinematical characteristics of EVC device constructed with two parallel stacked piezoelectric actuators were analytically modeled and compared with the experimental results. The EVC device was subjected to step and low-frequency(0.1 Hz) sinusoidal inputs to reveal only its kinematical displacement characteristics. Hysteresis in the motion of the device was observed in the thrust direction and distinctive skew of the major axis of the elliptical trajectory of the cutting tool was also noticed. Discrepancy in the voltage-to-displacement characteristics of the piezoelectric actuators was found to largely contribute to the skew of the major axis of the elliptical trajectory of the cutting tool. Analytical kinematical model predicted the cutting direction displacement within 10 % error in magnitude with no phase error, but in estimating the thrust direction displacement, it showed a $27^{\circ}$ of phase-lag compared with the measured displacement with no magnitude error.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.43 no.11
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• pp.963-970
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• 2015

In this study, the pressurization characteristics of the small piezoelectric hydraulic pump for a brake system has been analyzed through modeling the full hydraulic pump components; the pump chamber, check valve, pump load, pump drive controller etc. To analyze the pressurization characteristics, the process of charging pressure in the chamber with stacked-layer piezoelectric actuator were firstly modeled. Secondly, the flow coefficient of the check valve in terms of valve opening has been calculated after computational fluid dynamics analysis, such as the pressure distribution around check valve and the flow rate, was conducted. Also the pump driving controller, which controls the input voltage to the actuator, was designed to make the load pressure follow the input pressure command. The simulation results find that it takes about 0.03ms to reach the operating load pressure required for the braking system. The simulation result was also verified through comparison to the result of the pump performance test.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.198-204
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• 2005

For precise micro V-grooving, ultrasonic elliptical vibration cutting (UEVC) is proposed using two parallel piezoelectric actuators, which are energized by sinusoidal voltages with a phase difference of 90 degrees. Experimental setup is composed of stacked PZT actuators, a single crystal diamond cutting tool, and a precision motorized xyz stage. It is found that the chip formed in the process of UEVC is discontinuous because of the periodic contacts and non-contacts occurring between the tool and workpiece. It is experimentally observed that the cutting force in the process of UEVC significantly reduces compared to the ordinary non-vibration cutting. In addition, the creation of burr during UEVC is significantly suppressed, which is attributable to the decrease in the specific cutting energy.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.10
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• pp.1514-1519
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• 2001

This paper is concerned with design, manufacturing and performance test of LIPCA ( Lightweight Piezo- composite Curved Actuator) using a top carbon fiber composite layer with near -zero CTE(coefficient of thermal expansion), a middle PZT ceramic wafer and a bottom glass/epoxy layer with high CTE. The main point of this design is to replace the heavy metal layers of THUNDER by thigh tweight fiber reinforced plastic layers without losing capabilities to generate high force and large displacement. It is possible to save weight up to about 30% if we replace the metallic backing material by the light fiber composite layer. We can also have design flexibility by selecting the fiber direction and the size of prepreg layers. In addition to the lightweight advantage and design flexibility, the proposed device can be manufactured without adhesive layers when we use epoxy resin prepreg system. Glass/epoxy prepregs, a ceramic wafer with electrode surfaces, and a graphite/epoxy prepreg were simply stacked and cured at an elevated temperature (177 $^{circ}C$ after following an autoclave bagging process. It was found that the manufactured composite laminate device had a sufficient curvature after detached from a flat mold. The analysis method of the cure curvature of LIPCA using the classical lamination theory is presented. The predicted curvatures are fairly in agreement with the experimental ones. In order to investigate the merits of LIPCA, a performance test of both LIPCA and THUNDE$^{TM}$ were conducted under the same boundary conditions. From the experimental actuation tests, it was observed that the developed actuator could generate larger actuation displacement than THUNDERT$^{TM}$.