• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.114-118
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• 2001

HP Laser Interferometer Measurement System[HP5529A] is one of the most powerful equipment for measurement of the motion accuracy. The straightness measurement system of the HP5529A is composed of wollastone prism and reflector. In this system, straightness error is measured by relative lateral motion between prism and reflector. But rotating motion of prism or reflector as moving optic causes not real straightness error but additive straightness error. Especially unwanted straightness error as this becomes very large when reflector is used as moving optic and an interval between reflector and prism is distant. In this paper, the compensation method is proposed for removing additive error and experiment is carried out for theoretical verification.

• 한국정밀공학회지
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• 제22권9호
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• pp.69-76
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• 2005

The laser interferometer system such as HP5529A is one of the most powerful equipment fur measurement of the straightness error in precision stages. The straightness measurement system, HP5529A is composed of a Wollaston prism and a reflector. In this system, the straightness error is defined as relative lateral motion change between the prism and the reflector and computed from optical path difference of two polarized laser beams between these optics. However, rotating motion of the prism or the reflector used as a moving optic causes unwanted straightness error. In this paper, a compensation method is proposed for removing the unwanted straightness error generated by rotating the moving optic and an experiment is carried out for theoretical verification. The result shows that the unwanted straightness error becomes very large when the reflector is used as the moving optic and the distance between the reflector and the prism is far. Therefore, the prism must be generally used as the moving optic instead of the reflector so as to reduce the measurement error. Nevertheless, the measurement error must be compensated because it's not a negligible error if a rotating angle of the prism is large. In case the reflector must be used as the moving optic, which is unavoidable when the squareness error is measured between two axes, this compensation method can be applied and produces a better result.

• 한국정밀공학회지
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• 제30권6호
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• pp.607-614
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• 2013

In this study, effect of the sensor gain error is theoretically analyzed and simulated when mixed sequential two-prove method(MTPM) is applied for the precision measurement of straightness error of a linear motion table. According to the theoretical analysis, difference of the gain errors between two displacement sensors increases measurement error dramatically and alignment error of the straightedge is also amplified by the sensor gain difference. On the other hand, if the gain errors of the two sensors are identical, most of error terms are cancelled out and the alignment error doesn't give any influence on the measurement error. Also the measurement error of the straightness error is minimized compared with that of the straightedge's form error owing to close relationship between straightness error and angular motion error of the table in the error terms.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2006년도 춘계학술논문 발표대회 제6권1호
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• pp.173-176
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• 2006

The purpose of this study is to investigate the cause of an error of prefounded column straightness and to measure the error during Top-Down construction. There are several causes of an error of prefounded column : (1) The columns are connected by welding or other methods. (2) concrete and aggregates are put in columns. (3) The columns are constructed during the construction. The error of column straightness is different for each column, and the tilting of columns is shown in one or two directions between floors. The additional loads caused by the error of straightness may give damage to buildings.

• 한국정밀공학회지
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• 제17권5호
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• pp.124-130
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• 2000

For measuring out the submicron order straightness, a precision measuring device is developed in this paper. The device is constructed with a hydrostatic feed table and a capacitive type sensor which is mounted to the feed table. Straightness is acquired as substracting the motion error of feed table from the measured profile with probe. Motion error of feed table is simultaneously compensated upto 0.120${\mu}{\textrm}{m}$ of linear motion error and 0.20arcsec of angular motion error using the active controlled capillary. Reversal method and strai호t-edge is used fur estimating the measuring accuracy and from the experimental result, it is verified that the device has the measuring accuracy 0.030m. Also, through the practical application on the measurement of ground surface, it is confirmed that the device is very effective to measure the submicron order straightness.

• 한국건축시공학회지
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• 제6권4호
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• pp.77-83
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• 2006

The purpose of this study is to measure the straightness of prefounded columns during underground construction stages. There are several causes of an error of prefounded column: (1) columns connected by welding or bolting, (2) by placement of concrete and aggregates around columns, (3) movement during construction, and (4) load applied during construction. The error of column straightness is different for each column, and the tilting of columns is shown in one or two directions between floors. The additional loads caused by the error of straightness may give damage to buildings. This paper presents the measurement results of column straightness, and thus providing a basis for further analysis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.530-536
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• 2004

In this paper a servo-system is developed to improve straightness of linear motor stages. When a linear motor stage is used for high-precision linear motion systems, high precision straightness accuracy is necessary to meet the required position accuracy. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to the friction, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performance are illustrated along with some experimental results.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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• pp.11-14
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• 2007

An additive servo-system is developed to improve straightness of linear motor stages. For linear motor stages used in the field of high-precision linear motion process, high straightness accuracy is necessary as well as positioning accuracy in the longitudinal axis. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to modeling error and friction disturbance, a sliding mode control is addressed. The effectiveness of the suggested mechanism and the control are illustrated along with some experimental results.

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.26-31
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• 2008

A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

• 대한전기학회논문지:시스템및제어부문D
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• 제54권1호
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• pp.33-39
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• 2005

In this paper, we propose a slider servo-mechanism driven by electro-magnetic actuator to improve straightness of linear motor stages. Based on axial-position dependent deterministic characteristics of the straightness error, a feedforward compensation control is appled to reduce the straightness error. In the consideration of uncertain properties of friction and its effects on positioning accuracy, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performances are illustrated along with some experimental results.