• Journal of Mechanical Science and Technology
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• v.19 no.2
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• pp.649-654
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• 2005

This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the JSR (negative PR) molding process, and etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and $30{\mu}m$, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micro pump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about $0.36\;{\mu}L/sec$ at 2 Hz for the zero hydraulic pressure difference when the 3-phase input voltage is 20 V.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.694-697
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• 2005

This paper presents a novel movable microneedle that becomes active when necessary to use. Conventional researches have been focused on the fabrication of microneedles and the interface with fluidic chip [1,2]. Therefore, we proposed an active microneedle to sample body fluids or deliver drugs in a controlled amount by actuating the needles. This allows us to keep the needles in operation only when necessary so that both the body skin and the needles can be protected from undesirable external disturbance while no operation.