• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.615-616
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• 2007

• 한국생산제조학회지
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• 제19권3호
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• pp.365-369
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• 2010

Magnetic fluid seal is characterized by its simple design, low friction and being dustless. Those advantages are deduced from the fact that the sealing element is not a solid such as rubber or plastic but it is a fluid. Those are critical for application to a rotating shaft which is inserted into a vacuum chamber where high level of vacuum and cleanness are required. For the reason the magnetic fluid seal has become a standard for vacuum chambers for semiconductor and LCD processing. It should be noted that its sealing performance is sensitive to temperature. If necessary, water cooling should be considered. Thus anticipation of the temperature distribution of the magnetic fluid seal is important before applying it. In this paper an FEM analysis of the heat transfer has been executed and compared with experimental results. An overall convective heat transfer coefficient has been adopted for the analysis, which results in satisfactory consistency of the theoretical and experimental results.

• 한국정밀공학회지
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• 제33권12호
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• pp.971-977
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• 2016

Recently, the problem of the accumulation of fine sludge from the cutting oil generated during machining processes has become a major threat to the environment. The fine sludge has adverse affects on the human body and the environment, and significantly contributes to marine pollution. However, a microfiltration technique that can process the sludge still needs to be studied and developed on a global scale. Therefore, it is necessary to develop eco-friendly equipment such as an ECO vacuum filter system and eco-friendly technologies for processing cutting oil. In this study, a structural analysis was carried out using a finite element method (FEM). Improved models of the suction chamber for the ECO vacuum filter system were proposed based on the analysis of the displacement and stress of the system. The model with the best result was then optimized using the commercial software, ANSYS. It was confirmed that, in the optimized model, displacement and stress were reduced in comparison with the initial model. Finally, the structural stability of the optimized model was verified through analysis.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 춘계학술대회논문집
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• pp.460-465
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• 2002

The nonlinear vibration of the CRT shadow mask is analyzed in consideration of the V-shaped tension distribution and the effect of wire impact damping. The reduced order FEM model of the shadow mask is obtained from dynamic condensation for the mass and stiffness matrices. Damping wire is modeled using the lumped parameter method to effectively describe its contact interactions with the shadow mask. The nonlinear contact-impact model is composed of spring and damper elements, of which parameters are determined from the Hertzian contact theory and the restitution coefficient, respectively. The analysis model of the shadow mask with damping wires is experimentally verified through impact tests of shadow masks performed in a vacuum chamber. Using the validated analysis model of the shadow mask with damping wires, the‘design of experiments’technique is applied to search fur the optimal damping wire configuration so that the vibration attenuation of the shadow mask is maximized.

• Tribology and Lubricants
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• 제19권1호
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• pp.9-14
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• 2003

The sealing performance of an elastomeric O-ring using the double layered material has been analyzed fer the contact stress behaviors that develop between the O-ring seal and the surfaces with which it comes into contact. The leakage of an O-ring will occur when the pressure differential across the seal Just exceeds the initial (or static) peak contact stress. The contact stress behaviors that develop in compressed O-rings, in common case of dovetail grooved geometry, are investigated using the finite element method. The FE analysis includes material hyperelasticity and axisymmetry. The computed FEM results show that the contact stress behaviors are related to the ratio of diameter between the inner ring and the outer ring, and the temperature of vacuum chamber.

• Tribology and Lubricants
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• 제16권2호
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• pp.138-143
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• 2000

The sealing performance of an elastomeric O-ring seal with a temperature gradient has been analyzed for the contact stress behaviors that develop between the O-ring seal and the housing surfaces with which it comes into contact in the dovetail groove. The leakage of an O-ring seal will occur when the pressure differential across the seal just exceeds the initial peak contact stress. The contact stress behaviors that develop in compressed O-rings, in common case of restrained geometry (grooved), are investigated using the finite element method. The FE analysis includes material hyperelasticity and axisymmetry The computed FEM results show that the contact stress behaviors are related to a compression rate and a temperature gradient between the vacuum chamber with a dovetail groove and the contacting plate with a cooling jacket.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1999년도 제30회 추계학술대회
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• pp.283-288
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• 1999

The sealing performance of an elastomeric O-ring seat with a temperature gradient has been analyzed for the contact stress behaviors that develop between the O-ring seal and the surfaces with which it comes into contact. The leakage of an O-ring seal will occur when the pressure differential across the seal just exceeds the initial (or static) peak contact stress. The contact stress behaviors that develop in compressed O-rings, in common case of restrained geometry (grooved), are investigated using the finite element method. The analysis includes material hyperelasticity and axisymmetry. The computed FEM results show that the contact stress behaviors are related to a compression rate and a temperature gradient between the vacuum chamber with a groove and the contacting plate with a cooling jacket.

• 한국소음진동공학회논문집
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• 제12권9호
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• pp.731-737
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• 2002

Nonlinear vibration of the CRT shadow mask with impact damping wires is analyzed in consideration of the mask tension distribution and the effect of wire impact damping. A reduced order FEM model of the shadow mask is obtained from dynamic condensation of the mass and stiffness matrices, and damping wire is modeled using the lumped parameter method to effectively describe its contact interactions with the shadow mask. The nonlinear contact-impact model is composed of spring and damper elements, of which parameters are determined from the Hertzian contact theory and the restitution coefficient, respectively. The analysis model of the shadow mask with damping wires is experimentally verified through impact tests of shadow masks performed in a vacuum chamber.

• 한국기계가공학회지
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• 제10권2호
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• pp.79-83
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• 2011

Magnetic seal uses a magnetic fluid to seal a gap between a rotating shaft and housing. It is distinguished from other kinds of seals from the fact that solid contact does not occur in the seal. This implies that it is free from solid rubbing thus dustless and provides a clean circumstance. That is the reason why the magnetic seal is used exclusively for most of vacuum chambers in semiconductor process where dustless clean circumstance is critical. A magnetic seal has been developed of which design parameters are determined based on published data, and an air pressure test has been done to examine its sealing capability. Effects of some design parameters have been studied through FEM analysis. The results show some notable aspects of design parameters and provide suggestions for developing the seals. Regarding the sealing capacity of the magnetic seal the factor to match the theoretical value with the actual one was found to be 0.4~0.7, which means still there is some discrepancy between theory and actual.

• 천문학회보
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• 제35권1호
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• pp.40.1-40.1
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• 2010

The Main payload of the STSAT-3 (Korea Science & Technology Satellite-3), MIRIS (Multipurpose Infra-Red Imaging System) has been developed for last 3 years by KASI, and its Flight Model (FM) is now being developed as the final stage. All optical lenses and the opto-mechanical components of the FM have been completely fabricated with slight modifications that have been made to some components based on the Engineering Qualification Model (EQM) performances. The components of the telescope have been assembled and the test results show its optical performances are acceptable for required specifications in visual wavelength (@633 nm) at room temperature. The ensuing focal plane integration and focus test will be made soon using the vacuum chamber. The MIRIS mechanical structure of the EQM has been modified to develop FM according to the performance and environment test results. The filter-wheel module in the cryostat was newly designed with Finite Element Analysis (FEM) in order to compensate for the vibration stress in the launching conditions. Surface finishing of all components were also modified to implement the thermal model for the passive cooling technique. The FM electronics design has been completed for final fabrication process. Some minor modifications of the electronics boards were made based on EQM test performances. The ground calibration tests of MIRIS FM will be made with the science grade Teledyne PICNIC IR-array.