• Journal of the Korean Institute of Telematics and Electronics
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• v.25 no.7
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• pp.791-798
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• 1988

Films of Cr, Cu, and Al were deposited by the evaporation technique at the high vacuum level-high evaporation rate and the low vacuum level-low evaporation rate. We measured sheet resistance and light transmittance, and observed microstructure and diffraction pattern by TEM, and investigated oxygen content in thin film by AES. We discussed the relations among microstructure, sheet resistance, and light transmittance with AES data. We found that the films deposited at the high vacuum level-high evaporation rate have small oxygen content in thin film comparing to the films deposited at the low vacuum level-low vacuum level-low evaporation rate, and that the films having crystalline structure and larger grain size were formed in the case of the high vacuum level-high evaporation rate and they showed lower sheet resistance and lower light transmittance.

• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.5
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• pp.632-639
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• 2014

Mechanical stress and the vacuum level are the two main factors dominating the quality factor of a resonator operated in the vacuum range 1 mTorr to 10 Torr. This means that if the quality factor of a resonator is very insensitive to the mechanical stress in the vacuum range, it is sensitive to mainly the ambient vacuum level. In this paper, a wafer-level packaged MEMS resonator with a highly vacuum-sensitive quality factor is presented. The proposed device is characterized by a package with out-of-plane symmetry and a suspending structure with only a single anchor. Out-of-plane symmetry helps prevent deformation of the packaged device due to thermal mismatch, and a single-clamped structure facilitates constraint-free displacement. As a result, the proposed device is very insensitive to mechanical stress and is sensitive to mainly the ambient vacuum level. The average quality factors of the devices packaged under pressures of 50, 100, and 200 mTorr were 4987, 3415, and 2127, respectively. The results demonstrated the high controllability of the quality factor by vacuum adjustment. The mechanical robustness of the quality factor was confirmed by comparing the quality factors before and after high-temperature storage. Furthermore, through more than 50 days of monitoring, the stability of the quality factor was also certified.

• Journal of Information Display
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• v.5 no.4
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• pp.7-11
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• 2004

Effects of base vacuum level on the electrical and optical characteristics of the plasma display panel (PDP) were investigated. The relationship between efficiency and base vacuum level before filling discharge gas was analyzed. For the base vacuum level of $1{\times}10^{-4}$ torr, firing voltage of a 2-inch diagonal PDP panel was 232 V at the discharge gas pressure of 400 torr and luminous efficiency was 1.5 lm/W at 180V sustaining pulse. On the other hand for $1{\times}10^{-6}$torr, the firing voltage was reduced to 215 V and luminous efficiency was improved considerably to 2.5 lm/W. We successfully demonstrated the smooth operation of tip-less PDP fabricated using vacuum in-line sealing method.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.95-97
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• 1999

A 3.12" FED panel was packaged successfully using the anode plate on which phosphors and black matrix were coated and cathode plate containing emitter arrays. The vacuum level of the panel was investigated during panel evacuation, tip-off and getter activation process. The packaged panel exhibited vacuum level below 2${\times}$10-6 Torr. Similar experiments were carried out for 10" panel made of bare plates. In addition, the vacuum level of two panels was compared continuously after tip off process; one with the getter and the other without it.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.3
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• pp.181-185
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• 2016

One of the important issues for fabricating the microelectronic display devices such as FED, PDP, and VFD is to obtain a high vacuum level inside the panel. In addition, sustaining the initial high vacuum level permanently is also very important. In the conventional packing technology using a tabulation method, it is not possible to obtain a satisfiable vacuum level for a proper operation. In case of FED, the poor vacuum level results in the increase of operating voltage for electron emission from field emitter tips and an arcing problem, resultantly shortening a life time. Furthermore, the reduction of a sealing process time in the PDP production is very important in respect of commercial product. The most probable method for obtaining the initial high vacuum level inside the space with such a miniature and complex geometry is a vacuum in-line sealing which seals two glass plates within a high vacuum chamber. The critical solution for the vacuum sealing is to develop a frit glass to avoid the bubbling or crack problems during the sealing process at high temperature of about $400^{\circ}C$ under the vacuum environment. In this study, the suitable frit power was developed using a mixture of vitreous and crystalline type frit powders, and a vacuum sealed CNT FED with 2 inch diagonal size was fabricated and successfully operated.

• Journal of the Korean Vacuum Society
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• v.15 no.1
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• pp.57-63
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• 2006

We have examined the electrical and optical characteristics of the plasma display panel(PDP) produced by vacuum in-line sealing technology. We found that the luminous efficiency was decreased as the base vacuum level was increased. For the base vacuum level of $1\times10^{-3}$ Torr, the firing voltage was 235V at the discharge gas pressure of 400 Torr and the luminous efficiency was 0.8 lm/W at 180V sustaining pulse. However, for the base vacuum level of $1\times10^{-6}$ Torr, the firing voltage was reduced to 215V and the luminous efficiency was improved to 2.5lm/w. Finally, we demonstrated successfully the operation of tip-less PDP fabricated using vacuum in-line sealing method.

• Journal of Information Display
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• v.9 no.4
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• pp.15-20
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• 2008

A DC-magnetron inline sputter was established, and the influence of the base pressure on the structural characteristics of the ITO thin films was studied. When the inline sputter system was established and operated for ITO sputtering, its initial vacuum level did not go below $5\times10^{-6}$ torr. The vacuum leak test was conducted by measuring t he elapsed time until the vacuum level reached $1\times10^{-6}$ torr. The base pressure was successfully maintained at $1\times10^{-6}$ torr for 900 min, and the uniformity of the ITO film that had been deposited at this pressure significantly improved.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.93-94
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.912-915
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• 2004

A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.112-120
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• 2008

Today, the use of a vacuum cleaner gave us the higher quality of life than past time, but sometimes made us w1comfortable in the house because of the specific noise that is annoying. So we need to study how sound absorbtion materials affect sound power level and sound quality with sound metrics. In this paper, we will measure and calculate sound power level for vacuum cleaner and analyze characteristics of the noise for 10 Signals according to materials positioned in vacuum cleaner. The multiple regression analysis can estimate the nonlinear characteristics of relation between subjective evaluation and sound metrics. So we will develop sound quality index for vacuum sound.