• The Transactions of the Korean Institute of Electrical Engineers P
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• v.56 no.4
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• pp.157-160
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• 2007

The van der Pauw technique is one of the popular methods for determining the conductivity of flat metal samples. Traceability of the national standard for the conductivity has been achieved by direct current measurement techniques in national measurement institutes of many countries. But recently, alternative current measurement techniques for determining the conductivity of flat metal samples is also interested. In this study, we measured the conductivity of non-ferrous and ferrous flat metals at alternative current using van der Pauw technique. As measurement results, the conductivities of the samples were decreased according to increasing the test frequency even though the decreasing ratio was different.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1634-1636
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• 2004

반도체 웨이퍼의 면저항을 정밀 측정하는 대표적인 두가지 방법인 4탐침(four point probe)방법과 van der Pauw방법으로 반도체 웨이퍼의 면저항을 비교평가 하였다. 4탐침방법에 의한 측정 시스템을 사용하여 웨이퍼의 전체 면에 대하여 면저항을 측정하고, 같은 웨이퍼의 가장자리 네 지점에 탐침 전극을 구성한 후 van der Pauw 방법으로 면저항을 측정한 결과 4탐침 방법에 의한 측정결과를 기준으로 1 %이하의 일치도를 나타냈다.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.62 no.11
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• pp.1617-1620
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• 2013

The widely-used measurement methods for conductivity of non-magnetic metals are van der Pauw method, Two Point Probe method and Eddy Current method. Among them a more simpler and easier method is the Eddy Current method and an instrument using the method is a Conductivity Meter which can measure a conductivity by contacting its probe on a sample surface. However, conductivity standards are essentially needed to confirm the meter's performance or to calibrate it. In this study, six kinds of the standards which are made of Cu, Al-1, Al-2, brass, Zn and SUS-316 are developed and conductivity ranges for the standards are 2.27 %IACS ~ 101.6 %IACS with measurement uncertainty of less than 0.3 %.

• Proceedings of the KIEE Conference
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• 2015.07a
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• pp.1515-1516
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• 2015

Touch panel 및 Touch screen 등의 투명전극으로 많이 사용되고 있는 ITO(Indium Tin Oxide)나 CNT(Carbon Nano Tube) 등 전도성 박막의 면저항을 쉽고 빠르게 측정하기 위하여 van der Pauw method를 이용한 면저항 측정기를 개발하였다. 이 면저항 측정기는 대면적 시료의 면저항을 측정 할 수 있어 매우 편리하다. 면저항 측정은 주로 Four Point Probe method로 측정하는 것이 일반적이나 본 연구에서는 van der Pauw method를 이용한 측정값과 Four Point Probe method로 측정한 결과를 비교한 결과 1 % 이내에서 일치하였다. 개발된 측정기의 측정 정확도는 지시값의 1.0 % 이하이고, 측정범위는 $2{\Omega}/{\square}{\sim} 5k{\Omega}/{\square}$이다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.185-188
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• 1996

The doped n-type $Al_{x}Ga_{1-x}Sb$ crystals were grown by the vertical Bridgman method at composition ratio x=0, x=0.1, x=02 respectively. The lattice constants of the $Al_{x}Ga_{1-x}Sb$ crystals were 6.096${\AA}$, 6.097${\AA}$, 6.106${\AA}$ at composition ratio respectively. The carrier concentration, the resistivity, and the carrier mobility measured by the Van der Pauw method at x-0 were n≡1 x $10^{17}$$cm^{-3}$, $\rho$≡0.15 ${\Omega}$-cm, ${\mu}$$_{n}$≡500 $\textrm{cm}^2$$V^{-1}$$sec^{-1}$ at 300K. The carrier concentration, the resistivity, and the carrier mobility measured by the Van der Pauw method at x=0.1 were n≡2.96 x $10^{15}$$cm^{-3}$, $\rho$≡103 $\textrm{cm}^2$$V^{-1}$$sec^{-1}$ at 300K.

• Journal of the Korean Magnetics Society
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• v.4 no.1
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• pp.44-47
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• 1994

High $T_{c}$ superconducting $Y_{1}Ba_{2}Cu_{3}O_{7-\delta}$ thin film was grown up for c-axis orientation by epitaxial growth method on $LaAlO_{3}$ single crystal substrate. The crystal structures of this thin film were found to be c-axis orientation by X-ray diffraction patterns. Hall effect and resistivity measurements were made by van der Pauw method. Hall resistivity was calculated from the magnetoresistivity by considering thermomagnetic effect. The relation was $pH=p_{s}tan{\alpha}_{n}-QBT\frac{S_s}{K_s}$ The measured Hall resistivity and the calculated one are in good agreement each other.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.2124-2125
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• 2011

금속의 비저항 측정방법은 4단자 방법, van der Pauw 방법, Four-Point Probe(FPP) 방법, eddy current 방법 등이 있다. 이들의 측정방법은 다르지만 동일한 시료에 대해 평가한 비저항은 측정 불확도 범위 내에서 일치하여야 한다. 이에 따라 균질한 비자성 금속(STS 316)을 선정한 후 비저항을 평가한 결과 4단자와 van der Pauw 방법에 의한 비저항(도전율)은 각각 75.86 ${\mu}{\Omega}{\cdot}cm$(2.273 %IACS)과 75.84 ${\mu}{\Omega}{\cdot}cm$(2.273 %IACS)로서 거의 동일한 결과를 나타냈으며, Four Point Probe(FPP) 방법은 75.91 ${\mu}{\Omega}{\cdot}cm$(2.271 %IACS), eddy current 방법은 76.63 ${\mu}{\Omega}{\cdot}cm$(2.25 %IACS)으로 나타났다.

• Electrical & Electronic Materials
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• v.9 no.9
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• pp.885-890
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• 1996

Undoped p-type and Te doped n-type GaSb crystals were grown by the vertical Bridgman method. The lattice constant of the GaSb crystals was 6.096.+-.000373.angs.. The carrier concentration, the resistivity, and the carrier mobility measured by the van der Pauw method were p.iden.8*10$^{16}$ c $m^{-3}$ , .rho..iden.0.20 .ohm.-cm, .mu.$_{p}$ .iden.400c $m^{2}$ $V^{-1}$ se $c^{-1}$ for p-type, n.iden.1*10$^{17}$ c $m^{-3}$ , .rho..iden.0.15 .ohm.-cm, .mu.$_{n}$ .iden.500c $m^{2}$ $V^{-1}$ se $c^{-1}$ for n-type at 300K. In case of treatment with metal ion of R $u^{+3}$, P $t^{+4}$, the carrier concentration, resistivity and carrier mobility of the GaSb crystals were p.iden.2*10$^{17}$ c $m^{-3}$ , .rho..iden.0.08.ohm.-cm, .mu.$_{p}$ .iden.420c $m^{2}$ $V^{-1}$ se $c^{-1}$ for p-type, n.iden.2.5*10$^{17}$ c $m^{-3}$ , .rho..iden.0.07.ohm.-cm, .mu.$_{n}$ .iden.520c $m^{2}$ $V^{-1}$ se $c^{-1}$ for n-type respectively. GaSb crystals had a tendency to lower resistivity and higher mobility, for surface treatment with metal ion effectively diminished surface recombination centers.s.

• Korean Journal of Crystallography
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• v.1 no.1
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• pp.19-28
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• 1990

6H-SiC is a promising material (Eg=3.0eV) for blue light-emitting doide and high-temperature semiconducting device. In the experiment, single crystals of a-SiC have been grown by the sublimation method to fabricate blue light~emitting diode. During the growth of a-SiC single crystals, a temperature Vadient, yonh temperature and pressure ranges were kept 44℃/cm , 1800-1990℃ and 50-1000 mTorr, respectively. Single crystals obtained in Acheson furnace were used as seed crystals. Polarizing microscopy and back-reflection X-ray Laue diffraction showed that the a-SiC crystal was epitaxially and on the seed crytal. It was found by XRD analysis that when other growth conditions were the same, a-SiC was grown at the temperature above 1840℃ and 3C-SiC was gown at lower temperature or under low supersaturation of vapor. The carrier type. concentration and mobility were measured be hole(p-type), 7.6x1014cm-3 and 19cm2V-1sec-1, respectively, by van der Pauw method.

• Korean Journal of Crystallography
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• v.9 no.1
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• pp.53-63
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• 1998

The Cd1-xZnxS thin films were grown on the Si(100) wafers by a hot wall epitaxy method (HWE). the source and substrate temperature are 600℃ and 440℃, respectively. The crystalline structure of epilayers was investigated by double crystal X-ray diffraction (DCXD). Hall effect on the sample was measured by the van der Pauw method and the carrier density and mobility dependence of Hall characteristics on temperature was also studied. In order to explore the applicability as a photoconductive cell, we measured the sensitivity (γ), the ratio of photocurrent to darkcurrent (pc/dc), maximum allowable power dissipation (MAPD), spectral response and response time. The results indicated that the best photoconductive characteristic were observed in the Cd0.53Zn0.47S samples annealed in Cu vapor comparing with in Cd, Se, air and vacuum vapour. Then we obtained the sensitivity of 0.99, the value of pc/dc of 1.65 × 107, the MAPD of 338mW, and the rise and decay time of 9.7 ms and 9.3 ms, respectively.