• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.6
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• pp.453-460
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• 2002

In this paper, vibration criteria for fresh concrete are suggested considering relationship of strength and ages of concrete. Vibration criteria of fresh concrete subjected to construction vibration are not to be certain in abroad countries without question within a country. Before 12 hours cured, vibration criterion is suggested 0.25 cm/s. Used 4.0 cm/s by vibration criterion after 28 days. And the interval extent used relation with strength and ages of concrete. Vibration criteria proposed in this paper are thought may satisfy properties of fresh concrete as well as generally used those in domestic. Also, the actual ground vibrations due to pile driving have been measured, and data are analyze using the nitration equation applying to reliability index.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1998.04a
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• pp.302-307
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• 1998

In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of exactness and accuracy, because this is used as basic data for the design of building structure and structural dynamics of equipment. The study on the evaluation of the factors affecting the permissible vibration criteria is required to design the efficient isolation system of the semiconductor manufacturing of equipment. This paper deals with the properties of the effected factor for vibration criteria of high sensitive equipment.

• Journal of KSNVE
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• v.7 no.2
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• pp.247-254
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• 1997

In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria are usually obtained either by the real vibration exciting test on the equipment or by the analytical calculation. This paper proposes a new method to solve this problem at a time. The permissible vibration level to a precision equipment can be easily obtained by analyzing a process of Frequency Response Function. This paper also demonstrates its effectiveness by applying the proposed method to finding the vibration criteria of a Computer Hard Disk Driver by Impact Test.

• Journal of the Semiconductor & Display Technology
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• v.20 no.1
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• pp.25-31
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• 2021

The semiconductor and display equipment demands an ultra-fine precision of several nm to several ㎛, and the scale is getting smaller due to the explosive development. The manufacturing process equipment for such products with ultra-fine precision is very sensitive to ultra-small vibrations flowing from the floor, resulting in problems of production defects and yield degradation. The vibration criteria are a standard that regulates the vibration environment of the floor where such precision process equipment will be installed. The BBN vibration criteria defined the allowable vibration velocity level in the frequency domain with a flat and inclined line and presented a rating according to it. However, the actual vibration criteria have appeared with various magnitudes in the frequency domain according to the dynamic characteristics of individual equipment. In this study, the relationship between the relative motion of two major points in the equipment and the vibration magnitude of the floor is presented using the frequency response function of a simple 3-DOF model. It is describing the magnitudes according to the frequency of the floor vibration that guarantees the allowable relative motion and this can be used as the vibration criteria. In order to obtain the vibration criteria experimentally a method of extracting through a modal test was introduced and verified analytically. It provides vulnerable frequency and magnitude to floor vibration in consideration of the dynamic characteristics of individual equipment. And it is possible to know necessary to improve the dynamic characteristics of the equipment, and it can be used to check the vibration compatibility of the place where the equipment will be installed.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.8
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• pp.726-735
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• 2007

Inside the factory buildings of aprecision industry (which produces semiconductors or TFT-LCD), thousands of vibration-sensitive precision equipments operate in the clean rooms. Various utility equipments that are installed around them for proper operation cause various sources of noise and of vibration to exist inside the clean rooms and thus deteriorate the noise and the vibration environment within. In this study, we check if the existing transient vibration phenomenon is caused by the vibrations that arise from operating the utility installed near these equipments; compare and evaluate the vibration criteria of precision equipments regarding the transient vibration phenomenon; and check the efficiency of these criteria.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2011.10a
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• pp.797-802
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• 2011

Vibration of diesel engines in naval vessels causes structure vibration which is significant under water radiating noise source under CIS (Cavitation Inception Speed). So managing the vibration level of diesel engine is important for survivability and also durability of naval vessels. Therefore, in this research, a vibration criterion which is applied for Korean naval vessels are reviewed. It is compared with the DNV, ABS and merchant ship's diesel engine criteria. And also vibration data of three Korean naval vessels are analyzed. As a result, reasonable criteria of diesel engine vibration and shipbuilding standards are suggested.

• Proceedings of the Korea Concrete Institute Conference
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• 2003.11a
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• pp.600-603
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• 2003

The floor thickness in residential buildings may not satisfy the floor vibration criteria even though the thickness is determined by the serviceability requirements in current design provisons. Thus it is necessary to develop the procedure to determine slab thickness that satisfies the floor vibration criteria. In this study provide the methods to determine the slab thickness that satisfies the vertical floor vibration criteria for several sizes of flat plate floor system. Randomness inherent in young modulus of concrete and heel drop intensity was accounted. For this purpose Monte Carlo simulation procedure was adopted.

• Proceedings of the Korea Concrete Institute Conference
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• 2003.11a
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• pp.659-662
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• 2003

Recently, the floor thickness in residence may not be satisfied with the floor vibration criteria although the thickness is evaluated by the serviceability requirements in current design provisions. Thus it is necessary to develop the procedure to determine slab thickness satisfied with the floor vibration criteria. In this study, We proposed the methods to determine the slab thickness satisfied with the vertical floor vibration criteria for several concrete compressive strength of flat plate floor systems. For this purpose Monte Carlo simulation procedure was adopted and both randomness inherent in young modulus of concrete and heel drop intensity were accounted.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.1376-1383
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• 2001

Modem technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of 'exactness' and 'accuracy', because this is used as basic data for the design of building structure and structural dynamics of equipment. This paper deals with the properties of time and frequency domain in order to obtain more improved vibration criteria for high sensitive equipment.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.24 no.9
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• pp.731-740
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• 2014

Occupants induced floor vertical vibrations may cause other occupant's annoyance and lead to social loss. To help control such floor vibrations, several criteria have been developed mostly based on human perception tests and floor vibration tests. Floor vibration is evaluated by comparison with criteria and vibration parameters of subject floor, such as frequency, damping ratio, acceleration value, vibration duration time and occurrence frequency. Three acceleration value parameters are used in criteria; peak acceleration, rms acceleration and VDV, when a floor vibration serviceability is evaluated. Meanwhile rms acceleration and peak acceleration are adopted as vibration limit value in criteria and researches of human perception for vibration. Occupants induced floor vibration is transient rather than steady state. However, rms acceleration is not reliable parameter for evaluating transient vibration. The objective of this study is to investigate the characters of human perception level according to acceleration value parameters for vibration induced by heel impacts and walking activities.