• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.1115-1121
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• 2003

The vibration isolation table system for the high precision Processing machinery has been developed. The system uses air spring as its isolation elements. An investigation of the model and the test results showed that the diaphragm has a role in the mathematical model. The vibration levels at various floors in the laboratory were investigated during operating the large shaking table for the selection of optimum installation location. The vibration test on the designed system showed good isolation performances.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.12 no.2
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• pp.124-131
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• 2002

This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.7 s.124
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• pp.565-571
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• 2007

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.831-836
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.10
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• pp.3079-3094
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• 1996

Recently, the high-precision vibration attenuation technology becomes the essence fo the seccessful development of high-integrated and ultra-precision industries, and is expected to continue playing a key role in the enhancement of manufacturing technology. Vibration isolation system using an air-spring is widely employed owing to its excellent isolation characteristics in a wide frequency range. It has, however, some drawbacks such as low-stiffness and low-damping features and can be easily excited by exogenous disturbances, and then vibration of table is remained for a long time. Consequently, the need for active vibration control for an air-spring vibration isolation system becomes inevitable. Furthermore, for an air-spring isolation table to be successfully employed in a variety of manufacturing sites, it should have a guaranteed robust performance not only to exogenous disturbances but also to uncertainties due to various equipments which might be put on the table. In this study, an active vibration suppression control system using H.inf. theory is designed and experiments are performed to verify its robust performance. An air-spring vibration isolation table with voice-coil-motors as its actuators is designed and built. The table is modeled as 3 degree-of-freedom system. An active control system is designed based on $H_\infty$control theory using frequency-shaped weighting functions. Analysis on its performance and frequency responce properties are done through numerical simulations. Robust characteristics of$H_\infty$ control on disturbances and model uncertainties are experimentally verified through (i) the transient response to the impact excitation of the table, (ii) the steady-state response to the harmonic excitation, and (iii) the response to the mass change of the table itself. An LQG controller is also designed and its performance is compared with the $H_\infty$ controller.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.9
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• pp.858-867
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• 2011

As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.

• Journal of the Earthquake Engineering Society of Korea
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• v.5 no.4
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• pp.67-74
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• 2001

Structural engineers lately have an interest in the safety for equipments and facility in buildings subjected to earthquake. The stability of cultural assets was not considered for the earthquake induced vibration, while the integrity of structure has been considered through the resistant earthquake design. The purpose of this study aimed to analyze the behavior of isolation device named as \"Isolation table system\" and to evaluate its isolation performance through the experiment study. Isolation table is one of isolation systems to reduce the vibration which was transferred from slab to exhibition table. Experimental result shows that isolation table can reduce the vibration by 80-90% and its behavior is very stable within its maximal stroke.al stroke.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.472-472
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• 2009

The safety of cultural properties, medical treatment and electrical communication equipments in a building was hardly considered against the earthquake induced vibration, while the integrity of the building structure has been taken into account through the resistant earthquake design. This paper presents design of a seismic isolation table for both indoor and outdoor electrical communication equipment. First of all, artificial earthquake waves compatible with floor and ground response spectra for electrical communication equipments are generated using previously recorded seismic waves. Two kinds of one-degree-of-freedom seismic isolation table systems: spring-linear damper and spring-friction damper systems are considered and their responses to artificial earthquake waves are simulated. Design parameter study for two seismic isolation tables are performed through simulations and a seismic isolation table for both indoor and outdoor electrical communication equipment is designed considering the simulation results.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.7
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• pp.1605-1617
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• 1994

Air-spring is widely used in vibration isolation to reduce the table vibration. When a disturbance is applied to a table, however, it starts virbrating with a low frequency, but has a large displacement due to the reacting force of air-spring. In this study, to solve the table vibration problem, an active vibration control device based on state feedback control using air-spring and proportional control valves was designed. This device can suppress the displacement of the isolation table within allowable range, even any kind of disturbances are applied to the table. Firstly, theoretical analysis of an air-spring isolator was done. Secondly, characteristics of the isolator was investigated via computer simulation and experiment. Finally, active control of air-spring isolator was tested using optimal(LQG) and fuzzy control algorithms was performed to show the effectiveness of the control schems.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11a
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• pp.329-334
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• 2001

Recently, the high precision technology can not be developed continuously if we don't have anti vibration technology. Vibration isolation technology using an air spring and laminated robber bearing is widely used because it has excellent vibration isolation characteristics. We developed high precision vibration table with two good element(air spring and LRB) for semiconductor factory. Air Spring is used for isolating the vertical vibration and LRB is used for isolating the horizontal Vibration. As a result, It has D-Class degree in BBR-Criteria. In this paper, we talk about orifice characteristics in the self-damped air spring and design flow of the laminated robber bearing. The orifice characteristics is delicate shade of length and diameter. When we do experimentation to find orifice characteristics, length is fixed and diameter is changed. The orifice diameter is the wider and the air spring stiffness is the softer.