• Journal of Environmental Science International
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• v.16 no.4
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• pp.433-440
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• 2007

The photodegradation and by-products of the gaseous toluene with $TiO_2$ (P25) and short-wavelength UV ($UV_{254+185nm}$) radiation were studied. The toluene was decomposed and mineralized efficiently owed to the synergistic effect of photochemical oxidation in the gas phase and photocatalytic oxidation on the $TiO_2$ surface. The toluene by the $UV_{254+185nm}$ photoirradiated $TiO_2$ were mainly mineralized $CO_2$ and CO, but some water-soluble organic intermediates were also formed under severe reaction conditions. The ozone and secondary organic aerosol were produced as undesirable by-products. It was found that wet scrubber was useful as post-treatment to remove water-soluble organic intermediates. Excess ozone could be easily removed by means of a $MnO_2$ ozone-decomposition catalyst. It was also observed that the $MnO_2$ catalyst could decompose organic compounds by using oxygen reactive species formed in process of ozone decomposition.

• Journal of Environmental Science International
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• v.25 no.1
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• pp.155-161
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• 2016

In this study, field experiment, odor simulator, and dispersion modeling were used to evaluate the odor impact from J sewage sludge treatment facility. The height and flow rate of exhaust stack at this facility were 22.3 m and $100Nm^3/min$. The mean odor concentrations of the wet scrubber inlet and exhaust stack were $267{\pm}160$ and $93{\pm}44OU/m^3$, respectively. The odor removal efficiency of wet scrubber showed 65%. The odor simulator is used for the regulated standard calculation of the exhaust pipe(stack). Resulting odor emission rate(OER) by odor simulator was $2.4{\times}10^6(24,000OU/m^3)$. The forecasting result by Screen3 modeling showed that odor exhaust concentration up to $30,000OU/m^3$ was't exceeded maximum allowable emission level on site boundary($15OU/m^3$).

• Prospectives of Industrial Chemistry
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• v.22 no.5
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• pp.14-24
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• 2019

전 세계적인 기후변화로 인하여 선박 내 이용되는 물과 관련된 배출 규제도 매년 강화되고 있는 추세이다. 심해지는 규제를 만족하기 위하여 다양한 선박용 수처리 기술이 개발되고 있으며, 고도화 연구가 활발히 진행되고 있다. 본 연구에서는 선박 내에서 이루어지는 수처리 공정인 선박 평형수(ballast water)처리, 조수기(fresh water generator)를 통한 선박 내 용수 공급, 대기오염 저감을 위한 스크러버(wet scrubber) 폐세정수 처리 공정과 관련된 국제해사기구(international maritime organication, IMO)와 같은 국제적인 규제 및 특정지역과 연안에 위치한 주정부 기관의 규제 현황에 대해 문헌조사를 통해 정리하였다. 이를 바탕으로 다양한 선박 내 수자원 활용과 규제에 부합하기 위해 적용되고 있는 관련 수처리 기술을 용도별로 정리하였으며, 현재 기존기술의 효율 개선 및 신기술 도입과 관련된 연구 현황을 정리하였다. 이러한 선박 내 수처리 현황 및 향후 적용될 기술개발연구를 바탕으로 지속가능한 해양환경 조성 및 기후변화 대응이 가능할 것으로 기대된다.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.52 no.3
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• pp.248-256
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• 2016

The main purpose of this paper was to analyze the removal characteristics of gas/particulate phase pollutants for the present system. Experimentally, we performed to estimate the pressure drop and air pollution removal efficiency with physical variables such as stage number, tube velocity, tube diameter, water spray ($NH_4OH$), and so on. It was concluded that the pressure drop was shown below $111mmH_2O$ lower than that of the existing scrubber (centrifugal spray chamber, over 200 mmAq) at inlet velocity 3.46 m/s and 5 stage. The particular removal efficiency of this system was to be significantly higher at 99.8% in comparison with that of the existing scrubber for 5 stage, inlet velocity 3.46 m/s and $NH_4OH$ (aq) 300 mL/min. It was estimated that the removal efficiencies of $SO_2$ and $NO_2$ were 80% and 70% at system inlet velocity 2.07 m/s and $NH_4OH$ (aq) 300 mL/min respectively. Additionally, the present collection system was to be considered as an effective compact system for simultaneous removal of air pollutants (gas/particulate) due to much higher removal efficiency and appropriate pressure drop without a demister.

• Tribology and Lubricants
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• v.31 no.6
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• pp.239-244
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• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• Journal of Wetlands Research
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• v.17 no.2
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• pp.118-123
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• 2015

This work has performed to examine the operation status of regeneration and scrubber system of cold rolling mill plant and established the DIWS(Dip Injection Wet Scrubber) system for the removal of hydrochloric acid with micro bubble. When the initial 22.3 ppm of HCl gas was injected into the system, the average exhaust HCl gas was 0.59 ppm with the removal efficiency of 97.3%. Hydrochloric acid was effectively removed by DIWS system. In the long term monitoring for 10 hours by 5 minutes through TMS(Tele Monitoring System), the average exhaust HCl gas was stably kept 0.69 ppm, which was also verified by manual measurement.

• Journal of the Korean Applied Science and Technology
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• v.32 no.2
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• pp.296-301
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• 2015

The experiment was performed for in order to remove NOx which is generated in the Ship's engine. it was performed test in order to remove NOx which is generated in the Ship's engine. It was used as the oxidizing agent sodium chlorite. Use the oxidizer is nitrogen monoxide was oxidized to nitrogen dioxide. and was tested pH adjustment to increase the efficiency of oxidizing. An aqueous solution of sodium hydroxide was used for the nitrogen dioxide absorbent. Low concentration of the solution, it showed a high efficiency. improves the absorption efficiency by add additives.

• Journal of Korean Society for Atmospheric Environment
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• v.8 no.4
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• pp.262-268
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• 1992

The trend of international concerns on environmental conservation and domestic demand of ambient air quality improvement, specially on sulfur dioxide level has resulted in the establishment of mid-term strategy of environmental improvement and stepwise strengthening of emission regulations in this decade in Korea. Development of flue gas desulfurization(FGD) process is becoming an essential task to be accomplished especially for the power plants and large industrial facilities. This study is an initial stage researc focusing on the mass transfer principles in wet type FGD process and the effects of operating variables of a jet bubbling scrubber utilizing limestone slurry on sulfur dioxide removal efficiency. Experimental results showed this type of scrubbing system has some advantages in terms of mass transfer mechanism and removal efficiency. More rigorous research is needed for the reaction system and the comparison with existing FGD processess for the possible development of a process which is compatative in view of installation cost and treatment of by-products.

• Applied Chemistry for Engineering
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• v.30 no.6
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• pp.712-718
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• 2019

A combustible producer gas composed of H₂, CO and CH₄ could be obtained by the thermal-chemical conversion of biomass. However, a large amount of particulate matters including tar generated causes the mal-function of turbines and engines or the fouling of pipelines. In this study, a wet scrubber using the soybean oil and bag filter were installed, and the removal efficiency was investigated. Hydrate limestone and wood char base activated carbon were pre-coated on the filter medium to prevent clogging of open pores. The removal efficiencies by the bag filter were 86 and 80% for the hydrated limestone and activated carbon coating, respectively. Overall, the collection when using a series of oil scrubbers and bag filters were 88%, while 83% for the filter coating material.

• Applied Chemistry for Engineering
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• v.29 no.5
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• pp.510-518
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• 2018

Recently, lots of interests have been concentrated on the scrubber system that abates waste gases produced from semiconductor manufacturing processes. An effective design of the thermal decomposition reactor inside a scrubber system is significantly important since it is directly related to the removal performance of pollutants and overall stabilities. In the present study, a computational fluid dynamics (CFD) analysis was conducted to figure out the thermal and flow characteristics inside the reactor of wet scrubber. In order to verify the numerical method, the temperature at several monitoring points was compared to that of experimental results. Average error rates of 1.27~2.27% between both the results were achieved, and numerical results of the temperature distribution were in good agreement with the experimental data. By using the validated numerical method, the effect of the reactor geometry on the heat transfer rate was also taken into consideration. From the result, it was observed that the flow and temperature uniformity were significantly improved. Overall, our current study could provide useful information to identify the fluid behavior and thermal performance for various scrubber systems.