• International Journal of Precision Engineering and Manufacturing
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• v.7 no.3
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• pp.35-38
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• 2006

A study of electrowetting using an Octadecyltrichlorosilane (OTS) self-assembled monolayer (SAM) and Z- Tetraol 2000 perfluoropolyether lubricant as hydrophobic layers on Si and $SiO_2$ wafer was performed. The $SiO_2$ layer used as insulating layer was thermally grown on the silicon wafer to a thickness of 220-230 nm. The results demonstrated that the contact angle decreased from $100^{\circ}$ to $80^{\circ}$ at 28 V applied potential on $SiO_2$ wafer coated with OTS and the contact angle appeared to be reversible. However, the contact angle on the $SiO_2$ wafer coated with Z- Tetraol 2000 was not observable at 28 V applied potential. Furthermore, the contact angle on the Si wafer coated with OTS or Z- Tetraol 2000 appeared to be irreversible due to the generation of electrolysis in the droplet. It is concluded that it is feasible to use SAM as a hydrophobic layer in electrowetting applications.