• Title/Summary/Keyword: annealing

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Improvement in Characteristics of Thin Film Transistors by High Pressure Steam Annealing

  • Nagasawa, Y.;Yamamoto, N.;Chishina, H.;Ogawa, H.;Kawasaki, Y.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.333-336
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    • 2006
  • High Pressure Annealing System was developed to improve the characteristics of low-temperature poly-silicon thin film transistors.. (TFTs). The high-pressure steam annealing was applied to the poly-silicon film made by rapid thermal annealing method. The carrier lifetime was investigated by Microwave detection of the Photo-Conductive Decay and the increase of carrier lifetime which indicates the reduction of the defect was observed by high-pressure steam annealing of 1MPa 600C 1hour.

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The Effect of Intermediate Annealing on the Evolution of Texture in I.F. Steel (LF 강의 집합조직 발달에 미치는 중간열처리의 영향)

  • 김현철
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 1999.03b
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    • pp.112-115
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    • 1999
  • The effect of intermediate annealing on the texture evolution in I.f steel was investigated by using X-ray texture measurement. After The sample was cold rolled to 80% reduction intermediate annealing was introduced to preform ${\gamma}$-fiber orientation grains in deformed matrix. The annealing time was varied between 30 and 3600 sec, These samples were cold rolled to 90% reduction and full annealed. By intermediate annealing final full annealed samples had very homogeneous ${\gamma}$-fiber orientation resulting in good deep drawability.

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Changes fo Electric conductivity of Amorphous Silicon by Argon radical Annealing

  • Lee, Jae-Hee
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.63-63
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    • 1999
  • The stability of hydrogenated amorphous silicon (a-Si:H) films under the light soaking are very important since the applications of a-Si:H films are solar cells, color sensors, photosensors, and thin film transistors(TFTs). We found the changes of the electric conductivity and the conductivity activation energy (Ea) of a-Si:H films by argon radical annealing. The deposition rate of a-Si:H films depends on the argon radical annealing time. The optical band gap and the hydrogen contents in the a-Si:H films are changes along the argon radical annealing time. We will discuss the microscopic processes of argon radical annealing in a-si:H films.

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Optimization Using Gnetic Algorithms and Simulated Annealing (유전자 기법과 시뮬레이티드 어닐링을 이용한 최적화)

  • Park, Jung-Sun;Ryu, Mi-Ran
    • Proceedings of the KSME Conference
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    • 2001.06a
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    • pp.939-944
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    • 2001
  • Genetic algorithm is modelled on natural evolution and simulated annealing is based on the simulation of thermal annealing. Both genetic algorithm and simulated annealing are stochastic method. So they can find global optimum values. For compare efficiency of SA and GA's, some function value was maximized. In the result, that was a little better than GA's.

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Effect of annealing treatment on gelatinization of upland and lowland waxy brown rice starches (아닐링 처리가 밭벼와 논벼 찹쌀 전분의 호화에 미치는 영향)

  • Kim, Sung-Kon
    • Applied Biological Chemistry
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    • v.34 no.2
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    • pp.187-189
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    • 1991
  • Gelatinization temperatures of upland and lowland waxy brown rice starches annealed at $25^{\circ}C$ and $60^{\circ}C$ for 24hr were investigated with differential scanning calorimetry No annealing effect was observed at low temperature. The upland rice starch showed narrower range of gelatinization temperature upon annealing treatment at $60\circ}C$ compared with the lowland rice starch. The enthalpy of gelatinization was not changed in case of the upland rice starch but was increased in case of the lowland one upon annealing.

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Efficient Thermal Annealing for FBAR Devices

  • Song Hae-il;Mai Linh;Yoon Giwan
    • Journal of information and communication convergence engineering
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    • v.3 no.4
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    • pp.167-171
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    • 2005
  • In this paper, the resonance characteristics of SMR-type FBAR devices annealed by three different annealing methods are investigated and compared. The resonance characteristics could be effectively improved by the proposed efficient annealing method which optimizes the annealing conditions. It seems very useful for improving the performance of the SMR-type FBAR devices as a cost-effective way.

Effect of Annealing Conditions on Microstructures and Mechanical Properties of a 5083 Al Alloy deformed at Cryogenic Temperature (어닐링 조건이 극저온 압연 5083 Al Alloy의 미세조직 및 기계적성질에 미치는 영향)

  • 이영범;남원종
    • Transactions of Materials Processing
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    • v.13 no.5
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    • pp.449-454
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    • 2004
  • The annealing behavior of a 5083 Al alloy deformed at cryogenic temperature was investigated, focusing on the evolution of microstructures and mechanical properties. Especially, the effects of annealing temperature, $150~300^{\circ}C$, and time, 3∼60min., on microstructures and mechanical properties of the sheets received 85% reduction at cryogenic temperature were investigated. The optimization of the annealing conditions resulted in a mixture of equiaxed grains and elongated subgrains, exhibiting a good combination of uniform elongation and high strength.

Electric Properties of SBT Thin Films with various Annealing Conditions (다양한 열처리 조건에 따른 SBT 박막의 전기적 특성)

  • Cho, C.N.;Kim, J.S.;Oh, Y.C.;Shin, C.G.;Park, G.H.;Choi, W.S.;Kim, C.H.;Hong, J.U.;Lee, J.U.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.589-592
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    • 2002
  • The $Sr_{0.7}Bi_{2.3}Ta_2O_9$(SBT) thin films are deposited on Pt-coated electrode(Pt/TiO2/SiO2/Si) using RF magnetron sputtering method. The structural and electric properties of SBT capacitors were influenced with annealing atmosphere. In the XRD pattern, the SBT thin films in all annealing atmosphere had (105) orientation. In the SEM images, Bi-layered perovskite phase was crystallized in all annealing atmosphere and grains largely grew in oxygen annealing atmosphere. The maximum remanent polarization and the coercive electric field in oxygen annealing atmosphere are $12.40{\mu}C/cm^2$ and 48kV/cm respectively. The dielectric constant and leakage current density annealing in oxygen atmosphere are 340 and $6.81{\times}10^{-10}A/cm^2$ respectively. The fatigue characteristics of SBT capacitors did not change up to $10^{10}$ switching cycles.

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Characteristics of Hafnium Silicate Films Deposited on Si by Atomic Layer Deposition Process

  • Lee, Jung-Chan;Kim, Kwang-Sook;Jeong, Seok-Won;Roh, Yong-Han
    • Transactions on Electrical and Electronic Materials
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    • v.12 no.3
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    • pp.127-130
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    • 2011
  • We investigated the effects of $O_2$ annealing (i.e., temperature and time) on the characteristics of hafnium silicate ($HfSi_xO_y$) films deposited on a Si substrate by atomic layer deposition process (ALD). We found that the post deposition annealing under oxidizing ambient causes the oxidation of residual Hf metal components, resulting in the improvement of electrical characteristics (e.g., hysteresis window and leakage current are decreased). In addition, we observed the annealing temperature is more important than the annealing time for post deposition annealing. Based on these observations, we suggest that post deposition annealing under oxidizing ambient is necessary to improve the electrical characteristics of $HfSi_xO_y$ films deposited by ALD. However, the annealing temperature has to be carefully controlled to minimize the regrowth of interfacial oxide, which degrades the value of equivalent oxide thickness.

The Influence of the Annealing of Corn Starch on the formation and Characteristics of Enzyme-resistant Starch

  • Yoon, Ji-Young;Lee, Young-Eun
    • Preventive Nutrition and Food Science
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    • v.4 no.4
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    • pp.215-220
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    • 1999
  • The Physical properties of corn starch were investigated by scanning electron microscopy, X-ray diffractometry and differential scanning calorimetry during the formation of enzyme-resistant starch(RS). Samples were studied in their native states and after annealing at 50, 55, 60 and 65℃ in excess water(starch : water=1:3) for 48hr. Starch granules became smaller and more rounded after annealing than in their native state. Annealing did not change the X-ray profile of native corn starch. After autoclaving-cooling cycles, native starch lost most of its crystallinity but annealed ones showed some of their crystallinity left as diffuse or poor B-type, which didn't relate to increasing Rs yields. During formation of RS, however, both native and annealed starches changed their X-ray profile from A-type to poor B-type of retrograded amylose. Annealing caused an increase in gelatinization temperature and enthalpy, but a narrowing of gelatinization temperature range. Only starch annealed at 65℃, however, showed a decrease in enthalpy even though its gelatinization temperature increased, which appeared to be due to the partial gelatinization in the amorphous region during annealing. Peak height index(PHI), the ratio of ΔH to Ti-To, increased by annealing. PHI values, therefore, showed the possibility as an indicator to predict RS yield which cannot be differentiated by differential scanning calorimetry and X-ray diffraction data.

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