• 한국전기전자재료학회논문지
• /
• 제22권2호
• /
• pp.114-118
• /
• 2009

PVA (polyvinyl alcohol) brush cleaning method is a typical cleaning method for semiconductor cleaning process especially post-CMP cleaning. PVA brush contacts with the wafer surface and abrasive particle, generating the contact rotational torque of the brush, which is the removal mechanism. The brush rotational torque can overcome theoretically the adhesion force generated between the abrasive particle and wafer by zeta potential. However, after CMP (chemical mechanical polishing) process, many particles remained on the wafer because the brush was contaminated in previous post-CMP cleaning step. The abrasive particle on the brush redeposits to the wafer. The level of the brush contamination increased according to the cleaning run time. After cleaning the brush, the level of wafer contamination dramatically decreased. Therefore, the brush cleanliness effect on the cleaning performance and it is important for the brush to be maintained clearly.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2000년도 추계학술대회논문집 - 한국공작기계학회
• /
• pp.309-313
• /
• 2000

In order to meet the industrial requirement, precision grinding with brush tool has been applied. To analyze the brush tool characteristics, several parameters including numbers of brush string installed in a single holder, depth of cut and brush length have been changed. Several data from various source were acquired using AE, acceleration and tool dynamometer during the process. Consistent results revealing certain trend with respect to each process condition were observed.

• Asian Pacific Journal of Cancer Prevention
• /
• 제17권10호
• /
• pp.4563-4566
• /
• 2016

Background/Objective: The aim of this study was to perform a comparative evaluation of the yields of conventional brush cytology and brush cytology with negative pressure in the diagnosis of malignant biliary strictures. Methods: A total of 132 consecutive patients undergoing endoscopic were identified. Of these, 88.0 had brush cytology after ERCP and 44 were Brush cytology with negative pressure. Retrograde cholangiopancreatography (ERCP) including brush cytology and brush cytology with negative pressure in patients with biliary strictures between 2012-2015. Endoscopic retrograde cholangiography was performed with a standard videoduodenoscope Olympus TFJ 160-R (Olympus, Hamburg, Germany) and brush cytology with a Cook medical Double Lumen Biliary BrushTM (Cytology). Means and standard frequencies were used to calculate variables. Results: Positive results for malignancy were obtained in 22 of 88 patients (25%) by brush cytology and 31 of 44 patients (70.4 %) by brush cytology with negative pressure. Conclusions: Sensitivity of cytology sampling could be maximized by negative pressure during ERCP.

• Tribology and Lubricants
• /
• 제31권6호
• /
• pp.239-244
• /
• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• 한국유체기계학회 논문집
• /
• 제20권2호
• /
• pp.11-16
• /
• 2017

The accurate prediction of leakage flow through the brush element of brush seal at the steam turbine is important to find optimum design parameters for increasing an efficiency. In this study, CFD analysis method using commercial software FLUENT is proposed to predict leakage through the brush element. Since the brush element has a complex three-dimensional shape with many bristle assemblies, it is difficult to analyze the flow field. Therefore, if the brush element is assumed to be porous medium region, the analysis time can be shortened. Two determination methods of resistance coefficients of the Darcian porous medium equation are suggested. By comparing the 2D and 3D CFD analysis results for the leakage of the brush element using the two resistance coefficient determination methods, the effectiveness of the analysis for the porous medium assumption is proved.

• 한국윤활학회:학술대회논문집
• /
• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
• /
• pp.318-331
• /
• 2000

Electrical and tribological behaviours of a copper-graphite brush in a slipring-brush assembly were investigated to evaluate the characteristics of electric signal transmission between a slipring and a brush. Five brush materials containing different amounts of copper and graphite were studied. The result showed that a copper-graphite brush at a particular graphite content exhibited the most stable frictional and electrical behaviour suggesting an optimum amount of a solid lubricant in a metal-graphite brush system. Microscopic observation and the surface analysis showed good agreements with this phenomena. In addition, the deviation of the friction coefficient and electric signal distortion has a close relationship with a microscopic mechanical vibration and the change of a real contact area.

• Journal of Periodontal and Implant Science
• /
• 제49권5호
• /
• pp.310-318
• /
• 2019

Purpose: Surface alterations of titanium discs following instrumentation with either a nylon brush or a metal brush were evaluated. Methods: A total of 27 titanium discs with 3 surface types (9 discs for each type), including machined (M) surfaces, sandblasted and acid-etched (SA) surfaces, and surfaces treated by resorbable blast media (RBM), were used. Three discs were instrumented with a nylon brush, another 3 discs were instrumented with a metal brush, and the remaining 3 discs were used as controls for each surface type. Surface properties including the arithmetic mean value of a linear profile (Ra), maximum height of a linear profile (Rz), skewness of the assessed linear profile (Rsk), arithmetic mean height of a surface (Sa), maximum height of a surface (Sz), developed interfacial area ratio (Sdr), skewness of a surface profile (Ssk), and kurtosis of a surface profile (Sku) were measured using confocal microscopy. Results: Instrumentation with the nylon brush increased the Ra, Sa, and Sdr of the M surfaces. On the SA surfaces, Ra, Sa and Sdr decreased after nylon brush use. Meanwhile, the roughness of the RBM surface was not affected by the nylon brush. The use of the metal brush also increased the Ra, Sa, and Sdr of the M surface; however, the increase in Sdr was not statistically significant (P=0.119). The decreases in the Rz, Sz, Ra, Sa, and Sdr of the SA surfaces were remarkable. On the RBM surfaces, the use of the metal brush did not cause changes in Ra and Sa, whereas Rz, Sz, and Sdr were reduced. Conclusions: Titanium surfaces were altered when instrumented either with a nylon brush or a metal brush. Hence, it is recommended that nylon or metal brushes be used with caution in order to avoid damaging the implant fixture/abutment surface.

• 한국전기전자재료학회논문지
• /
• 제34권5호
• /
• pp.321-326
• /
• 2021

We fabricated BiAlO thin film by a solution process with a brush coating to be used as liquid crystal (LC) alignment layer. Solution-processed BiAlO was coated on the glass substrate by brush process. Prepared thin films were annealed at different temperatures of 80℃, 180℃, and 280℃. To verify whether the BiAlO film was formed properly, X-ray photoelectron spectroscopy analysis was performed on Bi and Al. Using a crystal rotation method by polarized optical microscopy, LC alignment state was evaluated. At the annealing temperature of 280℃, the uniform homogenous LC alignment was achieved. To reveal the mechanism of LC alignment by brush coating, field emission scanning electron microscope was used. Through this analysis, spin-coated and brush coated film surface were compared. It was revealed that physical anisotropy was induced by brush coating at a high annealing temperature. Particles were aligned in one direction along which brush coating was made, resulting in a physical anisotropy that affects a uniform LC alignment. Therefore, it was confirmed that brush coating combined with BiAlO thin film annealed at high temperature has a significant potential for LC alignment.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2004년도 춘계학술대회논문집
• /
• pp.764-769
• /
• 2004

The DC Motor in a vehicle may cause noise and vibration because of high speed revolution, which can make a driver feel uncomfortable. There have been various studies attempting to solve these problems, focusing mostly on the causes of and ways to reduce noise and vibration. It is suggested that the noise in a DC Motor may be primarily due to interaction between a brush and a commutator. Brush noise, the most common noise in a DC Motor, results from a brush bounced from the surface of the commutator, fluctuation of the friction between the brush and the commutator, and the impact on the brush when passing over slots of the commutator. Based on the noise test, one of the most important design parameters was shown to be the roundness of the commutator. As the DC motor is used, the roundness of the commutator gets bigger with subsequent increase of the level of brush noise and vibration. There must be a threshold in order to prevent the brush noise from getting worse. Using the method of CAE is more efficient than the real test for purposes of looking for various design parameters to maintain the roundness of the commutator. In this study, the design process to reduce the brush noise is presented with the use of a computer model. The design parameters to reduce the brush noise and vibration are proposed by using FEM. The design parameters are used to reduce the noise and vibration of a DC motor and it is verified with the test results on a fan DC motor in a vehicle. This method may be applicable to various DC motors.

• 한국자동차공학회논문집
• /
• 제12권6호
• /
• pp.158-165
• /
• 2004

The DC motor in a vehicle may cause noise and vibration because of high speed revolution, which can make a driver feel uncomfortable. There have been various studies attempting to solve these problems, focusing mostly on the causes of and ways to reduce noise and vibration. It is suggested that the noise in a DC motor may be primarily due to interaction between a brush and a commutator. Brush noise, the most common noise in a DC motor, results from a brush bounced from the surface of the commutator, fluctuation of the friction between the brush and the commutator, and the impact on the brush when passing over slots of the commutator. Based on the noise test, one of the most important design parameters was shown to be the roundness of the commutator. As the DC motor is used, the roundness of the commutator gets bigger with subsequent increase of the level of brush noise and vibration. There must be a threshold in order to prevent the brush noise from getting worse. Using the method of CAE is more efficient than the real test for purposes of looking for various design parameters to maintain the roundness of the commutator. In this study, the design process to reduce the brush noise is presented with the use of a computer model. The design parameters to reduce the brush noise and vibration are proposed by using FEM. The design parameters are used to reduce the noise and vibration of a DC motor and it is verified with the test results on a fan DC motor in a vehicle. This method may be applicable to various DC motor.