• Tribology and Lubricants
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• 제18권4호
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• pp.267-272
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• 2002

Nano adhesion between SPM(scanning probe microscope) tips and DDPO$_4$(octadecylphosphoric acid ester.) and ODPO$_4$(octadecylphosphoric acid ester) SAM(self-assembled monolayer.) was experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes with the applied normal load. DDPO$_4$ and ODPO$_4$ SAM were formed on Ti and TiOx surfaces. Ti and TiOx were coated on the Si wafer by ion sputtering. Adhesion and friction of DDPO$_4$ and ODPO$_4$ SAM surfaces were compared with those of OTS(octadecyltrichlorosilane) SAM and DLC surfaces. DDPO$_4$ and ODPO$_4$ SAM converted the Ti and TiOx surfaces to be hydrophobic. When the surface was hydrophobic, the adhesion and friction forces were found lower than those of bare surfaces. Work of adhesion was also discussed to explain how the surface was converted into hydrophobic Results also showed that tribological characteristics of DDPO$_4$ and ODPO$_4$ SAM had good properties in the adhesion, friction, wetting angle and work of adhesion. DDPO$_4$ and ODPO$_4$ SAM could be one of the candidates for the bio-MEMS elements.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 제35회 춘계학술대회
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• pp.207-214
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• 2002

Nano adhesion between SPM (scanning probe microscope) tips and $DDPO_{4}$ (dodecylphosphoric acid ester) and $ODPO_{4}$ (octadecylphosphoric acid ester) SAM (self-assembled monolayer) was experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes with the applied normal load. $DDPO_{4}$ and $ODPO_{4}$ SAM were formed on TiMe and TiOx surfaces. TiMe and TiOx were coated on the Si wafer by ion sputtering. Adhesion and friction of $DDPO_{4}$ and $ODPO_{4}$ SAM surfaces were compared with those of OTS (octadecyltrichlorosilane) SAM and DLC surfaces. $DDPO_{4}$ and $ODPO_{4}$ SAM converted the TiMe and TiOx surfaces to be hydrophobic. When the surface was hydrophobic, the adhesion and friction forces were found lower than those of bare surfaces. Work of adhesion was also discussed to explain how the surface was converted into hydrophobic. Results also showed that tribological characteristics of $DDPO_{4}$ and $ODPO_{4}$ had good properties in the adhesion, friction, wetting angle and work of adhesion. $DDPO_{4}$ and $ODPO_{4}$ SAM could be one of the candidates for the bio-MEMS elements.