• Journal of Magnetics
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• v.17 no.1
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• pp.56-60
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• 2012

This paper presents an analysis and experiment of the flat coil actuator with shorted turn. The flat coil actuator is widely used in high precision products because it has no friction between the moving coil and the guide. A shorted turn and a center pole are placed into the flat coil actuator in order to reduce the inductance of the coil and improve the initial response when the actuator is voltage-driven. Enhanced dynamic performance of the flat coil actuator with shorted turn was demonstrated by simulation and experiment.

• Journal of the Korean Magnetics Society
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• v.20 no.4
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• pp.149-152
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• 2010

The flat coil actuator is widely used to make high precision products because it has no friction between the moving coil and the guide. Finite Element Method, a favored actuator design tool due to its high accuracy, was utilized to analyze the electromagnetic actuator, but it consumes a lot of time especially in computation iterations for optimization. Accordingly, the magnetic equivalent circuit analysis can be an alternative tool to FEM because of its computation iteration capability with fair accuracy. In this paper, lumped parameter model and the simulation results are presented. In addition, the result of lumped parameter analysis is compared with those obtained from finite element analysis for verification.

• Journal of Magnetics
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• v.18 no.4
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• pp.466-472
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• 2013

This paper presents a new design of the hybrid magnet engine valve actuator using the shorted turn for enhanced dynamic performance. The quick response of coil electric current is the most important factor that determines the opening and closing performance of the hybrid magnet engine valve. The conventional hybrid magnet engine valve actuator, however, has a delayed initial electric current rising when it is driven by voltage control because of the coil inductance which is a typical characteristic of an electromagnetic coil. A shorted turn is newly placed into the upper yoke of the hybrid magnet engine valve actuator to reduce coil inductance and thus, to hasten the initial electric current rising. We performed a dynamic finite element analysis to demonstrate the improvement of the dynamic characteristics of the hybrid magnet engine valve actuator due to the shorted turn.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1154-1156
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• 1999

This paper presents the novel fabrication of an electromagnetic micro actuator with a corrugated diaphragm and a flat one. The actuator consists of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The cower coil is fabricated by electroplating and patterning. As the further works, the frequency response of the actuator are obtained by using a laser vibrometer and the static deflection of the actuator diaphragm are measure by using laser displacement meter. The corrugated diaphragm is expected to be better than the flat one with respect to the actuator performance.

• Journal of Magnetics
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• v.21 no.3
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• pp.348-355
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• 2016

Precision motion stages used in the manufacturing process of flat-panel displays have inevitably low settling performance due to their huge mass and bulky structures. In order to improve the settling performance, several methods of frame vibration compensation have been developed so far. These methods are used to cancel the vibration by imposing a counter force or modifying the resonance mode of the frame of the stage. To compensate the frame vibration, high force actuators are required. In this paper, a mighty voice coil actuator is proposed to generate the counter force against the frame vibration. The proposed voice coil actuator has an axis-symmetric rectangular structure to achieve a large force with simple and low cost fabrication. Also, the voice coil actuator allows radial clearance up to ${\pm}4mm$. Using an optimized design process and a magnetic circuit model, the power consumption is minimized while the required force is obtained. With a power of 322 W, the VCA has been designed to have a maximum force of 574 N with a force constant of 164 N/A. Experimental results verified the force constant of the fabricated voice coil actuator is well matched with the designed value.

• Journal of the Korean Magnetics Society
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• v.19 no.6
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• pp.222-226
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• 2009

This paper presents the new design of flat electromagnetic actuator. Novel shorted turn and copper center pole are placed into existent design in order to reduce the inductance of coil and accelerate the initial response. Finite element analysis using commercial electromagnetic solver “MAXWELL” is performed to simulate the improvement of dynamic characteristics such as fast initial response and so on.