• Journal of Magnetics
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• 제17권1호
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• pp.56-60
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• 2012

This paper presents an analysis and experiment of the flat coil actuator with shorted turn. The flat coil actuator is widely used in high precision products because it has no friction between the moving coil and the guide. A shorted turn and a center pole are placed into the flat coil actuator in order to reduce the inductance of the coil and improve the initial response when the actuator is voltage-driven. Enhanced dynamic performance of the flat coil actuator with shorted turn was demonstrated by simulation and experiment.

• 한국자기학회지
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• 제20권4호
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• pp.149-152
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• 2010

평판형 전자기 엑츄에이터는 이동코일과 가이드 사이의 마찰이 없기 때문에 초정밀 제품에 널리 사용된다. 전자기 엑츄에이터의 성능 검증에 가장 많이 사용되는 방법 중 한 가지는 유한요소해석 방법이다. 하지만 유한요소해석 방법은 해석 시간이 많이든다는 단점이 있다. 유한요소해석 방법의 대안으로 계산시간은 짧지만 높은 정확도의 해석 결과를 도출해 낼 수 있는 집중매개 변수모델 해석방법이 많이 사용되고 있다. 본 논문에서는 평판형 전자기 엑츄에이터의 집중매개변수 모델링을 생성하고 시뮬레이션을 통해 성능을 검증하고 그 결과를 유한요소해석 결과와 비교해 본다.

• Journal of Magnetics
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• 제18권4호
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• pp.466-472
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• 2013

This paper presents a new design of the hybrid magnet engine valve actuator using the shorted turn for enhanced dynamic performance. The quick response of coil electric current is the most important factor that determines the opening and closing performance of the hybrid magnet engine valve. The conventional hybrid magnet engine valve actuator, however, has a delayed initial electric current rising when it is driven by voltage control because of the coil inductance which is a typical characteristic of an electromagnetic coil. A shorted turn is newly placed into the upper yoke of the hybrid magnet engine valve actuator to reduce coil inductance and thus, to hasten the initial electric current rising. We performed a dynamic finite element analysis to demonstrate the improvement of the dynamic characteristics of the hybrid magnet engine valve actuator due to the shorted turn.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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• pp.1154-1156
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• 1999

This paper presents the novel fabrication of an electromagnetic micro actuator with a corrugated diaphragm and a flat one. The actuator consists of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The cower coil is fabricated by electroplating and patterning. As the further works, the frequency response of the actuator are obtained by using a laser vibrometer and the static deflection of the actuator diaphragm are measure by using laser displacement meter. The corrugated diaphragm is expected to be better than the flat one with respect to the actuator performance.

• Journal of Magnetics
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• 제21권3호
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• pp.348-355
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• 2016

Precision motion stages used in the manufacturing process of flat-panel displays have inevitably low settling performance due to their huge mass and bulky structures. In order to improve the settling performance, several methods of frame vibration compensation have been developed so far. These methods are used to cancel the vibration by imposing a counter force or modifying the resonance mode of the frame of the stage. To compensate the frame vibration, high force actuators are required. In this paper, a mighty voice coil actuator is proposed to generate the counter force against the frame vibration. The proposed voice coil actuator has an axis-symmetric rectangular structure to achieve a large force with simple and low cost fabrication. Also, the voice coil actuator allows radial clearance up to ${\pm}4mm$. Using an optimized design process and a magnetic circuit model, the power consumption is minimized while the required force is obtained. With a power of 322 W, the VCA has been designed to have a maximum force of 574 N with a force constant of 164 N/A. Experimental results verified the force constant of the fabricated voice coil actuator is well matched with the designed value.

• 한국자기학회지
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• 제19권6호
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• pp.222-226
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• 2009

기존의 평판형 전자기 엑츄에이터에 쇼티드 턴을 적용한 새로운 형태의 평판형 전자기 엑츄에이터를 제안하였다. 기존의 평판형 전자기 엑츄에이터에서 발생하는 인덕턴스에 의한 초기응답 지연현상을 줄이기 위해 본 논문에서는 기존의 엑츄에이터의 요크와 요크 사이에 중간요크(center yoke)를 추가하고, 쇼티드 턴을 적용한 새로운 형태의 평판형 전자기 엑츄에이터를 제안 하고, 상용 자기장 해석 프로그램인 MAXWELL을 이용한 시뮬레이션을 통해 동적 성능 향상을 검증 하였다.