• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.622-625
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• 2004

The CMP monitoring system was newly developed by the aid of friction force measurement, resulting from installation of piezoelectric quartz sensor on R&D polisher. The correlation between friction and CMP results was investigated in terms of tribological aspects by using the monitoring system. Various friction signals were monitored and analyzed by the change of experimental conditions such as pressure, velocity, pad and slurry. First of all, the lubrication regimes were classified with Sommerfeld Number through measuring coefficient of friction in ILD CMP. And then, the removal mechanism of abrasives could be understood through the correlation with removal rate and coefficient of friction. Especially, the amount of material removal per unit sliding distance is directly proportional to the friction force. The uniformity of CMP performances was also deteriorated as coefficient of friction increased.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.135-136
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• 2010

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2003.11a
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• pp.224-228
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• 2003

The basic Principles and methods of the on-line monitoring of tribology parameters (friction coefficient and wear allowance) and fault diagnosis for the hoist disc brake system were introduced, the method were based on the spring force and oil pressure of the brake system and the hoist kinematics parameters. The experiment on the monitoring and diagnosis of hoist brake system were carried out. The research results showed: the monitoring and diagnosis methods are feasible.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.479-480
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• 2006

The purpose of this paper is to investigate the relationship between CMP(Chemical Mechanical Polishing) characteristics of ITO thin film and friction signal by using the CMP monitoring system. Suba 400 pad and MSW2000 slurry of the Rohm & Haas Co. was used in this experiment to investigate the charateristics of ITO CMP. From this experiment, it is proven that the coefficient of friction is related to uniformity of the removal rate of the ITO thin film. Therefore, the prediction of polishing result would be possible by measuring friction signal.

• Proceedings of the KWS Conference
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• 1995.10a
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• pp.3-20
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• 1995

Development of Real-Time Quality Evaluation of Friction Welding by Acousitc Emission : Report 1 ABSTRACT : According as the friction welding has been increasingly applied in manufacturing various machine components because of its significant economic and technical advantages, one of the important concerns is the reliable quality monitoring method for a good weld quality with both joint strength and toughness in the process of its production. However no reliable nondestructive test method is available at present to determine the weld quality particularly in process of production. So this paper presents an experimental examination and quantitative analysis for the real-time evaluation of friction weld quality by acoustic emission, as a new approach which attempts finally to develop an on-line quality monitoring system design for friction welds using AE techniques. As one of the important results, it was confirmed, through this study, that AE techniques can be reliably applied to evaluating the friction weld qualify with 100% joint strength, as the cumulative AE counts occurring during welding period were quantitatively correlated with reliability at 95% confidence level to the joint strength of welds. Real-Time Evaluation of Automatic Production Quality Control for Friction Welding Machine : Report 2 Abstract : Both in-process quality control and high reliability of the weld is one of the major concerns in applying friction welding to the economical and qualified mass-production. No reliable nondestructive monitoring method is available at present to determine the real-time evaluation of automatic production quality control for friction welding machine. This paper, so that, presents the experimental examinations and statistical quantitative analysis of the correlation between the initial cumulative counts of acoustic emission(AE) occurring during plastic deformation period of the welding and the tensile strength of the welded joints as well as the various welding variables, as a new approach which attempts finally to develop an on-line (or real-time) quality monitoring system and a program for the process of real-time friction welding quality evaluation by initial AE cumulative counts. As one of the important results, it was well confirmed that the initial AE cumulative counts were quantitatively and cubically correlated with reliability of 95% confidence level to the joint strength of the welds, bar-to-bar (SCM4 to SUM31, SCM4 to SUM24L) and that an AE technique using initial AE counts can be reliably applied to real-time strength evaluation of the welded joints, and that such a program of the system was well developed resulting in practical possibility of real-time quality control more than 100% joint efficiency showing good weld with no micro-structural defects.

• Journal of Welding and Joining
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• v.12 no.2
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• pp.97-107
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• 1994

Both in-process quality control and high reliability of the weld is one of the major concerns in applying friction welding to the economical and qualified mass-production. No reliable nondestructive monitoring method is available at present to determine the real-time evaluation of automatic production quality control for friction welding of special hydraulic valve spool of 16mm in diameter. This paper, so that, presents the experimental examinations and statistical quantitative analysis of the correlation between the initial cumulative counts of acoustic emission(AE) occurring during plastic deformation periods of the welding and the tensile strength and other properties of the welded joints of $\phi16$ valve spool as well as the various welding variables, as a new approach which attempts finally to develop real-time quality monitoring system for friction welding.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1990.06a
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• pp.7-31
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• 1990

Tribologicsl diagnostics as the ensemble of means and methods of continuous monitoring of the state of friction characteristics of moving junctions is playing an ever important part in the development of friction, lubrication, and wear theory end practice. The scheme presenting the main areas of tribological diagnostics is given in Fig. I. This growing part of TD is determined by the general tendency of modern technology, expressed in an attempt to organically combine the functions of measuring, evaluating,and predicting the parameters and characteristics of the processee taking place in the operating device. The logical result of this integration in future is the closed system correcting its operation in accordance with sn established program. Unfortunately, tribotechnicsl devices are still very far from such an ideal system at the present time. While in the friction assemblies with hydrodynamic lubrication it is possible in the first approximation to realize feed-backs in the lubricant circulation system with the aid of monitoring of the pressure, temperature and filtration, in the systems operating without lubrication and with boundary lubricetion even the process of selection of the diagnostic parameters has not been completed.

• Journal of Welding and Joining
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• v.1 no.2
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• pp.69-75
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• 1983

Both in-process quality control and reliability of the weld is one of the major concerns is applying friction welding. No reliable nondestructive monitoring method is available at present to determine the weld quality particularly in process of production. So that, this paper presents an experimental examination and quantitative analysis for the effects of initial acoustic emission(AE) counts on the weld strength relating to the rotating speed as a new approach which attempts finally to develop an on-line quality monitoring system design for friction welds using AE techniques. As one of the important results, it was well confirmed that the initial AE counts occurring during plastic deformation period of welding were quantitatively correlated with reliability at 95% confidence level to the joint strength of welds, tube-to-tube (SM 20 C to STS 304) and then an AE technique using the initial AE counts can be reliably applied to in-process strength monitoring of the weld.

• Journal of Ocean Engineering and Technology
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• v.13 no.2 s.32
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• pp.74-82
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• 1999

Nowadays, the crank shaft motor vehicle has become essential as the important component. The machining precision was asked for manufacturing the shaft. They could be unstable in the quality by the conventional are welding. Both in-process quailty control and high reliability of the weld are the major concerns in applying friction wlding to the economical and qualified mass-production. No reliable nondestructive monitoring method is avaliable at present to determine the real-time evaluation of automatic production quality control for bar-to-bar friction welding of the crank shaft of O.D 24mm for motor vehicle. This paper, so that, presents the experimental examinations and statistical quantitative analysis of the correlation between the cumulative counts of acoustic emission(AE) during plastic deformation periods of the welding and the tensile strength and other properties of the bar-to-bar welded joints of O.D. 24mm shaft as well as the various welding variables, as a new approach which attempts finally to develop real-time quality monitoring system for friction welding, resulting in practical possiblility of real-time quality control more than 100% joint efficiency showing good weld with no micro structural defects.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.653-654
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• 2005

Stick-slip friction is one of the material removal mechanisms in tribology. This stick-slip friction occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction force monitoring system for chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. It seems that the stick-slip friction causes scratches on the surface of moving parts. In this paper, A study on the scratches which occur during copper CMP was conducted in a view of stick-slip friction.