• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.348-352
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• 2002

a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. This thesis represents optimal design on ultra-precision positioning with single plane X-Y stage and development of artificial control system for adequacy of industrial demand. Also, dynamic simulation on global stage is performed by using ADAMS (Automated Dynamic Analysis of Mechanical System) for the purpose of grasping dynamic characteristic on user designed X-Y global stage. The error between displacements from micro stage and from FEM(Finite Element Method) is 3.53% by verifications of stability on micro stage and control performance. As maximum Von-mises stress on hinge of micro stage is 5.981kg/mm$^2$ that is 1.5% of yield stress, stability on hinge is secured. Preparing previous results, optimal design of micro stage can be possible, and reliance of results with FEM can be secured.

• Transactions of Materials Processing
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• v.19 no.2
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• pp.107-112
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• 2010

A multi-stage gear mold including gears of 2mm and 1.5mm diameter was designed and machined in this research for developing micro gear mold manufacturing technology with micro endmill. Mechanical shapes having differential micro teeth were analyzed to be formed as designed and processing conditions were optimized by analyzing machined surface chip and cutting force. Based on the results, a prototype of micro multi-stage gear mold was manufactured.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.3
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• pp.23-31
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• 2005

The purpose of this study is to design a disturbance observer for a micro-stepping stage to eliminate the disturbances from cables, friction, mass unbalance of the moving part, etc. The disturbance observer is designed for air-floating X-Y precision micro-stepping X-Y stage which widely used in stepper machine or semiconductor manufacturing systems. The micro-stepping X-Y stage has a weak point of the variation of characteristics with position locations, which caused by various disturbances. In this study, it will be described that a simple and high throughput disturbance observer algorithm improves the dynamic error and settling time of the micro-stepping stage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1394-1397
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• 2005

The object of this study was to design of micro stage, which is one of the equipments embodied in ultra precision positioning mechanism. Design factors for micro stage were decided a roundness of hinge, a thickness of hinge, a thickness of stage, a length of arms and a clearance of division. To obtain the $1^{st}$ natural frequency and equivalent stresses, FEM simulation was performed using the table of orthogonal arrays and Taguchi method was used to determine the optimal design parameters. As results of this study, the size of 1st natural frequency and equivalent stresses on micro stage was influenced significantly by a thickness of hinge and a length of arm.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.2
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• pp.372-379
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• 1998

A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.10
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• pp.60-65
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• 2002

For optimal design of micro stage, we measured the displacement of piezoelectric transducer that was based on voltage value. And the micro stage was analyzed using FEM with displacement data including voltage value of piezoelectric transducer. For verification of analysis results, the displacements were measured by using Laser-interferometer. And researchers confirmed to propriety on design of micro stage with FEM, we obtained 3.5% error rate between measurement results and analyzing results.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1344-1348
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• 2003

A precision micro-positioning system with a high displacement resolution and wide motion range has been required for industrialized applications in variety fields. This paper discusses the design of a precision micro-rotation stage with flexure hinges. Proposed system is applied to grinding machine for micro parts. Rotational motion is generated with this system. For this systems having a full rotation motion with high precision, a dual servo system with a coarse stage and a fine stage is proposed.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.233-240
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• 2003

Recently, the world are preparing for new revolution, called as If (Information Technology), NT (Nano-Technology), and BT (Bio-Technology). NT can be applied to various fields such as semiconductor-micro technology. Ultra precision processing is required for NT in the field of mechanical engineering. Recently, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts. Therefore, in this paper, stability of ultra precision cutting unit is investigated, this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed. In this paper, hinge shapes of micro stage in UPCU(Ultra Precision Cutting Unit) are designed as two types, where, hinge shapes are composed of round and rectangularity. Elasticity and strength are analyzed about micro stage, according to hinge shapes, by FE analysis. Micro stage in ultra precision processing machine has to keep hinge shape under cutting condition with 3-component force (cutting component, axial component, radial component) and to reduce modification against cutting force. Then we investigated its elasticity and its strength against these conditions. Material of micro stage is generally used to duralumin with small thermal deformation. But, stability of micro stage is investigated, according to elasticity and strength due to various materials, by FE analysis. Where, Used materials are composed of aluminum of low strength and cooper of medium strength and spring steel of high strength. Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for unit control.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.468-472
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• 2005

In this paper, the static and dynamic stiffness of the air bearing stage for micro-micro machine tool are examined experimentally. For stiffness and precision concerns, air bearing stages are adapted for 3-axis micro-milling machine which is size of $200x200\;mm^2$. The air bearings in the stage are preloaded by permanent magnets to achieve desired bearing clearance and stiffness for vertical direction. As the stiffness of the air bearing is primary interests, static stiffness test were performed on XY stage in Z direction and Z column in Y direction. Dynamic test were performed on XY stage and Z column, respectively. Both static and dynamic tests were performed in different air pressure conditions. The vertical stiffness of XY stage is about 9 N/ pm where Y stiffness of Z column is much smaller as $1\;N/{\mu}m$ because of the large moment generated by Y force on the column.