• Title/Summary/Keyword: oxide layer

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TEM Study on the HgCdTe/Anodic oxide/ZnS Interfaces (투과전자현미경에 의한 HgCdTe/양극산화막/ZnS 계면 특성에 관한 연구)

  • 정진원;김재묵;왕진석
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.32A no.9
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    • pp.121-127
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    • 1995
  • We have analyzed the double insulating layer consisting of anodic oxide and ZnS through TEM experiments. The use of double insulating layer for HgCdTe surface passivation is one of the promising passivation method which has been recently studied deeply and the double insulating layer is formed by the evaporation of ZnS on the top of anodic oxide layer grown in H$_{2}$O$_{2}$ electrolyte. The structure of anodic oxide layer on HgCdTe is amorphous but the structure of oxide layer after the evaporation of ZnS has been changed to micro-crystalline. The interface layer of 150.angs. thickness has been found between ZnS and anodic oxide layer and is estimated to be ZnO layer. The results of analysis on the chemical components of ZnS, the interface layer and anodic oxide layer have showed that Zn has diffused into the anodic oxide layer deeply while Hg has been significantly decreased from HgCdTe bulk to the top of oxide layer. The formation of ZnO interface layer and the change of structure of anodic oxide layer after the evaporation of ZnS are estimated to be defects or to induce the defects which might possibly affect the increase of the positive fixed charges shown in C-V measurements of HgCdTe MIS.

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High Power Single Mode Multi-Oxide Layer VCSEL with Optimized Thicknesses and Aperture Sizes of Oxide Layers

  • Yazdanypoor, Mohammad;Emami, Farzin
    • Journal of the Optical Society of Korea
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    • v.18 no.2
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    • pp.167-173
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    • 2014
  • A novel multi-oxide layer structure for vertical cavity surface emitting laser (VCSEL) structures is proposed to achieve higher single mode output power. The structure has four oxide layers with different aperture sizes and thicknesses. The oxide layer thicknesses are optimized simultaneously to reach the highest single mode output power. A heuristic method is proposed for plotting the influence of these variable changes on the operation of optical output power. A comprehensive optical-electrical thermal-gain self-consistent VCSEL model is used to simulate the continuous-wave operation of the multi-layer oxide VCSELs. A comparison between optimized VCSELs with different structures is presented. The results show that by using multi-oxide layers with different thicknesses, higher single-mode optical output power could be achieved in comparison with multi-oxide layer structures with the same thicknesses.

A Fabrication and Characteristic Estimation of Polycrystalline Silicon Structural Layer for Micromachining (미세가공용 다결정 실리콘 구조체의 제작 및 특성 평가)

  • Kim, Hyoung-Dong;Pack, Seung-Ho;Lee, Seong-Jun;Kim, Chul-Ju
    • Proceedings of the KIEE Conference
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    • 1995.07c
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    • pp.1442-1444
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    • 1995
  • In this study, we confirmed that the crystallinity and the mechanical properties of polycrystalline Silicon(poly-Si) deposited on the poly-oxide are better than those of poly-Si on the conventional sacrificial layers that is CVD oxide layer or PSG. But the etch rate of poly-oxide is poor than that of the CVD oxide layer or PSG. Therefore, to make the best use of small stress and fast etch rate, we fabricated the double oxide layer; 10%-thick poly-oxide on 90%-thick CVD oxide or PSG. To estimate structure deformation by stress, we fabricated the test structures; cantilever. bridge and ring/beam structure and estimated by SEM. As the results, all structure is expressed the deformed structure by residual stress(tensile stress) and the deformation of the structure layer on the double oxide layer is small compared with that of the structure layer on the CVD oxide layer or PSG. And, the etch rate of the double oxide layer is enhanced compared with that of the poly-oxide.

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Development of multi-cell flows in the three-layered configuration of oxide layer and their influence on the reactor vessel heating

  • Bae, Ji-Won;Chung, Bum-Jin
    • Nuclear Engineering and Technology
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    • v.51 no.4
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    • pp.996-1007
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    • 2019
  • We investigated the influence of the aspect ratio (H/R) of the oxide layer on the reactor vessel heating in three-layer configuration. Based on the analogy between heat and mass transfers, we performed mass transfer experiments to achieve high Rayleigh numbers ranging from $6.70{\times}10^{10}$ to $7.84{\times}10^{12}$. Two-dimensional (2-D) semi-circular apparatuses having the internal heat source were used whose surfaces of top, bottom and side simulate the interfaces of the oxide layer with the light metal layer, the heavy metal layer, and the reactor vessel, respectively. Multi-cell flow pattern was identified when the H/R was reduced to 0.47 or less, which promoted the downward heat transfer from the oxide layer and possibly mitigated the focusing effect at the upper metallic layer. The top boundary condition greatly affected the natural convection of the oxide layer due to the presence of secondary flows underneath the cold light metal layer.

Coating Properties of Single and Multi-Layer Graphene Oxide on a Polystyrene Surface (산화그래핀 층수에 따른 폴리스타이렌 표면 코팅 특성)

  • Lee, Jihoon;Park, Jaebum;Park, Danbi;Huh, Jeung Soo;Lim, Jeong Ok
    • Korean Journal of Materials Research
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    • v.31 no.7
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    • pp.420-426
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    • 2021
  • Graphene, a new material with various advantageous properties, has been actively used in various fields in recent years. Applications of graphene oxide are increasing in combination with other materials due to the different properties of graphene oxide, depending on the number of single and multiple layers of graphene. In this study, single-layer graphene oxide and multi-layer graphene oxide are spray coated on polystyrene, and the physicochemical properties of the coated surfaces are characterized using SEM, Raman spectroscopy, AFM, UV-Vis spectrophotometry, and contact angle measurements. In single-layer graphene oxide, particles of 20 ㎛ are observed, whereas a 2D peak is less often observed, and the difference in surface height increases according to the amount of graphene oxide. Adhesion increases with an increase in graphene oxide up to 0.375 mg, but decreases at 0.75 mg. In multi-layer graphene oxide, particles of 5 ㎛ are observed, as well as a 2D peak. According to the amount of graphene oxide, the height difference of the surface increases and the adhesive strength decreases. Both materials are hydrophilic, but single-layer graphene oxide has a hydrophilicity higher than that of multi-layer graphene oxide. We believe that multi-layer graphene oxide and single-layer graphene oxide can be implemented based on the characteristics that make them suitable for application.

The electrical conduction characteristics of the multi-dielectric silicon layer (실리콘 다층절연막의 전기전도 특성)

  • 정윤해;한원열;박영걸
    • Electrical & Electronic Materials
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    • v.7 no.2
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    • pp.145-151
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    • 1994
  • The multi-dielectric layer SiOz/Si3N4/SiO2(ONO) is used to scale down the memory device. In this paper, the change of composition in ONO layer due to the process condition and the conduction mechanism are observed. The composition of the oxide film grown through the oxidation of nitride film is analyzed using auger electron spectroscopy(AES). AES results show that oxygen concentration increases at the interface between oxide and nitride layers as the thickness -of the top oxide layer increases. Results of I-V measurement show that the insulating properties improve as the thickness of the top oxide layer increases. But when the thickness of the nitride layer decreases below 63.angs, insulating peoperties of film 28.angs. of top oxide and film 35.angs. turn over showing that insulating property of film 28.angs. of top oxide is better than that of film 35.angs. of top oxide. This phenomenon of turn over is thought as the result of generation of surface state due to oxygen flow into nitride during oxidation process. As the thickness of the top oxide and nitride increases, the electrical breakdown field increases, but when the thickness of top oxide reaches 35.angs, the same phenomenon of turn over occurs. Optimum film thickness for scaled multi-layer dielectric of memory device SONOS is estimated to be 63.angs. of nitride layer and 28.angs. of top oxide layer. In this case, maximum electrical breakdown field and leakage current are 18.5[MV/cm] and $8{\times}{10^-12}$[A], respectively.

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The Effect of Oxide Layer Formed on TiN Coated Ball and Steel Disk on Friction Characteristics in Various Sliding Conditions (미끄럼조건에 따라 TiN 코팅볼과 스틸디스크에 형성되는 산화막이 마찰특성에 미치는 영향)

  • 조정우;이영제
    • Tribology and Lubricants
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    • v.17 no.6
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    • pp.459-466
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    • 2001
  • In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk on friction characteristics in various sliding conditions were investigated. AISI52100 steel ball was used for the substrate of coated ball specimens, which were prepared by depositing TiN coating with 1(m in coating thickness. AISI1045 steel was used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of two materials, the tests were performed both in air for forming oxide layer on the contact parts and in nitrogen environment to avoid oxidation. From the test results, the frictional characteristic between the two materials was predominated by iron oxide layer that formed on wear tract of counter-body and this layer caused friction transition and high friction. And the adhesive wear occurred from steel disk to TiN coated ball caused the formation of oxide layer on counter parts between the two materials.

Annealing for Improving adhesion between Metal layer and Oxide layer (산화막과 금속박막 계면에서의 adhesion 개선을 위한 열처리)

  • 김응수
    • Proceedings of the IEEK Conference
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    • 2002.06b
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    • pp.225-228
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    • 2002
  • The adhesion effect between the oxide layer and the metal layer has been studied by RTP anneal. Two types of oxides, BPSG and P-TEOS, were used as a bottom layer under multi-layered metal film. We observe the interface between oxide and metal layer using SEM (scanning electron microscopy), TEM (transmission electron microscopy), AES (auger electron spectroscopy). Adhesion failure was occurred by interfacial reaction between the BPSG oxide and the multi-layered metal film at 650"C RTP anneal. The phosphorus rich layer was observed at interface between BPSG oxide and metal layer by AES and TEM measurements. On the other hand adhesion was a)ways good in the sample used P-TEOS oxide as a bottom layer. We have known that adhesion between BPSG and multi-layered metal film was improved when the sample was annealed below $650^{\circ}C$.TEX>.

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Friction Transition Diagram Considering the Effects of Oxide Layer Formed on Contact Parts of TiN Coated Ball and Steel Disk in Sliding (미끄럼운동시 TiN코팅볼과 스틸디스크의 미끄럼접촉면에 형성되는 산화막의 영향을 고려한 마찰천이선도 작성에 대한 연구)

  • Cho, Chung-Woo;Park, Dong-Shin;Lee, Young-Ze
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.3
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    • pp.335-342
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    • 2003
  • In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk in sliding are investigated. Also wear mechanism to from the oxide layer and the characteristics of the oxide layer formation are investigated. AISI 52100 steel ball is used for the substrate of coated ball specimens. Two types of coated ball specimens were prepared by depositing TiN coating with 1 and 4 ${\mu}{\textrm}{m}$ in coating thickness. AISI 1045 steel is used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of the two materials, the tests were performed both in air for forming oxide layer on the contact parts and in nitrogen environment to avoid oxidation. And to study the effects of surface roughness of counter-body, TiN coating thickness and contact load of sliding test on the characteristics of oxide layer formation on counter-body, various tests were carried out. From the results, the friction characteristics between the two materials was predominated by iron oxide layer that formed on wear track on counter-body and this layer caused the high friction. And the formation rate of the oxide layer on wear track increased as the real contact area between the two materials increased as the contact load increased, the TiN coating thickness decreased and the surface of counter-body smoothened.

Friction transition diagram considering the effects of oxide layer formed on contact parts of TiN coated ball and steel disk in sliding (TiN코팅된 볼과 스틸디스크의 미끄럼운동 시 접촉면에 형성되는 산화막의 영향을 고려한 마찰천이선도 작성에 대한 연구)

  • 조정우;박동신;임정순;이영제
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2001.11a
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    • pp.109-116
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    • 2001
  • In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk in sliding are investigated. Also wear mechanism to form the oxide layer and the characteristics of the oxide layer formation are investigated. AIS152100 steel ball is used for the substrate of coated ball specimens. Two types of coated ball specimens were prepared by depositing TiN coating with 1 and 4um in coating thickness. AISI1045 steel is used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of the two materials, the tests were performed both in ambient for forming oxide layer on the contact parts and in nitride environment to avoid oxidation. And to study the effects of surface roughness of counter-body, TiN coating thickness and contact load of sliding test on the characteristics of oxide layer formation on counter-body, various tests were carried out. From the results, the friction characteristics between the two materials was predominated by iron oxide layer that formed on wear track on counter-body and this layer caused the high friction. And the formation rate of the oxide layer on wear track increased as the real contact area between the two materials increased as the contact load increased, the TiN coating thickness decreased and the surface of counter-body smoothened.

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