• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.4
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• pp.169-175
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• 2001

Ozone has been widely applied to many industrial fields because of its strong oxidation power, Therefore, the studies have been carried out for the methods on an effective and high concentration ozone generation. The silent or surface discharge type ozone generators have been mainly used for high concentration ozone generation in many fields of applications. But these two types of ozone generators have shortcomings to be improved. In this study, the ozone generator which improved the shortcomings of above ozone generators was proposed and fabricated for the high concentration ozone generation. And the proposed ozone generator could generate the surface and barrier discharge simultaneously. For this purpose, a mesh type discharge electrode was proposed and studied as a function of the widths output maximum ozone concentration of 2.96[vol%] was obtained at 5.6[kV], 830[mA], for 0.3[mm] width and 0.8[mm] vacancy of the mesh electrode and gap spacing of 0.65[mm] respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.908-911
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• 2002

Recently deep interests and attraction have been paid on the generation of ozone, which is widely used to remove bed smell and to clear water. In this paper the silent discharge and ozone generation characteristics of various typed discharge chambers were investigated experimentally. Dielectric of $Al_2O_3$ was embedded in the cylindrical type of discharge chamber to improve the ozone generation rate and to stabilize the silent discharge mode of operation. Discharge current and ozone concentration depend strongly on the applied voltage and frequency.

• Proceedings of the KIEE Conference
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• 2000.07e
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• pp.29-32
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• 2000

Ozone has been widely applied to many industrial fields because of its strong oxidation effects. Therefore, the studies have been progressed for the effective and high concentration of one generation. The silent or surface discharge have been mainly used for high concentration ozone generation until now. But these two types of ozone generators have shortcomings to be improved. In this study, the ozone generator which improved the shortcomings of above two type of ozone generators was proposed and manufactured for high concentration ozone generation. And the proposed ozone generator could generate the surface and barrier discharge simultaneously. For this purpose, a mesh type discharge electrodes were proposed and the experiments were fulfilled as a function of the widths and spacings of mesh electrodes and gap spacings between the dielectric barrier and mesh electrode. When the width of mesh electrode[WM] and spacing of mesh electrode[SM] are 0.3[mm] and 0.8[mm] respectively, the maximum ozone concentration of 2.96[vol%] was obtained at 5.6[kV], 830[mA], gap spacing (S)=0.65[mm].

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1410-1412
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• 1995

A high efficiency ozone generation using both of a electrode-edge discharge and a dielectric-harrier discharge from a modified silent type ozone generator has been proposed and studied for small scale applications. It is found that the output ozone concentration of the proposed generator depended greatly upon the air gap spacing and the applied power frequency and voltage on the ozone generation. The ozone generator showed higher ozone concentration than the same size of the ceramic type surface ozone generator(Masuda type one). And, it is found that the generator had a potential to be used as an ozone generator for small scale applications.

• KIEE International Transactions on Electrophysics and Applications
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• v.3C no.6
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• pp.230-235
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• 2003

In this paper, a superposed discharge type ozonizer with an internal dielectric that can be made into a vacuum tube has been designed and fabricated. Ozone generation and discharge characteristics have been investigated in accordance with output voltage of power supply, flow-rate, discharge power and vacuum of inside internal dielectric. Pure oxygen was used as the supply gas of the ozonizer. Ozone concentration and ozone generation are gradually increased when discharge power is increased at the same flow-rate and they are both proportional to the vacuum level. As such, the maximum ozone concentration of 8840 ppm was obtained at vacuum 0.1 Torr and flow-rate 0.5 $\ell$/min.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2008.05a
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• pp.379-380
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• 2008

Recently, ozone is utilized in various fields and its needs are expanding. In this paper, glass and ceramic plate tyre ozonizer have been fabricated to investigate discharge parameter(input power, flow rate of supplied gas, electrode form, etc.) effect to discharge. And the conditions of discharge parameter have been investigated for optimum ozone generation. Ozone concentration is continuously increased with increasing input power for same discharge space, and ozone yield is also increased until maximum point after that it is saturated. Ozone concentration is inversely proportional to flow rate of supplied gas but ozone generation and ozone vield characteristics are improved.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.12
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• pp.791-797
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• 1999

Recently the ozone generation system is well used for cleaning the contaminated water by using the strong oxidization effects of ozone. In this paper the concentration, yield and generation quantity of the ozone by the Surface-Silent Discharge According to the Length of Coaxial Electrode is described. The electrodes composed of 3 electrodes-2 gaps are coaxial type and the ozone generation tube were designed and fabricated from the point of view of the energy efficiency, stability and easy control. To investigate the ozone generation dependency on electrode length, a few discharge tubes with different lengths were fabricated. The experimental equipments were provided with cooling system and dehumidifier for the many testing conditions. The main results show that the concentration, yield and generation quantity of ozone are improved by decreasing gas temperatures and increasing electrode lengths.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.22 no.1
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• pp.149-156
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• 2008

Recently, ozone is utilized in various fields and its needs are expanding. In this paper, plate type ozonizer have been fabricated to investigate discharge parameter(input power, flow rate of supplied gas, electrode form, etc.) effect to discharge. And the conditions of discharge parameter have been investigated for optimum ozone generation. Ozone concentration is continuously increased with increasing input power for same discharge space, and ozone yield is also increased until maximum point after that it is saturated. Ozone concentration is inversely proportional to flow rate of supplied gas but ozone generation and ozone yield characteristics are improved.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2214-2216
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• 2005

This paper is researched discharge and ozone generation characteristics of ozonizer using $Al_2O_3$ Ceramic dielectric. The discharge characteristics with variation of the discharge electrode area is studied. The characteristics of ozone concentration. ozone generation and ozone yield were measured to discharge power, discharge electrode area and supplied gas flux for oxygen and air. The solubility of ozone for water concentrations and ozone generations proportional to discharge power and discharge electrode area. Ozone yield has slowly increase with Increasing discharge power at high flow-rate. As the result, the maximum values of ozone characteristics ozone generation and ozone yield, can be obtained 5817[ppm] and 36[g/kWh]. We make enough the ozone concentration as the air in the home. An electric discharge electrode area is apt to shrink gradually into a miniaturization trend of the ozonizer but the enlargement of the occurrence flight of the electric discharge area gives the characteristic enhance the aid in the identity condition through the structure improvement.