• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05d
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• pp.25-28
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• 2003

Ozone is a strong and useful oxidizing gas for the fabrication of oxide thin films. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper an ozone condensation system was evaluated from the viewpoint of an ozone supplier for oxide thin film growth. Ozone was condensed by an adsorption method and the ozone concentration reached 8.5 mol% in 2.5 h after the beginning of the ozone condensation process, indicating high effectiveness of the condensation process. Ozone was continuously desorbed from the silica gel by the negative pressure. We found the decomposition in the ozone concentration negligible if the condensed ozone is transferred from the ozone condensation system to the film growth chamber within a few minutes.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.1192-1195
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• 2003

A highly condensed ozone gas be transferred to the superconductor thin film growth chamber because ozone is strong oxidizing gas. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper an ozone condensation system was evaluated from the viewpoint of an ozone supplier for oxide thin film growth. Ozone was condensed by an adsorption method and the ozone concentration reached 8.5 mol% in 2.5 h after the beginning of the ozone condensation process, indicating high effectiveness of the condensation process. Ozone was continuously desorbed from the silica gel by the negative pressure.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.2
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• pp.163-167
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• 2003

Ozone is strong and useful oxidizing gas for the fabrication of oxidation thin films. In order to obtain high quality thin film, the ozone concentration must be increased. An ozone condensation system is evaluated in the viewpoint of an ozone supplier for oxidation thin film growth. Ozone is condensed by the adsorption method and ozone concentration reaches 8.5 mol% by 2.5 h after the beginning of the ozone condensation is negligible if the condensed ozone is transferred between the ozone condensation system and the film growth chamber within a few minutes. CuO peak which is the result of the obtained Cu-films using condensed ozone appears by XRD patterns.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2003.05a
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• pp.590-593
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• 2003

Ozone is a strong and useful oxidizing gas for the fabrication of oxide thin films. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper an ozone condensation system was evaluated from the viewpoint of an ozone supplier for oxide thin film growth. Crone was condensed by an adsorption method and the ozone concentration reached 8.5 mol% in 2.5 h after the beginning of the ozone condensation process, indicating high effectiveness of the condensation process. Ozone was continuously desorbed from the silica gel by the negative pressure. We found the decomposition in the ozone concentration negligible if the condensed ozone is transferred from the ozone condensation system to the film growth chamber within a few minutes.

• Transactions on Electrical and Electronic Materials
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• v.1 no.2
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• pp.18-22
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• 2000

An ozone condensation system is evaluated from the viewpoint of an ozone supplier fro oxide thin film growth. Ozone is condensed by the adsorption method and its concentration is analyzed using the thermal decomposition method, The concentration of ozone exceeds 90mol% and ozone is supplied for a sufficiently long time to grow oxide thin films. Investigation of the ozone decomposition rate demonstrates that ozone can be transferred into the film growth chamber without marked decomposition. The ozone concentration is also evaluated using a quardrupole mass analyzer and the accuracy of this method is compared with the results of the thermal decomposition method.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.675-678
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• 2004

Ozone is usually generated from oxygen gas using a silent discharge apparatus and its concentration is less then 10 mol%. An ozone condensation system is constructed for metal oxide thin film fabrication. Ozone is condensed by the adsorption method, which is widely used for the growth of oxidation thin films such as superconductor. Highly condensed ozone is analyzed by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is most effective in the highly condensed ozone region and its method is superior to Q-mass analyzer for determining ozone concentration because of the simplicity of the method.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.272-275
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• 2002

An ozone condensation system is evaluated in the viewpoint of an ozone supplier for oxide thin film growth. Ozone is condensed by the adsorption and distillation method. Then their concentrations are analyzed by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is found to be available to the concentration evaluation from dilution to highly condensed ozone. The highest ozone concentration condensed by the adsorption method is evaluated to be 96 mol%. The ozone is supplied for a sufficiently long time to grow oxide thin films.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.121-125
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• 2000

An ozone condenser by a selective adsorption on the silica gel surface is constructed. Ozone density is evaluated by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is found to be available to the density evaluation from dilute to highly condensed ozone. The highest ozone density condensed by the adsorption method is evaluated to be 97 mol%.

• Transactions on Electrical and Electronic Materials
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• v.5 no.4
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• pp.161-165
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• 2004

In order to get oxidizing power enough for growth of a superconductive thin film with oxide gas, concentrated ozone was used. As a method for concentrating ozone, a method for concentrating ozone by adsorbing ozone selectively into silica-gel beads is adopted, and this concentration is analyzed by the ultraviolet absorption method, the thermal decomposition method and the Q-mass analyzing method. Thermal decomposition method is most effective for measurement of a high concentration of ozone. Ozone as concentrated by the adsorption method got to have a concentration of 97 mol % at the maximum, and it was identified that the concentration of the ozone gas was stable for the time while a thin film was formed.

• Transactions on Electrical and Electronic Materials
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• v.2 no.2
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• pp.42-45
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• 2001

An ozone condensation system is evaluated from the viewpoint of an ozone supplier for Bi-superconductor thin film growth. An ozone condenser by a selective adsorption on the silica gel surface is constructed. Ozone density is evaluated by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is found to be available to the density evaluation from dilute to highly condensed ozone. The highest ozone density condensed by the adsorption method is evaluated to be 97 mol%.