• Title/Summary/Keyword: piezo-resistive pressure sensor

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Low-Voltage Current-Sensing CMOS Interface Circuit for Piezo-Resistive Pressure Sensor

  • Thanachayanont, Apinunt;Sangtong, Suttisak
    • ETRI Journal
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    • v.29 no.1
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    • pp.70-78
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    • 2007
  • A new low-voltage CMOS interface circuit with digital output for piezo-resistive transducer is proposed. An input current sensing configuration is used to detect change in piezo-resistance due to applied pressure and to allow low-voltage circuit operation. A simple 1-bit first-order delta-sigma modulator is used to produce an output digital bitstream. The proposed interface circuit is realized in a 0.35 ${\mu}m$ CMOS technology and draws less than 200 ${\mu}A$ from a single 1.5 V power supply voltage. Simulation results show that the circuit can achieve an equivalent output resolution of 9.67 bits with less than 0.23% non-linearity error.

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Interference Effects on the Thickness of a Pulse Pressure Sensor Array Coated with Silicone (맥 센서 어레이(array)의 실리콘(silicone) 코팅 두께에 따른 센서 간 간섭효과)

  • Jun, Min-Ho;Jeon, Young Ju;Kim, Young-Min
    • Journal of Sensor Science and Technology
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    • v.25 no.1
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    • pp.35-40
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    • 2016
  • Pulse diagnosis is one of the representative diagnostic methods in Oriental medicine. In this study, a pulse pressure sensor array coated with silicone, which includes 6 piezo-resistive sensors and 1 thermistor, is fabricated for pulse measurement. It is necessary to coat the pulse sensor array with silicone to avoid the fracture or damage of pressure sensors when the sensor is in contact with the skin and a constant pressure is applied. However, the silicone coating on the pulse sensor array can cause signal interference among the sensors in the pulse sensor array. The interference number (IN), a calculation for expressing the degree of interference among channels, is changed according to the silicone thickness on the pulse sensor array. The IN is increased by a thick silicone coating, but the fabrication error, an important index for the mass production of the sensor array, is reduced by the thickness of the silicone coating. We propose that the thickness of the silicone on the pulse sensor array is an important consideration for the performance of the fabricated sensor and manufacturing repeatability.

A Design of Signal Processing Analog Front-End IC for Automotive Piezo-Resistive Type Pressure Sensor (Automotive Piezo-Resistive Type Pressure Sensor 신호 처리 아날로그 전단부 IC 설계)

  • Cho, Sunghun;Lee, Dongsoo;Choi, Jinwook;Choi, Seungwon;Park, Sanghyun;Lee, Juri;Lee, Kang-Yoon
    • Journal of the Institute of Electronics and Information Engineers
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    • v.51 no.8
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    • pp.38-48
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    • 2014
  • In this paper, a design of Signal Processing Analog Front-End IC for Automotive Piezo-Resistive Type Pressure Sensor is presented. In modern society, as the car turns to go from mechanical to electronic technology, the accuracy and reliability of electronic parts required importantly. In order to improve these points, Programmable Gain Amplifier (PGA) amplifies the received signal in accordance with gain for increasing the accuracy after PRT Sensor is operated to change physical pressure signals to electrical signals. The signal amplified from PGA is processed by Digital blocks like ADC, CMC and DAC. After going through this process, it is possible to determine the electrical signal to physical pressure signal. As processing analog signal to digital signal, reliability and accuracy in Analog Front-End IC is increased. The current consumption of IC is 5.32mA. The die area of the fabricated IC is $1.94mm{\times}1.94mm$.

A Study on the Measurement of Oil-Film Pressure in Engine Connecting Rod Bearing and Piston Pin-Boss by Thin-Film Sensor

  • Mihara, Yuji;Someya, Tsuneo
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.409-410
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    • 2002
  • In order to measure the oil-film pressure in sliding surface of machinery, we have developed a piezo-resistive type thin-film pressure sensor. To reduce the measurement error due to temperature and strain, the constituent of the pressure sensitive alloy was optimized and a new sensor shape was devised. In this study, we present the measurement results of the oil-film pressure distribution in engine connecting rod big-end bearing and piston pin- bosses with 3 different pin-boss shapes using the newly developed thin-film pressure sensor.

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The Developement of a Wind Direction/Speed Measurement Equipment Using RTD or Piezo Sensors (RTD 및 피에조 센서를 활용하는 풍향/풍속 측정장치 개발)

  • Joo, Jae-Hun;Kim, Dong-Hyun;Gong, Byung-Gunn;Lee, Jin-Ho;Choi, Jung-Keyng
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2011.05a
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    • pp.827-830
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    • 2011
  • In this paper, a wind speed & direction module and the DSP(Digital Signal Processor) sensor interface circuit board are proposed. This DSP system accepts and process the informations from a wind speed & direction module, the atmospheric pressure sensor, the ambient air temperature sensor and transfers it to the PC monitering system. Especially, a wind speed & direction module and a DSP hardware are directly designed and applied. A wind speed & direction module have a construction that it have four film type RTD(Resistive Temperature Detectors) or film type Piezo sensors adhered around the circular metal body for obtaining vector informations about wind. By this structure, the module is enabled precise measurement having a robustness about vibration, humidity, corrosion. A sensor signal processing circuit is using TMS320F2812 TI(Texas Instrument) Corporation high speed DSP.

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Radial Pulse Wave Detection system for the Korean Medicine (한방용(韓方用) 맥파 검출시스템)

  • Lee, H.J.;Kim, J.W.;Kim, H.O.;Park, Y.B.;Huh, W.
    • Proceedings of the KOSOMBE Conference
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    • v.1991 no.11
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    • pp.66-69
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    • 1991
  • This paper describes a design of transducer for non-invasively detecting pressure radial pulse wave in aterial system and a recording system that for the studing the aterial pulse diagnosis of korean traditional medicine. The mechanism of transducer is composed of sensing mechanism, pressure sensor, conditioning amplifier. The variation of radial pulse pressure in the sensing mechanism is converted to the electric signal by piezo-resistive pressure sensor and it converted to the digital signal after preprocessing via A/D converter. The converted signals inputed to the computer as data files and then it display to the monitor for waveform watching and this datas can be used as the aterial pulse diagnosis data. This system effectively detect non-differential radial pulse wave and we conside that if analizing the recorded radial pulse wave, compared each other, it can be helpful in quantify radial pulse wave diagonosis of the Korean traditional medicine.

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Multi-functional (Temperature, Pressure, Humidity) Sensor by MEMS technology (MEMS 기술을 이용한 온도, 압력, 습도 복합 센서)

  • Kwon Sang-wook;Won Jong-Hwa
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.42 no.11
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    • pp.1-8
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    • 2005
  • In this paper, we present design and prototyping of a low-cost, integrated multi-functional micro health sensor chip that can be used or embedded in widely consumer devices, such as cell phone and PDA, for monitoring environmental condition including air pressure, temperature and humidity. This research's scope includes basic individual sensor study, architecture for integrating sensors on a chip, fabrication process compatibility and test/evaluation of prototype sensors. The results show that the integrated TPH sensor has good characteristics of ${\pm}\;1\%FS$ of linearity and hysteresis for pressure sensor and temperature sensor and of ${\pm}\;5\%FS$ of linearity and hysteresis But if we use 3rd order approximation for humidity sensor, full scale error becomes much smaller and this will be one of our future study.