• Title/Summary/Keyword: semi-conductor laser

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Blue Multi-Laser-Diode Annealing(BLDA) Technologies for Poly-Si Films

  • Ogino, Yoshiaki;Iida, Yasuhiro;Sahota, Eiji;Terao, Motoyasu;Chen, Yi;Noguchi, Takashi
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.945-947
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    • 2009
  • We developed a new laser irradiation (BLDA: Blue Multi-Laser-Diode Annealing) system. The system forms the uniform line beam, which is constructed by 48 pieces of semiconductor lasers. This new system has achieved high laser output stability and the highly accurate beam shape by adopting a reliable laser control, the auto-focus control in addition to an original laser photosynthesis technology and the beam homogenizing technology. It was confirmed to crystallize the Si films effectively with good quality.

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A Study on Adaptive Front-Lighting System based on Diffractive Optical Element (회절 광학 소자 기반 적응형 전조등 시스템 연구)

  • Seong-Uk Shin;Seung-Ho Park;Kyoung-Sun Yoo;Myeong-Jae Noh
    • Advanced Industrial SCIence
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    • v.2 no.4
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    • pp.28-35
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    • 2023
  • In this paper, a diffractive optical element was designed to create lighting patterns that satisfy the requirements of adaptive headlight systems for normal road mode, highway mode, and wet road mode, and this was rendered into a GDSII stream format file.To verify the effectiveness of the light distribution formed by the diffractive optical elements and the realization of white light, simulations based on Field Tracing and Ray Tracing were conducted, confirming the satisfaction of position and luminance requirements at the transformation beam measurement points. Based on this research, it is anticipated that the implementation of adaptive headlights would be possible, enabling the reproduction of luminance contrast and the creation of a simple-structured adaptive headlight system.

Burr Control in Meso-Punching Process

  • Shin Hong Gue;Shin Yong Seung;Kim Byeong Hee;Kim Heon Young
    • Journal of Mechanical Science and Technology
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    • v.19 no.4
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    • pp.968-975
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    • 2005
  • The shearing process for the sheet metal is normally used in the precision elements such as semi-conductor components. In these precision elements, the burr formation brings a bad effect on the system assembly and demands the additional de-burring process, so this imposes high cost on manufacturing. In this paper, we have developed the in-situ auto-aligning precision meso-punching system to investigate the burr formation mechanism and ultimately minimize burr. Firstly, we introduced the punch-die contact sensing method to align the punch and the die at initial state prior to the punching process. Secondly, by using the low-price semi-con­ductor laser, burr formed on the edges is measured intermittently during the punching process. We could, finally, make burr on the sheet metal uniformized and minimized by controlling of the precision X - Y table, $1\;{\mu}m$ resolution, and measuring burr height by semiconductor laser. Experimental results show the validity of our system for pursuing the burr-free punched elements.

Precision measuring of burrs on sheet metal using the laser (레이저를 이용한 박판 버의 정밀측정)

  • 신홍규;홍남표;김헌영;김병희
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1824-1827
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    • 2003
  • The sheet metal shearing process is normally used in the precision elements such as semi-conductor components. In precision elements, burrs usually reduce the quality of machined parts and cause interference, jamming and misalignment during assembly procedures and because of their sharpness, they can be safety hazard to personnel. Furthermore, not only burrs are hard to predict and avoid, but also deburring, the process of removing burrs, is time-consuming and costly. In order to get the burr-free parts, therefore, we developed the precise burr measuring system using the laser. The laser burr measuring system consists of the laser probe, the photo detector, the achromatic doublet lens, and the rotary & the X-Y table. In previous reports, we used simple vertical measuring method. But, as we used relatively bigger laser spot diameter and had the limited reflection angle, it was difficult to obtain the precise measuring results. So called, the spot size effect makes the profile of burr measured distorted and the burr height measured smaller. By introducing the novel laser measuring method which employing the achromatic lens system and the tilting mechanism, we could make the spot size smaller and get the appropriate beam direction angle. Through the experiments, the accuracy of the developed system is proved. The burr height measured during the punching process can be used for automatic deburring and in-situ aligning.

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The realtime measurement of burrs on sheet metal using the semiconductor laser (반도체 레이저를 이용한 박판 버의 실시간 측정)

  • 홍남표;신홍규;김헌영;김병희
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2003.10a
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    • pp.107-110
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    • 2003
  • The sheet metal shearing process is normally used in the precision elements such as semi-conductor components. In precision elements, burrs usually reduce the quality of machined parts and cause interference, jamming and misalignment during assembly procedures and because of their sharpness, they can be safety hazard to personnel. Furthermore, not only burrs are hard to predict and avoid, but also deburring, the process of removing burrs, is time-consuming and costly. In order to get the burr-free parts, therefore, we developed the precise burr measuring system using the laser. Using the X-Y precious table, we used vertical measuring method. Through the laser measurement system, we gain the minute analog signal, so this signal was amplified by the electric circuit. Finally, we gained the realtime burr data using A/D converter, PC. By introducing the novel laser measuring method which employing vertical measurement mechanism, we could get fast and precious burr data. Through the experiments, the accuracy of the developed system is proved. The burr height measured during the punching process can be used for automatic deburring and in-situ aligning.

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A Study on the Laser Direct Imaging for FPD ( I ) (평판 디스플레이용 Laser Direct Imaging에 관한 연구( I ))

  • Kang, H.S.;Kim, K.R.;Kim, H.W.;Hong, S.K.
    • Proceedings of the Korean Society of Laser Processing Conference
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    • 2005.11a
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    • pp.37-41
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    • 2005
  • When screen size of the Flat Panel Display (FPD) becomes larger, the traditional photo-lithography using photomasks and UV lamps might not be possible to make patterns on Photo Resist (PR) material due to limitation of the mask size. Though the maskless photo-lithography using UV lasers and scanners had been developed to implement large screen display, it was very slow to apply the process for mass-production systems. The laser exposure system using 405 nm semi-conductor lasers and Digital Micromirror Devices (DMD) has been developed to overcome above-mentioned problems and make more than 100 inches FPD devices. It makes very fine patterns for full HD display and exposes them very fast. The optical engines which contain DMD, Micro Lens Array (MLA) and projection lenses are designed for 10 to 50 ${\mu}m$ bitmap pattern resolutions. The test patterns for LCD and PDP displays are exposed on PR and Dry Film Resists (DFR) which are coated or laminated on some specific substrates and developed. The fabricated edges of the sample patterns are well-defined and the results are satisfied with tight manufacturing requirements.

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Optical Signal Processing of Laser Encoder Using Diffraction Grating (회절 격자를 이용한 레이저 엔코더의 광 신호처리)

  • 김수진;은재정;최평석
    • Proceedings of the Korea Institute of Convergence Signal Processing
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    • 2000.12a
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    • pp.145-148
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    • 2000
  • Position-determining capacity is a very important condition in equipments for manufacturing semi-conductor or various instruments to measure physical displacement quantities of a moving object in submicron such as a distance of movement, direction, etc. and the accuracy of total system is influenced by detecting accuracy of these equipments. Therefore in this paper we have optically made up laser linear encoder based on optical diffraction principle to measure these displacement quantities and have processed optical signal using hardware-setup. In consequence we had acquired displacement for movement of scale using a diffraction grating by the accuracy of 0.5${\mu}{\textrm}{m}$ and had digitalized moving quantities of scale.

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Temperature and Concentration measurement using Semi-conductor diode laser (반도체레이져를 이용한 온도 및 농도의 계측)

  • Chung, D.H.;Noh, D.S.;Ikeda, Yuji
    • 한국연소학회:학술대회논문집
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    • 2000.12a
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    • pp.168-174
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    • 2000
  • A diode laser sensor system based on absorption spectroscopy techniques has been developed to measure $CO_2$ concentration and temperature non-intrusively in high temperature combustion environments using a 2.0 ${\mu}m$ DFB(Distributed Feedback) laser. Two optics was fabricated in pig-tail fashion and all optical components were implemented in a single box. The evolution of measurement sensitivity was done using test cell by changing sweep frequency and $CO_2$ concentration. Gas temperature was determined from the ratio of integrated line strengths. Species concentration was determined from the integrated line intensity and the measured temperature. The result show that the system has 2% error in wide operation frequency range and accuracy of $CO_2$ concentration was about 3%. The system was applied to measure temperature and concentration in the combustion region of a premixed $CH_4$ +air triangular flame. The measurement results of gas temperature agreed well with thermocouple results. Many considerations were taken into account to reduce optical noise, etalon effect, beam steering and base line matching problem. The evaluations results and actual combustion measurement demonstrate the practical and applicability for in-situ and real time combustion monitoring in a practical system.

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A Study on the measurement of Table Deflection using Laser Interferometer and It's Inspection using FEA (레이저 간섭계에 의한 테이블의 처짐측정과 FEA에 의한 이의 검증)

  • 이승수
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1998.10a
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    • pp.204-209
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    • 1998
  • The acceleration of the performance of machine tools influences the development of the semi-conductor and optical technology as the development of NC and measurement technology. We can mention that a traction role of the acceleration for the development like that depends on the development of the measurement technics Stylus instrument method, STM, SEM, Laser interferometer method which are used for measuring the quasi-static error of machine tools. Because the measurement has been done to unload condition without considering of mechanical stiffness in the case of machining center as we measure the quasi-static error of machine tools on general studies, people who works on the spot has many problems on the data value. Therefor we will help working more accurately on the spot by measuring, analyzing, displaying the deflection of the table and support shaft when we load on the table and the support shaft of machining center using laser interferometer. Also we try to settle new conception of the measurement method and more accurate grasp of the deflection tendency by verifing the tendency of the error measured through the comparison of the simulated error using ANSYS, a common finite element analysis program, which is able to measure heat deformation, material deformation, and error resulted form this study.

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The EFFECTS OF DENTAL LASER ON PULP FIBROBLAST IN VITRO (치과용 레이저 조사가 배양 치수 섬유모세포에 미치는 영향에 관한 연구)

  • Jeong, Hye-Jeon;Min, Byung-Soon
    • Restorative Dentistry and Endodontics
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    • v.22 no.2
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    • pp.519-535
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    • 1997
  • The responses of human pulp fibroblastic cells to Ga-As Semi-Conductor-Dens-Bio Laser (Frequency: 5 Hz~10,000 Hz Model: SD-101A RCA, U.SA)) were examined in vitro using pulp fibroblastic cells obtained from the pulp tissue of human tooth. The mitogenic effect of soft laser was assessed by measuring the MTT assay. The morphologic effect for soft laser showed under the scanning and transmission electron microscopy. The results as follows; 1. The mitogenic response of the soft laser was not observed until 4th time of radiation, while the mitogenic response at 4th time increased mitogenic effect by as much as 1.7 fold compared to the control value. 2. The mitogenic response of the soft laser on pulp fibroblast differ from the mitogenic response on other fibroblasts. 3. In scanning electron microscopic study, The microvilli of cell surface increased gradually with width and length after laser radiation, it demonstrate that development of microvilli have close connection with differentiation of cells. 4. Under the transmission electron microscope, The laser-treated cells maintained their elongated shape and a high degree of cellular polarization. The large cell body containing a well developed Golgi complex, a large number of profiles of rough endoplasmic reticulum, and great numbers of mitochondria. 5. The laser-treated cells maintained the long straight bundles of closely apposed microfilaments or individual filaments forming a cross-linked network. These findings suggest that the laser may have important roles in promotion of pulp healing and consequently may be useful for clinical application in pulp regenerative procedures.

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