• 한국전기전자재료학회논문지
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• 제13권2호
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• pp.131-136
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• 2000

We have investigated the slurry induced metallic contaminations of undoped and doped silicate oxides surface on CMP cleaning process. The metallic contaminations by CMP slurry were evaluated in four different oxide films, such as plasma enhanced tetra-ethyl-orthyo-silicate glass(PE-TEOS), O3 boro-phos-pho-silicate glass(O3-BPSG), PE-BPSG, and phospho-silicate glass(PSG). All films were polished with KOH-based slurry prior to entering the post-CMP cleaner. The Total X-Ray fluorescence(TXRF) measurements showed that all oxide surfaces are heavily contaminated by potassium and calcium during polishing which is due to a CMP slurry. The polished O3-BPSG films presented higher potassium and calcium contaminations compared to PE-TEOS because of a mobile ions gettering ability of phosphorus. For PSG oxides, the slurry induced mobile ion contamination increased with an increase of phosphorus contents. In addition, the polishing removal rate of PSG oxides had a linear relationship as a function of phosphorus contents.

• 한국세라믹학회지
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• 제25권5호
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• pp.431-436
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• 1988

The properties of scid-resistance to boiling HCl, thermal expansion coefficient and softening temperature of mother glass and glass-ceramic of LAS systems were investigated at the contents of SiO2 varing from 57 to 67wt%. The nucleation and growth of crystalline phase of LAS compositions were carried out at 50$0^{\circ}C$ and $700^{\circ}C$. The crystalline phase jconsists of lithium alumino silicate, lithum meta silicate, lithium disilicate, $\alpha$-crystobalite and $\alpha$-quartz. Lithium alumino silicate(virgilite) is the major crystalline phase in the glass ceramics. The degree of acid resistant property was increased in proportion with the silica content for both glass and ceramics. Glass-ceramic gives lower acid-resistance and thermal expansion coefficient while softening temperature shows higher for glass-ceramic than for mother glass.

• 한국산학기술학회논문지
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• 제5권2호
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• pp.98-102
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• 2004

단일이온교환 프로세스를 도입하여 soda-lime-silicate 유리에 있어서의 이온교환 거동 및 물성변화를 관찰하였다. 온도 및 시간 변화에 따라 K/sup +/ 이온의 침투깊이, 이온교환량은 증가하였으며, 이에 비례하여 밀도, 굴절률도 증가하는 경향을 보였다 이온교환 과정에서 생성된 비가교 산소로 인하여 400nm에서 흡수 현상이 관찰되었으며, 열팽창계수는 구조의 치밀화와 이력현상에 영향을 받았다.

• Bulletin of the Korean Chemical Society
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• 제17권8호
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• pp.696-699
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• 1996

Silicate and borosilicate gels were prepared by the sol-gel process and thermally treated in the 150-850 ℃ temperature range. Solid-state 1H MAS and 29Si CP/MAS NMR spectroscopy were used to investigate the effects of heat treatments on the silicate gel to glass conversion process. The 1H NMR isotropic chemical shifts and the relative intensities of hydrogen bonded and isolated silanol groups have been used to access the information concerning the dehydration process on the silicate gel surface. The 29Si NMR isotropic chemical shifts affected by the local silicon environment have been used to determine the degree of crosslinking, i.e. the number of siloxane bonds. These NMR results suggest that the silicate gel to glass conversion process is occurred by two stages which are dependent on the temperature; (1) the formation of particles up to 450 ℃ and (2) the formation of large particles by aggregation of each separated single particle above 450 ℃. In addition, the effects of B atom on the formation of borosiloxane bonds in borosilicates have been discussed.

• 한국세라믹학회지
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• 제26권4호
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• pp.521-531
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• 1989

The dependence of the chemical durability of simulated waste glasses containing the simplified waste similar to the SRP waste on compositions of host glasses, amounts of waste loading, and kinds of leachants has been investigated as a basic study on the waste immobilization through vitrification. The maximum limit of the amount of waste loading for glassforming with the host sodium borosilicate glasses selected in this study was 50wt%. The chemical durability of waste glasses whose host glass belonged to the immiscible composition region was much higher than that of waste glasses whose host glass belonged to the miscible composition region. The former waste glass showed lower chemical durability in deionized and silicate waters than in brine, while the latter glass showed the lowest chemical durability in deionized and silicate waters than in brine, while the latter glass showed the lowest chemical durability in silicate water. It was also observed that the total leaching rates in brine were noticeably small in comparison with those in other solutions. The composition of the host borosilicate glass which was suitable for the treatment of the waste through vitrification was found to be 25 Na2O-5B2O3-70SiO2(wt.%).

• 한국세라믹학회지
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• 제52권2호
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• pp.133-136
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• 2015

The outward diffusion of $Na^+$ ions in iron-bearing soda lime silicate glass via oxidation heat treatment before the ion exchange process is artificially induced in order to increase the amount of ions exchanged during the ion exchange process. The effect of the addition process is analyzed through measuring the bending strength, the weight change, and the inter-diffusion coefficient after the ion exchange process. The glass strength is increased when the outward diffusion of $Na^+$ ions via oxidation heat treatment before the ion exchange process is added. For the glass subjected to the additional process, the weight change and diffusion depth increase compared with the glass not subjected to the process. The interdiffusion coefficient is also slightly increased as a result of the additional process.

• 한국전기전자재료학회논문지
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• 제21권2호
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• pp.188-193
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• 2008

Epoxy/Organically Modified Layered Silicate Nanocomposites were prepared by dispersing synthetic layered silicate modified with alkyl ammonium ions. In the dispersing process, the organically modified layered silicate were mixed in epoxy resin with shearing, and aggregation of the silicate were removed by centrifugal separation after mixing epoxy resin and silicates. Micrographs taken by transmission electron microscopy(TEM) indicate that the nanocomposites have a mixed morphology including both parallel silicate layers and exfoliated silicate layers area, As the thermal properties, the glass transition temperature of the nanocomposites was shifted to a higher temperature($+6^{\circ}C$)than pure epoxy. Furthermore, dispersion of OMLS will prevented relative permittivity from increasing at a high temperature above the glass transition temperature.

• 한국세라믹학회지
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• 제33권6호
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• pp.617-622
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• 1996

• 한국세라믹학회지
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• 제56권2호
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• pp.167-172
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• 2019

Silicate glasses with varying SiO₂ and Na₂O contents were prepared and their viscous flow property at the elevated temperature was studied. When the glass powders were packed and sintered at 550℃ to examine their feasibility as a low sintering temperature glass frit, contrary to expectations, glasses with lower SiO₂ content than 60 mol% showed no vitrification after sintering. High temperature microscopy revealed the viscous flow change of the silicate glasses with varying temperature and duration time and also indicated that the viscous flow was limited at low SiO₂ content. X-ray diffraction (XRD) on the sintered samples and Raman spectroscopy were carried out to shed light on the compositional dependency of viscous flow of silicate glasses.

• 한국전기전자재료학회논문지
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• 제22권6호
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• pp.506-511
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• 2009

For the application of the photosensitive barrier ribs with optimal properties such as glass transition temperature, refractive index and coefficient thermal expansion, the boro-silicate glasses was studied. The glass transition temperature, coefficient thermal expansion, and refractive index of the glasses based on the $B_2O_3-Al_2O_3-Al_2O_3-SiO_2$ glass system have been investigated with the different ratio of BaO/$Na_2O$ and $B_2O_3/Na_2O$. Increasing the ratio of $B_2O_3/Na_2O$ was led to the increase of coefficient thermal expansion and the decrease of glass transition temperature. The increase of refractive index of boro-silicate glasses increased with the density of glasses. We suggest the empirical equation for the prediction of refractive index with the glass density, $n=0.123{\rho}+1.182$ with 0.042 as the standard deviation in the boro-silicate glass system. The aim of the present paper is to give a basic result of the thermal and optical properties for designing the composition of photosensitive barrier ribs in PDP.