• Journal of the Korean Ceramic Society
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• v.27 no.2
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• pp.219-225
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• 1990

Silicon dioxide thin film has been grown by a chemical vapor deposition (CVD) technique using SiH4, and O2 gaseous mixture on a silicon substrate. The experimental results indicated that the deposition rate as a function of the input ratio (O2/SiH4) shows two regions, increasing region and decreasing region. Also the deposition rate increases with increasing the deposition temperature. The microstructure of deposited silicon dioxide films is amorphous. The experimental results of infrared absorption spectrums indicate that Si-H and Si-OH bond increase with decreasing input ratio, but Si-O bond is independent on the input ratio. The interfacial charge of deposited silicon dioxide decreases with increasing input ratio.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.4
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• pp.334-338
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• 2006

Poly silicon TFT requires high quality dielectric film; conventional method of growing silicon dioxide needs highly hazardous chemicals such as silane. We have grown high quality dielectric film of silicon dioxide using non-hazardous chemical such as TFOS and ozone as reaction gases by APCVD. The films grown were characterized through C-V curves of MOS structures. Conventional APCVD requires high temperature processing where as in the process of current study, we developed a low temperature process. Interface trap density was substantially decreased in the silicon surface coated with the silicon dioxide film after annealing in nitrogen ambient. The interface with such low trap density could be used for poly silicon TFT fabrication with cheaper cost and potentially less hazards.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.7
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• pp.293-297
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• 2003

Silicon dioxide (SiO$_2$) layers were fabricated on Si$_3$N$_4$/SiO$_2$/Si layer structures by low pressure chemical vapor deposition (LPCVD). Potassium and aluminum were then coimplanted by implanting potassium ions with the energy of 100 ［keY］ and dose of 5x10$^{16}$ [cm￣$^2$］ and 1x10$^{17}$ [cm￣$^2$］ into an aluminum buffer layer on the SiO$_2$Si$_3$N4/SiO$_2$/Si structure. The pH, pNa, and pK ion sensitivities of the resulting layers were investigated and compared to those of as-deposited silicon dioxide layer. The pK-sensitivity of the silicon dioxide was enhanced by the K and Al coimplantation. On the contrary, the pH and pNa-sensitivities of the coimplanted silicon dioxides were quite lower than that of the as-deposited silicon dioxide.

• Proceedings of the KIEE Conference
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• 1988.07a
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• pp.383-386
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• 1988

In MOS integrated circuits, annealing after oxidation process is necessary to improve physical properties of silicon dioxide. With subsequent annealing in inert gases such as nitrogen or argon, and excess silicon bond is allowed time to complete the oxidation and surface charge density is reduced. In this paper, we will present effects of the rapid thermal annealing on silicon dioxide. In order to evaluate characteristics of silicon dioxide, we analyzed C-V curve dependent on annealing time and temperature, and presented variation of fixed oxide charge.

• Journal of Powder Materials
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• v.27 no.3
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• pp.241-246
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• 2020

To develop Gastrodia elata (GE)-loaded particles for herbal extract dosage forms, various GE-loaded particles containing dextrin, isomalt, maltodextrin, and silicon dioxide as solidifying carriers in the GE water extract are prepared using the spray drying method. Their physical properties are evaluated using the repose angle, Hausner ratio, Carr's index, weight increase rate at 40℃/75% RH condition, and scanning electron microscopy (SEM). Particles made of dextrin improve the fluidity, compressibility, and water stability. In addition, 2% silicon dioxide increases the fluidity and moisture stability. The best flowability and compressibility of GE-loaded particles are observed with TP, dextrin, and silicon dioxide amounts in the ratio of 6/4/0.2 (34.29 ± 2.86°, 1.48 ± 0.03, and 38.29 ± 2.39%, repose angle, Hausner Ratio, and Carr's index, respectively) and moisture stability with a 2% weight increase rate for 14 h at 40℃/75% RH condition. Therefore, our results suggest that the particles prepared by the spray drying method with dextrin and 2% silicon dioxide can be used as powerful particles to improve the flowability, compressibility, and moisture stability of GE.

• Journal of Powder Materials
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• v.26 no.3
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• pp.225-230
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• 2019

To develop Taraxacum platycarpum extract (TP)-loaded particles for tablet dosage form, various TP-loaded particles composed of TP, dextrin, microcrystalline cellulose (MCC), silicon dioxide, ethanol, and water are prepared using a spray-drying method and fluid-bed-drying method. Their physical properties are evaluated using angle of repose, Hausner ratio, Carr's index, hardness, disintegrant time, and scanning electron microscopy. Optimal TP-loaded particles improve flowability and compressibility. Furthermore, 2% silicon dioxide gives increased flowability and compressibility. The formula of TP-loaded fluid-bed-drying particles at a TP/MCC/silicon-dioxide amount of 5/5/0.2 improves the angle of repose, Hausner ratio, Carr's index, hardness, and disintegrant time as compared with the TP-loaded spray-drying particles. The TP-loaded fluid-bed-drying particles considerably improve flowability and compressibility ($35.10^{\circ}$ vs. $40.3^{\circ}$, 0.97 vs. 1.17, and 18.97% vs. 28.97% for the angle of repose, Hausner ratio, and Carr's index, respectively), hardness (11.34 vs. 4.7 KP), and disintegrant time (7.4 vs. 10.4 min) as compared with the TP-loaded spray-drying particles. Thus, the results suggest that these fluid-bed-drying particles with MCC and silicon dioxide can be used as powerful particles to improve the flowability and compressibility of the TP.

• Journal of Powder Materials
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• v.28 no.3
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• pp.227-232
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• 2021

The purpose of this study is to optimize the powder formulation and manufacturing conditions for the solidification of an extract of the herb Bangpungtongseong-san (BPTS). To develop BPTS-loaded particles for the tablet dosage form, various BPTS-loaded particles composed of BPTS, dextrin, microcrystalline cellulose (MCC), silicon dioxide, ethanol, and water are prepared using spray-drying and high shear granulation (high-speed mixing). Their physical properties are evaluated using scanning electron microscopy and measurements of the angle of repose, Hausner ratio, Carr's index, hardness, and disintegration time. The optimal BPTS-loaded particles exhibit improved flowability and compressibility. In particular, the BPTS-loaded particles containing silicon dioxide show significantly improved flowability and compressibility (the angle of repose, Hausner ratio, and Carr's index are 35.27 ± 0.58°, 1.18 ± 0.06, and 15.67 ± 1.68%, respectively), hardness (18.97 ± 1.00 KP), and disintegration time (17.60 ± 1.50 min) compared to those without silicon dioxide. Therefore, this study suggests that particles prepared by high-speed mixing can be used to greatly improve the flowability and compressibility of BPTS using MCC and silicon dioxide.

• Journal of Food Hygiene and Safety
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• v.26 no.1
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• pp.43-48
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• 2011

For the application of nano-sized material in various fields, the evaluation of nano-sized material toxicity is important. In the present study, various concentrations of 200 nm-sized silicon dioxide nanoparticle suspension were intraperitonially injected into mice to identify the toxicity of silicon dioxide nanoparticle in vivo. In the hematological analysis of group II treated with silicon dioxide nanoparticle 100 mg/kg body weight, lymphocytes and monocytes were significantly different compared to the control group. In group III treated with silicon dioxide nanoparticle 200 mg/kg body weight, lymphocytes, monocytes and hemoglobin were significantly different compared to the control group. In blood biochemical analysis of group III, the concentration of AST, ALT, BUN, and creatinine were significantly different compared to the control group. Histopathologic examination of the kidney indicated a mild injury only in mice received 200 mg/kg silicon dioxide nanoparticle. According to the results of the present study, the significant differences in the hematological and blood biochemical analyses and abnormal histopathological findings in the mouse kidney may have been related to exposure to silicon dioxide nanoparticle.

• Korean Chemical Engineering Research
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• v.55 no.5
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• pp.711-717
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• 2017

A fundamental study was conducted on the dissolution of North Korean magnesite using hydrochloric acid to understand the dissolution behavior of the magnesium and impurities. The influence of the acid concentration, particle size of the magnesite, reaction temperature, and pulp density on the dissolution of magnesium, iron, calcium, aluminum, and silicon dioxide was studied. The experimental results showed that 98.5% of magnesium, 86.9% of iron, 87.3% of calcium, 23.6% of aluminum, and 20.4% of silicon dioxide were dissolved when magnesite particle sizes within the range of $75{\sim}105{\mu}m$ were reacted using 3 M HCl solution under 6% pulp density at 363 K for 3 h. The residues that remained after the dissolution were silicon dioxide, talc, and clinochlore.

• Journal of the Korean Institute of Telematics and Electronics
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• v.22 no.4
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• pp.84-91
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• 1985

Acute angle etching Process of thermally grown silicon dioxide layer has been Proposed by depositing a thin layer of silicafilm on the thermal oxide layer. As densification temper-ature of silicafilm is varied from 175$^{\circ}C$ to 1,15$0^{\circ}C$, taper angles from 3$^{\circ}$ to 40$^{\circ}$ are ob-tained. Analytical model of the acute angle etching process has also been presented and etched profile equations of the silicon dioxide layer have been derived using format's principle of lease time. Etched profiles obtained from scanning electron microscope analysis show good agreement with the theoretically calculated profiles.