• Title/Summary/Keyword: solid phase crystallization

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Crystallization of amorphous Si by pulse annealing with Ni ferritins

  • Tojo, Yosuke;Miura, Atsushi;Fuyuki, Takashi;Yamashita, Ichiro;Uraoka, Yukiharu
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.553-556
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    • 2009
  • We investigated an application of supramolecular protein, and demonstrated the metal induced lateral crystallization utilizing ferritins with Ni nanoparticles, named the "bio-nano-crystallization". So far, this method has required long time, because of this method condition based on the conventional solid phase crystallization. In this study, we applied the pulsed rapid thermal annealing to bio-nanocrystallization. As a result, we succeeded in the crystallization for a short time. We found that the TFTs characteristics were improved with decrease metal impieties in poly-Si thin films by this method.

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