• Title/Summary/Keyword: surface damage

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CMOS 소자를 위한 NiSi의 Surface Damage 의존성 (The Dependency of Surface Damage to NiSi for CMOS Technology)

  • 지희환;안순의;배미숙;이헌진;오순영;이희덕;왕진석
    • 한국전기전자재료학회논문지
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    • 제16권4호
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    • pp.280-285
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    • 2003
  • The influence of silicon surface damage on nickel-silicide (NiSi) has been characterized and H$_2$ anneal and TiN rapping has been applied to suppress the electrical, morphological deterioration phenomenon incurred by the surface damage. The substrate surface is intentionally damaged using Ar IBE (Ion beam etching) which can Precisely control the etch depth. The sheet resistance of NiSi increased about 18% by the surface damage, which is proven to be mainly due to the reduced silicide thickness. It is shown that simultaneous application of H: anneal and TiN capping layer is highly effective in suppressing the surface damage effect.

하드디스크의 표면 파손 기구에 관한 고찰 (Surface Damage Mechanism of Hard Disk)

  • 정구현;김대은;김상국
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1996년도 추계학술대회 논문집
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    • pp.716-720
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    • 1996
  • In this work the surface damage mechanism of hard disk was investigated. Experiments were peformed to simulate the contact during start and stop. Evidence of significant surface damage appeared after 20,000 cycles. It was found that despite higher hardness, the slider showed more signs of damage than the disk. Optical microscopy showed that the surface was damaged by abrasive action as well as adhesion of wear debris.

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AFM을 이용한 Head/Disk의 표면파손에 관한 고찰 (Surface damage analysis of Head/Disk interface using AFM)

  • 정구현;이성창;김대은
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 춘계학술대회 논문집
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    • pp.357-361
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    • 1997
  • In this work surface damage of head and disk of head disk drive was analysed using an Atomic Force Microscpoe. The initial damage of the disk occurred by generation of extermely small wear particles. Also it was show that wear particles tend to pile up near the front side of the slider. The surface damage mechanism of drag test and contact-start-stop test was found to be quite similar.

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AFM을 이용한 Head/Disk의 표면 파손에 관한 고찰 (A Study on the Surface Damage between Head/Disk Interfaces by Using AFM)

  • 이성창;정구현;김대은
    • 한국정밀공학회지
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    • 제15권9호
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    • pp.167-174
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    • 1998
  • In this work the surface damage of head and disk of a hard disk drive was analysed using an Atomic Force Microscope. The initial damage of the disk occurred by generation of extremely small wear particles. Also it was shown that wear particles tend to pile up near the front side of the slider. The surface damage mechanism of drag test and contact-start-stop test was found to be quite similar.

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과망간산과 옥살산 화학제염 공정 시 원전기기용 STS 304 의 부식 손상 특성 (Corrosion Damage Characteristics of STS 304 for the Nuclear Power Plant with Chemical Decontamination Conditions in Permanganic and Oxalic Acid)

  • 한민수;정광후;양예진;박일초;김기철;서범철;박주현;김성종
    • 한국표면공학회지
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    • 제50권4호
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    • pp.251-258
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    • 2017
  • This study was carried out with solution temperature variables of $75^{\circ}C$ and $90^{\circ}C$ for STS 304, which is a nuclear equipment material, in order to determine the corrosion damage behavior in chemical decontamination process using permanganic acid and oxalic acid. Then electrochemical polarization experiment, weight loss measurement, surface morphology observation and surface damage depth were measured every cycle of the decontamination process to analyze the degree of corrosion damage. As a result, the corrosion current density, weight loss, and surface damage increased as the decontamination process cycle increased, and the corrosion damage of STS 304 tended to increase. Few ${\mu}m$ pitting damage was observed on the surface observation. In 5 cycle, the elongated wormhole-type pitting damage appeared, leading to relatively large surface damage. However, there was no significant difference in the degree of surface damage resulting from the increase in the temperature of the chemical decontamination solution.

기계적 손상에 의한 실리콘 웨이퍼의 반송자 수명과 표면 거칠기와의 관계 (Relationships between Carrier Lifetime and Surface Roughness in Silicon Wafer by Mechanical Damage)

  • 최치영;조상희
    • 한국전기전자재료학회논문지
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    • 제12권1호
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    • pp.27-34
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    • 1999
  • We investigated the effect of mechanical back side damage in viewpoint of electrical and surface morphological characteristics in Czochralski silicon wafer. The intensity of mechanical damage was evaluated by minority carrier recombination lifetime by laser excitation/microwave reflection photoconductance decay technique, atomic force microscope, optical microscope, wet oxidation/preferential etching methods. The data indicate that the higher the mechanical damage degree, the lower the minority carrier lifetime, and surface roughness, damage depth and density of oxidation induced stacking fault increased proportionally.

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해수 환경에서 Al5083-H321 알루미늄 합금의 침식부식 손상에 미치는 유속의 영향과 손상 메카니즘 (Effect of Flow Rate on Erosion Corrosion Damage and Damage Mechanism of Al5083-H321 Aluminum Alloy in Seawater Environment)

  • 김영복;김성종
    • Corrosion Science and Technology
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    • 제19권3호
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    • pp.115-121
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    • 2020
  • In this study, erosion tests and erosion-corrosion tests of Al5083-H321 aluminum alloy were conducted at various flow rates in seawater. The erosion tests were conducted at a flow rate of 0 to 20 m/s, and erosion-corrosion tests were performed by potentiodynamic polarization method at the same flow rate. Characteristic evaluation after the erosion test was conducted by surface analysis. Characteristic evaluation after the erosion-corrosion test was performed by Tafel extrapolation and surface analysis. The results of the surface analysis after the erosion test showed that surface damage tended to increase as the flow rate increased. In particular, intermetallic particles were separated due to the breakdown of the oxide film at 10 m/s or more. In the erosion-corrosion test, the corrosion current density increased as the flow rate increased. Additionally, the surface analysis showed that surface damage occurred in a vortex shape and the width of the surface damage tended to increase as the flow rate increased. Moreover, damage at 0 m/s, proceeded in a depth direction due to the growth of pitting corrosion, and the damaged area tended to increase due to acceleration of the intermetallic particle loss by the fluid impact.

마모특성 및 유한요소해석을 이용한 프레스금형 손상 간접예측 (Indirect Prediction of Surface Damage for a Press Die with Wear Characteristics and Finite Element Stamping Analysis)

  • 전용준;김세호;윤국태;허영무;이태길
    • 소성∙가공
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    • 제23권1호
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    • pp.29-34
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    • 2014
  • The damage level of the die surface was predicted by estimating the surface roughness with a finite element analysis and the wear characteristics. Wear and friction tests were conducted to compare the wear characteristics for three kinds of surface treatments - CrN, TiAlN and AlCrN coatings. A prediction model was derived from the surface roughness results with respect to contact pressure and sliding speed which were obtained from the wear test. Surface roughness values for the damage regions of the die surface were compared between the experiments and the prediction model, which shows fairly good agreement with each other.

Impact Damage Behavior in Filament Wound Composite Pressure Vessel

  • Kang, Ki-Weon;Kim, Young-Soo;Choi, Rin;Lee, Mee-Hae
    • International Journal of Safety
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    • 제4권2호
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    • pp.6-11
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    • 2005
  • The goals of the paper are to understand the impact damage behavior and identify the effect of surface protective materials on impact resistance in filament wound composite pressure vessels. For these, a series of low velocity impact tests was performed on specimens cutting from the full scale pressure vessel by the instrumented impact testing machine. The specimens are classified into two types, which are with and without surface protective material. The visualization for impact damage by two different impactors is made by metallurgical microscope. Based on the impact force history and damage, the impact resistance parameters were employed,rod its validity in identifying the damage resistance of filament wound composite pressure vessel was reviewed. As the results, the impact resistance of the filament wound composites and its dependency on the surface protective material were evaluated quantitatively

이미지 분석기법을 이용한 레일표면손상 진단애플리케이션 개발 (Development of Diagnosis Application for Rail Surface Damage using Image Analysis Techniques)

  • 최정열;안대희;김태준
    • 문화기술의 융합
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    • 제10권2호
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    • pp.511-516
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    • 2024
  • 최근 제정된 궤도시설의 성능평가에 관한 세부지침에서 궤도성능평가의 평가절차 및 실시방법 등에 관한 필요사항을 제시하였다. 그러나 외관조사(육안조사)에 의해 레일표면손상의 등급이 결정되며, 점검자의 주관적인 판단으로 정성적인 평가에만 의존할 수밖에 없는 실정이다. 따라서 본 연구에서는 레일표면손상을 이용하여 레일내부결함까지 진단할 수 있는 진단애플리케이션을 개발하고자 하였다. 현장조사에서는 레일표면손상을 조사하고 패턴을 분석하였다. 또한 실내시험에서는 레일내부손상 이미지 데이터를 구축하기 위하여 SEM 시험을 이용하였으며, 균열 길이, 깊이 및 각도를 정량화하였다. 본 연구에서는 현장조사와 실내시험에서 구축한 이미지 데이터를 적용한 딥러닝 모델(Fast R-CNN)을 애플리케이션에 적용하였다, 스마트기기에서 사용이 가능한 딥러닝 모델을 이용한 레일표면손상 진단 애플리케이션(App)을 개발하여 향후 궤도진단 및 성능평가 업무에 활용 가능한 레일표면손상 스마트 진단시스템을 개발하였다.