• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.777-780
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• 2005

The high vacuum in a electron beam lithography is basic condition, because electron beam vanish by collision with air molecules in generally atmosphere. To make high vacuum state, the vacuum control valve is essential. Most vacuum control valve are manual units. So, user of manual vacuum valve must have understanding vacuum process to change from low vacuum to high vacuum state. The user of electron beam lithography are troubled with operation of manual vacuum valve, in case the vacuum chamber is frequently open. In this paper, the design and performance test of auto vacuum control valve for electron beam lithography are described. With the auto vacuum control valve, the high vacuum level can reach 2.8E-5 Torr.

• International Journal of Internet, Broadcasting and Communication
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• v.7 no.2
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• pp.28-35
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• 2015

Thin film electronic devices which brought the current mobile environment could be fabricated only under the high quality vacuum conditions provided by high vacuum systems. Especially for the development of advanced thin film devices, constant high quality vacuum as the deposition pressure is definitely needed. For this purpose, the variable conductance throttle valves were employed to the high vacuum system. In this study, the effects of throttle valve applications on vacuum characteristics were simulated to obtain the optimum design modelling of variable conductance of high vacuum system. Commercial simulator of vacuum system, $VacSim^{(multi)}$, was used on this investigation. Reliability of employed simulator was verified by the simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure of below $10^{-3}torr$. Simulation results were plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• International journal of advanced smart convergence
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• v.10 no.1
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• pp.159-165
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• 2021

Electronic devices used in the mobile environments fabricated under the plasma conditions in high vacuum system. Especially for the development of advanced electronic devices, high quality plasma as the process conditions are required. For this purpose, the variable conductance throttle valves for controllable plasma employed to the high vacuum system. In this study, we analyzed the effects of throttle valve applications on vacuum characteristics simulated to obtain the optimum design modelling for plasma conditions of high vacuum system. We used commercial simulator of vacuum system, VacSim(multi) on this study. Reliability of simulator verified by simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve schematized as the modelling of throttle valve for the constant process-pressure of below 10-3 torr. Simulation results plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably in plasma process.

• International journal of advanced smart convergence
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• v.6 no.4
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• pp.1-8
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• 2017

In this work, the effects of fairly influential factors on performance of vacuum system, such as constant pressure and outgassing effect were simulated to propose the optimum design factors. Outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for vacuum systems were suggested based on the simulation results. And, the effects of throttle valve applications on vacuum characteristics were also simulated to obtain the optimum design model of variable conductance on high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure. Simulation results were plotted as pump-down curve of chamber and variable conductance of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.12 no.2
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• pp.77-83
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• 2012

Effect of valve conductance on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSimMulti simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of vacuum valve were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust valves. Variation of valve diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of valve had the superior vacuum characteristics among the modeled systems.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.680-683
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• 2002

In this paper, it has been investigated that the design and simulation of vacuum pump driven by linear motor. Vacuum pump consists of unified plunger and piston part, coils, inlet valve and outlet valve. Operating principal of vacuum pump show that air is to flow to go inside through the inlet valve when the magnetic force (16N) is exerted, whereas, air is to flow to go outside through outlet valve when spring farce (14.8N) is exerted. The results of simulation. it was turned out that reached vacuum pressure was about -0.55 bar at 150 seconds, magnetic force was loaded with 16 Newton, displacement of actuator was about 8mm.

• The KSFM Journal of Fluid Machinery
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• v.12 no.5
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• pp.19-24
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• 2009

This paper is performed to find out the stability of water-hammer in pipe line and pump station that is happened when additional water needs demanded. At first, the water supply construction project is planned to supply $6,000\;m^3/day$ through 17.9 km pipe line. But additional demand ($1,200\;m^3/day$) happened from Cheong-ra water reservoir. In this situation, air-chamber($4\;m^3$) and vacuum breaker valve(${\varphi}100\;mm$) are needed to prevent water-hammer. When the additional water is supplied, the existing facilities (air-chamber, vacuum breaker valve) are sufficient to alleviate shock not changing capacity alteration, judging from the airspace change and rise. Therefore, there is no problem for water-hammer by installing air-chamber($4\;m^3$) and vacuum breaker valve(${\varphi}100\;mm$) at the top of Yeo-ju hill.

• Proceedings of the Korean Vacuum Society Conference
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• 1995.06a
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• pp.65-66
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• 1995

• Proceedings of the KIEE Conference
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• 2002.07d
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• pp.2683-2686
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• 2002

In this paper, it has been investigated that the design and simulation of linear motor for medical appliances. Vacuum pump consists of unified plunger and piston part, coils, inlet valve and outlet valve. Operating principal of vacuum pump show that air is to flow to go inside through the inlet valve, when the magnetic force (16N) is exerted, whereas, air is to flow to go outside through outlet valve, when spring force (14.8N) is exerted. The results of simulation, it was turned out that magnetic force was loaded with 16 Newton, displacement of actuator was about 8mm.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.47-47
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• 2000

당사는 진공 및 반도체 장비용 major components 국산화 개발을 전문으로 하는 회사로서 주로 vacuum과 gas control 부문 개발에 역점을 두고 있습니다. 현재 생산 혹은 차후 개발하고자 하는 제품은 다음과 같다. MFC power supply & Readout unit(GMC 1000, GMC 100A, GMC110A), Vacuum Controller(GVC2000, GVC1000, GVC2002), Throttle valve Controller & Pressure Display unit(GPC3000), MFC 등을 생산/판매하고 있다.