• Title/Summary/Keyword: wafer stocker

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Modularization of Stocker for 300mm Wafer Fabrication AMHS

  • Chanhee Han;Kim, Jinki;Hakkyung Sung
    • 제어로봇시스템학회:학술대회논문집
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    • 2002.10a
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    • pp.56.1-56
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    • 2002
  • $\textbullet$ Introduction $\textbullet$ Constitution and equipment of AMHS $\textbullet$ Discussion about Using Stocker $\textbullet$ Ahead developed 300mm stockers $\textbullet$ 300mm Stocker Solution-Modular Stocker $\textbullet$ Conclusion

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Experimental Study for Optimizing the Acceleration of AC Servomotor Using Finite Jerk

  • Chung, Won-Jee;Kim, Sung-Hyun;Hwan, Park-Myung;Su, Shin-Ki
    • 제어로봇시스템학회:학술대회논문집
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    • 2005.06a
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    • pp.604-609
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    • 2005
  • This paper presents an experimental study for optimizing the acceleration of AC servomotor using finite jerk (the first derivative of acceleration). The acceleration optimization with finite jerk aims at generating the smooth velocity profile of AC servomotor by experimentally minimizing vibration resulted from the initial friction of servomotor. The stick-slip motion of AC servomotor induced by initial friction can result in the positional errors that are not good for high-precision devices such as the assembly robot arms to be used in a 300mm wafer or a LCD (Liquid Crystal Display) stocker system. In this paper, experiments were made by using a PM (Permanent Magnet) type AC servomotor with MMC(R) (Multi Motion Controller) programmed in Visual C++(R). The experiments have been performed for finding the optimal duration time of finite jerk in terms of the minimization of vibration displacements when both the magnitude of velocity and the allowable acceleration are given. We have compared the proposed control with the conventional control with trapezoidal velocity profile by measuring vibration displacements. The effectiveness of the proposed control has been verified in that the experimental results showed the decrease of vibration displacement by about 24%.

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