• Applied Chemistry for Engineering
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• v.10 no.8
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• pp.1099-1103
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• 1999

The surface of an ${\alpha}$-alumina tube was coated with zirconium modified polycarbosilane(PZC) by dip-coating method. Then the tube was pyrolyzed at 573~823 K. The prepared inorganic composite membrane was in $1{\mu}m$ thickness and had no pinholes larger than several nm. For the pyrolyzed inorganic composite membrane, the permeation test of He, $N_2$, $CO_2$, and $O_2$ was performed at 303~423 K. The gas permeation and separation factor were increased with increasing permeation temperature. The permeation for gases was controlled by the activated diffusion mechanism. The separation factor of $CO_2$, to $N_2$was 4.9 at 363 K on the composite membrane pyrolyzed at 823 K and its value was higher than that of He and $O_2$.