Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

A Study on the Measurement of Magneto-Plasma Parameters by Probe Method

자화 플라즈마 파라메타 측정에 관한 연구

  • Sung, Y.M. (Department of Electrical Engeering, Pusan National University) ;
  • Lee, C.Y. (Department of Electrical Engeering, Pusan National University) ;
  • Son, J.B. (Pusan technical college) ;
  • Shin, J.H. (Dong Eui University) ;
  • Kwak, Y.S. (Department of Electrical Engeering, Pusan National University) ;
  • Park, C.H. (Department of Electrical Engeering, Pusan National University)
  • 성열문 (부산대학교 공과대학 전기공학과) ;
  • 이창영 (부산대학교 공과대학 전기공학과) ;
  • 손제봉 (부산전문대) ;
  • 신중홍 (동의대학교) ;
  • 곽영순 (부산대학교 공과대학 전기공학과) ;
  • 박정후 (부산대학교 공과대학 전기공학과)
  • Published : 1993.07.18
Download PDF
⟨ Previous Next ⟩

Abstract

Magneto plasma has been widely used for controlled fusion and material processings such as etchings, depositions, and sputterings in the various fields. For controlling and guaranting the equipment, precision plasma parameters must be gained. In this experiment, using single probe and double probes, we investigated the effect of magnetic field on magneto plasma. As a result of this experiment, we found the fact that single probe was largely affected by magnetic field for measuring magneto plasma parameters, while double probe was not.

Keywords