Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Characteristics of rapid-thermal-annealed $YBa_2Cu_3O_{7-x}$ high $T_c$, superconducting thin-films

급속 열처리에 의한 $YBa_2Cu_3O_{7-x}$ 고온 초전도체 박막의 특성

  • 신현용 (플로리다 주립대학교 전기공학과) ;
  • 박창엽 (연세대학교 전기공학과) ;
  • 김규수 (울산전문대 전자공학과)
  • Published : 1993.07.18
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Abstract

The superconducting thin films of $YBa_2Cu_3O_{7-x}$ were deposited on (100) sapphire substrates at low temperature by rf magnetron sputtering and annealed at $895^{\circ}C$ for 60 sec. using rapid-thermal-annealing(RTA) technique. The films were characterized by SEM, four-point probe resistivity measurement, XRD, and AES. The RTA processed HTS films had a preferential structure with c-axis normal to the substrate surface.

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