Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1993.07a
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- Pages.65-67
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- 1993
The Thin Silicon Films ppreppared by Thermal- and pphoto-CVD at Low Tempperatures
- Chung, Chan-Hwa (Department of Chemical Engineering, Seoul National University) ;
- Han, Jae-Hyun (Department of Chemical Engineering, Seoul National University) ;
- Moon, Sang-Heup (Department of Chemical Engineering, Seoul National University)
- Published : 1993.07.01
Abstract
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